Saha-Boltzmann Plot Research Articles

Simplified LIBS-based intensity-ratio approach for concentration estimation (SLICE): an approach for elemental analysis using laser induced breakdown spectroscopy.

We propose what we believe to be a new approach for elemental analysis using laser induced breakdown spectroscopy (LIBS). This method offers enhanced convenience and simplicity for elemental analysis as it eliminates the necessity of Boltzmann/ Saha-Boltzmann plot. It is an intensity-ratio based approach that provides several notable advantages. One of the key benefits is its ability to perform comprehensive elemental analysis using only a few spectral lines; specifically, only n + 1 emission lines are sufficient for a sample containing n elemental species. This offers a great flexibility in the choice of emission lines which do not suffer from self-absorption. Further, high accuracy can be obtained as many repeated estimations from a single measurement are possible. We demonstrate the theory and working procedure of this technique by experimentally recording the data of two samples (binary and ternary copper alloys). A nanosecond Nd:YAG pulsed laser of ∼7 ns pulse duration and 532 nm incident wavelength is used. The results are in good agreement with CF-LIBS and Energy-dispersive X-ray spectroscopy (EDS).

Accurate determination of plasma temperature and electron density using a reference target: one-point calibration LIBS elemental analysis ofalloy samples.

Elemental analysis of aluminum alloy samples with calibration-free laser-induced breakdown spectroscopy (CF-LIBS) encounters two difficulties: the inconvenience of determining accurate temperature and electron density of the plasma and the influence of self-absorption of the observed aluminum lines. To solve this problem, target-enhanced orthogonal double-pulse laser-induced breakdown spectroscopy in the reheating regime combined with the one-point calibration method was proposed in this work. A mixture of copper powders and K H C O 3 grains was pressed to a pellet and used as the target. Accurate determination of plasma temperature and electron density can be obtained using a reference target. The plasma temperature could be determined with Saha-Boltzmann plot of copper, and the electron density of the plasma could be determined according to the Stark broadening of the H α line of hydrogen. Aluminum alloy samples were analyzed with a relative error of better than 0.02% for a major element. This approach provides a convenient way to determine the temperature and electron density of the plasma more accurately and is able to reduce the influence of self-absorption, which is helpful for realizing quantitative elemental analysis of different samples while using a calibration-free algorithm.

Experimental Study on the Temporal Evolution Parameters of Laser–Produced Tin Plasma under Different Laser Pulse Energies for LPP–EUV Source

The laser–produced plasma extreme ultraviolet (LPP–EUV) source is the sole light source currently available for commercial EUVL (extreme ultraviolet lithography) machines. The plasma parameters, such as the electron temperature and electron density, affect the conversion efficiency (CE) of extreme ultraviolet radiation and other critical parameters of LPP–EUV source directly. In this paper, the optical emission spectroscopy (OES) was employed to investigate the time–resolved plasma parameters generated by an Nd:YAG laser irradiation on a planar tin target. Assuming that the laser–produced tin plasma satisfies the local thermodynamic equilibrium (LTE) condition, the electron temperature and electron density of the plasma were calculated by the Saha–Boltzmann plot and Stark broadening methods. The experimental results revealed that during the early stage of plasma formation (delay time < 50 ns), there was a significant presence of continuum emission. Subsequently, the intensity of the continuum emission gradually decreased, while line spectra emerged and became predominant at a delay time of 300 ns. In addition, the evolution trend of plasma parameters, with the incident laser pulse energy set at 300 mJ, was characterized by a rapid initial decrease followed by a gradual decline as the delay time increased. Furthermore, with an increase in the incident laser pulse energy from 300 mJ to 750 mJ, the electron temperature and electron density of laser–produced tin plasma exhibiting a monotonically showed increasing trend at the same delay time.

