Thin thermoresponsive hydrogel films of poly(N-isopropylacrylamide) end-capped with n-butyltrithiocarbonate (nbc-PNIPAM) are prepared on solid supports having silicon oxide surfaces with spin-coating. The film thickness is varied from 5 to 240 nm. As measured with optical microscopy, atomic force microscopy, and X-ray reflectivity, the films are homogeneous and smooth for films thicker than 5 nm. Microbeam grazing-incidence small-angle X-ray scattering (µGISAXS) shows that these nbc-PNIPAM films are physically cross-linked gels, where the end-group domains form the physical cross-links with a defined nearest-neighbor distance of 25 nm. Along the surface normal, with µGISAXS the presence of long-ranged correlations between substrate and film surface is detected. The thinner the nbc-PNIPAM films are, the stronger is the response to swelling in saturated water vapor atmosphere. A swelling up to a factor of 6.5 as compared to the dry film and a factor of 2.9 as compared to the collapsed film is found. The tra...