In2Se3 is a polymorphous metal-chalcogenide system1 where each phase exhibits dramatically different functional properties. α-In2Se3 is a two-dimensional, ferroelectric semiconductor2,3 and has shown promise in low-power, neuromorphic electronic devices4,5. β-In2Se3 is a two-dimensional, centrosymmetric semiconductor and has shown promise in photodetectors6. γ-In2Se3 is a three-dimensional, defect- wurtzite wide bandgap semiconductor that has shown promise as a precursor layer for CuInSe2 solar cells7. Considered together, the bandgaps of these materials range from 1.3eV to 2.5eV8. Understanding how to synthesize phase-pure thin-films of In2Se3 is of interest to harness the properties of these materials for applications in electronic devices.α-In2Se3 is thermodynamically stable below 200 oC and transitions to the 2D, centrosymmetric β-In2Se3 phase upon heating above 200 oC1. While the β to α-In2Se3 phase transition is achievable in bulk synthesis via slow cooling2, the β to α-In2Se3 phase transition does not occur as readily in thin-films. Recent studies on thin-film synthesis of In2Se3 have demonstrated β- and/or γ-In2Se3 films at temperatures above the thermodynamic stability range of α-In2Se3 (200 oC). Two reports from the last two years demonstrate large-area synthesis of β-In2Se3 thin-films metal-organic chemical vapor deposition and molecular beam epitaxy (MBE) on sapphire at temperatures greater than 300 oC6,9. Another study reported MBE synthesis of metastable, strained, mixed phase β/γ-In2Se3 films on Si(111) substrates at 180 oC10. One study from 2018 claims deposition of large-area α-In2Se3 thin-films on graphene at a substrate temperature of 250 oC via molecular beam epitaxy; however, it is difficult to distinguish the α from β phase by the Raman spectra and TEM micrograph along the c-axis.In this study we demonstrate thin-film synthesis of In2Se3 over a wide array of synthesis conditions via molecular beam epitaxy. We systematically investigate the effects of substrate temperature, cooling rate after deposition, substrate surface, Se/In flux ratio, and precursor type on the structure and properties of In2Se3 films. We characterize the crystalline phase, stoichiometry, and crystal morphology via Raman Spectroscopy, X-ray Photoelectron Spectroscopy and Atomic Force Microscopy, respectively.(1) Okamoto, H. In-Se ( Indium-Selenium ). J. Phase Equilibria 2004, 25 (2).(2) Küpers, M.; Konze, P. M.; Meledin, A.; Mayer, J.; Englert, U.; Wuttig, M.; Dronskowski, R. Controlled Crystal Growth of Indium Selenide, In2Se3, and the Crystal Structures of α-In2Se3. Inorg. Chem. 2018, 57, 11775–11781.(3) Xiao, J.; Zhu, H.; Wang, Y.; Feng, W.; Hu, Y.; Dasgupta, A.; Han, Y.; Wang, Y.; Muller, D. A.; Martin, L. W.; et al. Intrinsic Two-Dimensional Ferroelectricity with Dipole Locking. Phys. Rev. Lett. 2018, 120 (22), 227601.(4) Tang, B.; Tang, B.; Hussain, S.; Xu, R.; Cheng, Z.; Liao, J.; Chen, Q. Novel Type of Synaptic Transistors Based on a Ferroelectric Semiconductor Channel. ACS Appl. Mater. Interfaces 2020, 12 (22), 24920–24928.(5) Wang, L.; Liao, W.; Wong, S. L.; Yu, Z. G.; Li, S.; Lim, Y. F.; Feng, X.; Tan, W. C.; Huang, X.; Chen, L.; et al. Artificial Synapses Based on Multiterminal Memtransistors for Neuromorphic Application. Adv. Funct. Mater. 2019, 29 (25), 1–10.(6) Claro, M. S.; Grzonka, J.; Nicoara, N.; Ferreira, P. J.; Sadewasser, S. Wafer-Scale Fabrication of 2D β-In2Se3 Photodetectors. Adv. Opt. Mater. 2020, 2001034, 1–9.(7) Ashok, A.; Regmi, G.; Velumani, S. Growth of In2Se3 Thin Films Prepared by the Pneumatic Spray Pyrolysis Method for Thin Film Solar Cells Applications. 2020 17th Int. Conf. Electr. Eng. Comput. Sci. Autom. Control. CCE 2020 2020, 2–7.(8) Li, J.; Li, H.; Niu, X.; Wang, Z. Low-Dimensional In2Se3 Compounds: From Material Preparations to Device Applications. ACS Nano 2021, 15 (12), 18683–18707.(9) Zhang, X.; Lee, S.; Bansal, A.; Zhang, F.; Terrones, M.; Jackson, T. N.; Redwing, J. M. Epitaxial Growth of Few-Layer β-In2Se3 Thin Films by Metalorganic Chemical Vapor Deposition. J. Cryst. Growth 2020, 533 (December 2019), 125471.(10) Shen, Y. F.; Yin, X. B.; Xu, C. F.; He, J.; Li, J. Y.; Li, H. D.; Zhu, X. H.; Niu, X. Bin. Growth and Structural Characteristics of Metastable β-In2Se3 Thin Films on H-Terminated Si(111) Substrates by Molecular Beam Epitaxy. Chinese Phys. B 2020, 29 (5).
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