Impact of intensity error on temperature estimation in laser-induced breakdown spectroscopy: a numerical study

Laser-induced breakdown spectroscopy (LIBS) is a cutting-edge technique for the compositional analysis of multi-element materials. Under standard circumstances for laser-induced plasma (T e = 1 eV and N e = 1016 cm−3), we simulated the emission spectrum of a binary alloy (with 70 wt.% Cu–30 wt.% Al). We used the Saha ionization equilibrium formulas to calculate the population of neutral and ionized species of each constituent element, and the Boltzmann distribution to estimate the intensities of emission lines with radiative transition probabilities. The Stark broadening equation is then used to determine the line broadening, yielding a Lorentzian profile for each line. The sum of line emissions of all constituent species will approximate the alloy’s LIBS spectra in an assumption of ideal analytical plasma. Then, we generated random errors in the intensities of spectral lines ranging from 5% to 35%. To investigate temperature estimation accuracy, we utilized three well-established approaches: the Boltzmann plot (BP) method, the Saha–Boltzmann plot (SBP) method, and the Multi-elemental SBP (MESBP) method. As intensity error increases from 5% to 35%, the estimated temperature in the BP method deviates from 0.25% to 18.3%. Whereas the intensity error is almost unaffected using the SBP method and the MESBP method. The temperature deviation is less than 2% in both situations. This study is relevant to calibration-free LIBS, in which the exact temperature determination is crucial for the abundance estimation of trace, major, and minor elements.

Optical emission spectroscopy of an industrial thermal atmospheric pressure plasma jet: Parametric study of electron temperature

The plasma parameters of an industrial atmospheric pressure plasma jet (APPJ) are measured as a function of the electric power of the plasma generator, the gas flow, and the distance from the jet nozzle exit. The APPJ device operates an electric discharge under Argon gas flow resulting into a continuous Argon plasma jet in the kW power range expanding into ambient air. The plasma temperature Te and electron number density Ne are determined by optical emission spectroscopy (OES) analyzing up to 17 emission lines of neutral Ar (I) and singly-ionized Ar (II) species using the Saha-Boltzmann plot (SBP) method. For the accurate determination of plasma parameters a methodology is developed to overcome fundamental limitations in OES of Argon plasma that is due to the strongly different intensities of Ar (I) and Ar (II) emission lines. The most significant step is the use of spectral bandpass filters in the optical collection system. The experimental parameters of the jet device are playing a crucial role for APPJ applications (e.g. thermal load to the workpiece, plasma chemistry interaction etc.). We measure Te and Ne in dependence of the experimental parameters and obtain consistent and accurate values of Te = 9000 ± 150 K and Ne = 5 × 1015 cm−3 (typ.). For comparison, plasma characterization using only the neutral Ar lines gives inaccurate and inconsistent Te values. This highlights the importance of using also the ionic Ar lines. The developed methodology may be diversified and applied also for OES of other rare gas plasma.

Chemometrics and Spectroscopic Analyses of Peganum harmala Plant’s Seeds by Laser-Induced Breakdown Spectroscopy

