The uniaxial deformation of single and multilayered crystals of polyoxymethylene was carried out and found that preference direction for crack formation was normal to the direction of drawing. The cracks are found to open very little on crystal well adhering to substrate while relatively more on the upper layer of multilayered crystals. Multilayered crystals, formed either by stacking of lamellae or from screw dislocation mechanism show similar behaviour of deformation. From the various results, it has been revealed that predominant mode of deformation of crystals involve combination of micronecking, “brittle” fracture of lamellae and formation of fibers, buckling in draw direction and shear along slip line. The development of mosaic structure in deformed crystals can be attributed to the result of cooperative micronecking and slip. The slip lines developed over POM crystals are always straight and parallel to growth faces irrespective of draw directions. Some of the characteristic features observed during the deformation are formation of (i) buckles parallel to draw direction, (ii) β-fibers which can be considered as highly deformed stage of lamella, (iii) fibers having “beaded” structure and (iv) a fiber by coalescence of fibers coming from different lamellae or from same lamella. A probable mechanism of formation of an artifact during the replicating process which appears as thinning of lamellae due to molecular tilting is advanced. Utilization of sodium carboxy Methyl Amylose in the replication process proved to be advantageous and in fact, most of the micro details of deformed crystals are retained even at a higher magnification.