In the present work, the rapid identification of elements and their relative chemical composition in various Peganum harmala seed samples were investigated using a calibration-free laser-induced breakdown spectroscopy technique (CF-LIBS). A pulsed Nd:YAG laser-source with a 5 ns pulse-duration, and 10 Hz pulse repetition rates providing 400 and 200 mJ energy at 1064 and 532 nm wavelength, respectively, was focused on the Peganum harmala seed samples for ablation. A LIBS 2000+ spectrometer within the wavelength range (200 to 720 nm), emission-spectra were recorded. The measured spectra of the Peganum harmala sample gives spectral lines of Carbon (C), Magnesium (Mg), Lithium (Li), Sodium (Na), Calcium (Ca), Silicon (Si), Iron (Fe), Strontium (Sr), Copper (Cu), Potassium (K), and Lead (Pb). A CF-LIBS technique has been employed for the compositional study of the elements exist in the Peganum harmala seed samples. The measured results demonstrate that C, Mg, and Ca are found to be major elements in the Peganum harmala seed samples with compositions of ~36.64%, ~24.09%, and ~19.03%, respectively. Along with the major elements, the elements including Li, Na, Si, K, Fe, and Sr were identified as minor elements with compositions of ~2.87%, ~2.33%, ~3.72%, ~7.17%, ~2.83%, and ~1.14%, respectively. Besides Cu (~8.07 μg/g), and Pb (~1.10 μg/g) elements were observed as trace elements exist in the Peganum harmala seed samples. Furthermore, the electron number density including the plasma excitation-temperature were calculated using the stark-broadening line profile method and the Saha–Boltzmann plot method, respectively. The plasma parameters versus laser-irradiance and the distance from the sample were further investigated. Moreover, a principal component analysis (PCA) method was also utilized to the spectral data obtained by using LIBS to discriminate various seed samples with four classes, namely, α, β, γ, and Δ. Three principal-components (PCs) calculated from eigenvalues of score matrix described 87.6%, 4.6%, and 2.5% of total variance for PC1, PC2, and PC3, respectively. The LIBS spectral data variance covered by the initial 3 PCS was found as ~94.7% of total variance. The PCA results have successfully demonstrated the different classes of the Peganum harmala seed samples based on the different doping compositional ratios of the Zn element. This study confirmed the feasibility and ability of LIBS and PCA for the rapid analysis of Peganum harmala seed samples. Finally, the results achieved using CF-LIBS were incorporated with those obtained from the XRF and EDX analytical techniques.

Quantitative analysis of elemental concentrations of aluminum alloys using calibration-free femtosecond laser-ablation spark-induced breakdown spectroscopy

In this work, the calibration-free (CF) methodology combined with femtosecond laser-ablation spark-induced breakdown spectroscopy (fs LA-SIBS) was applied for the quantitative analysis of elements in aluminum alloy. A femtosecond laser (800 nm) operated at a repetition rate of 1 kHz with a pulse width of 35 fs was used as the laser-ablation source, and the plasma emission was enhanced by the spark discharge. Spectra were acquired using a compact fiber spectrometer coupled to a charge-coupled device and recorded at 200–500 nm. The aluminum alloy sample was mounted on a two-dimensional motion platform, and the effect of the sample moving speed on the spectral intensity was investigated. To evaluate the analysis performance of this technique, five standard aluminum alloy samples with certified elemental concentrations were tested. The average estimated electron density from these five transitions was (1.5 ± 0.3) × 1017 cm−3, which was determined by fitting the ion spectrum of Al II (281.62 nm) with Lorentz fitting. The plasma temperature was calculated to be 6300 ± 300 K using Saha–Boltzmann plots under the local thermodynamic equilibrium state. Trace elements with the content of <0.1% were detected by the proposed technique, and the analysis error of Al was <0.3%. This study shows that the CF fs LA-SIBS technique can be employed for quantitative analysis of major, minor, and trace elements in multi-composition alloys.

Influence of the laser wavelength on the self-absorption of Cu and Ni spectral lines by using LIBS technique

The current research is focusing on generation a plasma from a standard copper-nickel alloy using a Q-switched Nd:YAG laser with its fundamental wavelength (1064 nm) and its second harmonic generation (532 nm) in the air at atmospheric pressure. The results showed that the used wavelengths have a crucial effect on LIBS self-absorption implying choosing the right laser wavelength in the analysis as the calculated plasma temperatures were different upon using Cu and Ni spectral lines, one at a time. To get plasma temperatures with good confidence, the calculated plasma temperatures by two methods; Boltzmann plot (using Cu lines) and Saha-Boltzmann plot (using Ni lines) were corrected against self-absorption. Finally, a shorter excitation wavelength (532 nm) was shown to have spectral lines with higher electron densities since the absorbed energy by the ablated target is higher at 532 nm than that at 1064 nm.

A Brief Review of Calibration-Free Laser-Induced Breakdown Spectroscopy

The calibration-free laser-induced breakdown spectroscopy (CF-LIBS) technique requires no reference samples of the same matrix to establish the calibration curve, not affected by the matrix effect. In recent years, the CF-LIBS technology has greatly progressed, and the accuracy of quantitative analysis has gradually improved. The purpose of this review was to introduce the CF-LIBS fundamental and modified algorithms. The Boltzmann plot method, Saha–Boltzmann plot method, and column density Saha–Boltzmann plot (CD-SB) method were discussed. Moreover, as a critical factor in CF-LIBS, the self-absorption effect and its influence on CF-LIBS were also introduced. CF-LIBS has been applied in a variety of fields, such as environmental protection, explorations of space, cultural heritage preservation, and geological survey, which were also described in this review.

Radiative transition probabilities of neutral and singly ionized Europium estimated by laser-induced breakdown spectroscopy (LIBS)

Laser-induced breakdown spectroscopy (LIBS) is a versatile technique for compositional analysis for solids, liquids, or gasses. LIBS is an asset for the quantitative or qualitative analysis of resource limited materials like actinides and rare earths because it is quasi-nondestructive. Two Eu2O3 pellets were synthesized to be a test and validation set, respectively. Spectral lines identified from the National Institute of Standards and Technology database with fundamental data reported were used to form Saha-Boltzmann plots. The Saha-Boltzmann plots were used to determine the plasma temperatures and electron densities of the laser-induced plasmas for both samples. These Saha-Boltzmann plots were then used to calculate previously unreported transition probabilities associated with identified peaks. The transition probabilities presented in this paper provide the capability for calibration free LIBS to be performed more readily on europium samples and the spectroscopic analysis of stellar bodies. Eight previously unreported transition probabilities are presented in this paper; five for Eu I and three for Eu II. The transition probabilities for Eu I ranged from 0.172 to 7.38 × 107 s−1 and those for Eu II ranged from 1.56 to 6.75 × 107 s−1.

Study of the effects of detection times in laser-induced breakdown spectroscopy and missed variation of plasma parameters with gate width

The time control of signal acquisition in laser-induced breakdown spectroscopy (LIBS) is critical to the quantification of elements in samples. Upon interacting with the laser pulse, the plasma expands and then cools rapidly in tens of microseconds, undergoing temperature variations of over 50,000 K. In the LIBS technique, the signal acquisition is controlled with the delay time, which is the time between the emission of the laser pulse and the reading of the spectrum, and the gate width, which is the integration time of the spectrometer. Although the relationship of the delay time with the measured plasma temperature and electron density is well-known in the literature, little is known about how these parameters vary with different gate widths. Thus, the objective of this work was to evaluate how the measured plasma parameters and the signal-to-noise ratio (SNR) of an atomic line change with different values of delay time and gate width. For this study, two sets of samples were prepared: i) pure NaCl and ii) NaCl with 20 wt% H3BO3, and at concentrations of 1 and 3 wt% Ca. TiO2 and CuSO4 were also added to these samples to facilitate plasma temperature and electron density calculations, which were carried out using a Saha-Boltzmann plot corrected with the one-point calibration method. The results of this study indicated that the measured plasma parameters did not vary with the gate width, even though the SNR of the Ca I line at 643.9 nm increased as the gate width did. Furthermore, the use of the concept of local thermodynamic equilibrium was verified even with long gate widths (≥ 20 μs), except for the 4 μs delay time. Studies with other samples and other combinations of LIBS system parameters, e.g., at sub atmospheric pressure, should be done to confirm and expand these findings.

Quantitative analysis of chlorine in cement pastes based on collinear dual-pulse laser-induced breakdown spectroscopy

On-line detection of chlorine in cement is the key to evaluate the corrosion of the reinforced concrete inside the structure. A collinear dual-pulse LIBS system based on two nanosecond lasers with a total energy of 30 mJ is developed to detect the chlorine in cement. The key parameters of the dual-pulse LIBS system are optimized to improve the detection sensitivity of trace chlorine element in cement pastes, and the optimal values of the parameters are obtained to be: 4 L/min helium gas flow rate, 2000 ns inter-pulse delay, 800 ns gate delay, 19 mJ/11 mJ pulse energy ratio, and 42.8 mm lens-to-sample distance. After the optimization of the dual-pulse system, the signal-to-noise ratio of the trace chlorine emission line at 837.6 nm has been improved from 1.75 to 2.68 for a sample containing 0.706 wt% chlorine. The temperatures of plasma are obtained based on Saha-Boltzmann plot for exploring the plasma radiation features in the dual-pulse system. The results show that the plasma temperature which is influenced by laser irradiance and parameters of the double pulse configuration, is closely related to the signal-to-noise ratio of chlorine spectrum line. Sixteen standard cement pastes made from a series of sodium chloride solutions with various concentration are used for LIBS calibration. Two calibration methods including internal standardization and partial least squares regression are adopted for determining chlorine concentrations within a series of standard cement pastes, and the limit of detection based on internal standardization model is calculated to be 103.4 ppm. The prediction performance of IS and PLSR is evaluated by Leave-One-Out Cross-Validation with the root mean square error of calibration of 0.0910 and 0.0859, respectively.

Multi-element Saha Boltzmann plot (MESBP) coupled calibration-free laser-induced breakdown spectroscopy (CF-LIBS): an efficient approach for quantitative elemental analysis

MESBP coupled CF-LIBS approach for quantitative elemental analysis of multi-element samples.

Diagnosis of lightning return stroke channel temperature according to different band spectra

The spectral data of a lightning discharge process are captured by a high-speed slit-less grating spectrograph. Based on the plasma spectrum theory, the lightning return stroke channel temperature is estimated according to the spectral information of the different bands. The results show that the average temperatures of the lightning return stroke channel estimated by the Boltzmann plot method are 43270, 17660 and 17730 K, respectively, when the spectral line group of the single ionized nitrogen atom (NII), neutral oxygen atom (OI) and neutral nitrogen atom (NI) are selected respectively. The average temperature of the lightning return stroke channel is 24770 K, which is estimated based on the Saha-Boltzmann plot method by using NII and NI spectral line groups. Based on the lightning channel corona sheath model and the spectral radiation theory, it can be inferred that the temperature obtained by using only NII spectral line group should be the temperature of the lightning return stroke channel core, and the temperature obtained by using only NI or OI spectral line group should be the temperature of the corona sheath around the lightning return stroke channel core. Using both NII and NI spectral line groups, the obtained temperature should be the average temperature of the entire channel section (including the channel core and corona sheath) in the exposure time.

Self-absorption effect in calibration-free laser-induced breakdown spectroscopy: Analysis of mineral profile in Maerua oblongifolia plant

Maerua oblongifolia is a traditional medicinal plant served for health advancing effects due to rich nutrients. The compositional analysis of this plant was carried out using the calibration-free laser-induced breakdown spectroscopy (CF-LIBS). The laser-produced plasma was generated on the pelletized samples of roots, stem, leaves, and fruits to record and analyze the corresponding emission spectra. The spectroscopic analysis revealed the presence of elements such as Na, Ca, Mg, K, Al, Fe, Li, Si, Sr, Zn, Ba, and Rb. As a prerequisite of quantitative analysis, and for the determination of reliable plasma parameters, a simplified approach was used to correct the self-absorption in the emission lines to determine the plasma temperature using Boltzmann and Saha-Boltzmann plot methods. This procedure was further used to develop the modified Saha-Boltzmann plot, which uses the columnar densities of emitting species at the ground state to determine the plasma temperature. Finally, the one-line CF-LIBS was used to quantify the concentration of all the perceived constituent elements. LIBS results were cross-validated with that obtained from ICP-MS.

Determination of Micronutrients and Toxic Elements in Moringa Oleifera Leaves by Calibration Free Laser-Induced Breakdown Spectroscopy (LIBS)

The Moringa oleifera tree, including the leaves, flowers, pods, and seeds, is highly nutritious and useful for the prevention and control of various diseases. Here we have probed the micronutrients in Moringa oleifera leaves using laser-induced breakdown spectroscopy (LIBS). The time-resolved and time-integrated LIBS data reveal the presence of Ca, Mg, K, C, Si, Fe, Al, Ti, Sr, Na, H, O, and Li. The plasma temperature and electron number density required for the elemental composition analysis were estimated to be (6375 ± 500) K from the Saha-Boltzmann plot and (1.0 ± 0.2) 1017 cm−3 from the Stark broadened Hα line, respectively. Elemental analysis of the samples was performed using one-line calibration free LIBS (CF-LIBS). The results reveal that C is the major element together with Ca, Mg, K, Fe Na, Al, Ti, Sr, and Li as micronutrients. The concentrations of the micronutrients determined by CF-LIBS were validated by inductively coupled plasma – optical emission spectrometry (ICP-OES). LIBS has been demonstrated to be a practical candidate for the detection of potentially toxic elements (Li, Al, Si, and Sr) as well as for the compositional analysis.

Spatiotemporal and emission characteristics of laser-induced plasmas from aluminum-zirconium composite powders

Laser-induced plasmas and reactions therein depend on the ablated target's chemical composition and morphology. Recently, we have characterized plasma properties such as spatiotemporal morphology, electron density, species temperature within the plasma, ionization degree, etc. for pure Al under variations in morphology. Here, we utilize a bi-metal powder system to study similar characteristics as a function of powder chemistry. Micron-sized ball milled Al/Zr composites of three chemistries (3Al:2Zr, Al:Zr, and Al:3Zr) are compared to similarly-sized pure Al, pure Zr, and a mixture of Al + Zr powder. We find that the introduction of increasing concentrations of Zr has several interesting effects on the plasma compared to pure Al, including a dramatic increase in the electron density (to ~3–5 × 1020 cm−3), and the earlier onset of ZrO emission bands which have a higher disassociation energy and are thermodynamically preferred over AlO at high temperatures. Differences in plume morphology, the spatial distribution of molecular species, and the emission intensities of ZrO, Zr I and Al I were observed for Al + Zr and ball-milled Al:Zr samples, indicating the influence of microstructure on the chemical reactions. We measured plasma temperatures using the Saha-Boltzmann plot method; the composites demonstrate higher temperatures than pure Zr, Al + Zr mixtures, and pure Al. We observe only minor differences in temperature as a function of increasing Zr-content within the composites. This work continues to build on our understanding of the relationships between plasma properties and microsecond-timescale chemical reactions of reactive materials.

Assessment of laser induced breakdown spectroscopy accuracy for determination of hydrogen accumulation in tungsten

• The influence of various factors on a relative error of determination of H content in a sample by LIBS using the Saha-Boltzmann (SB) plot is investigated. • It is shown that for typical LIBS pulse parameters (10 9 W/cm 2 , 12 ns duration) the error can be quite large, about 70%. • Even in the case of largest error SB plot remains a straight line making it difficult to anticipate the error from the experimental results. • The pulse power increase tends to reduce the relative error. Laser-induced breakdown spectroscopy (LIBS) is an in situ method of determining hydrogen (H) content in plasma-facing materials in tokamak fusion reactors. Observing radiation from the plasma plume produced by a powerful laser pulse during the target exposition characterizes the sample composition. This is typically accomplished using the Saha-Boltzmann (SB) plot technique under local thermodynamic equilibrium (LTE) conditions. Despite many experimental studies dedicated to applying LIBS to determine H isotope retention in fusion reactor materials, the current understanding of this method’s intrinsic accuracy remains inadequate. In this report, we use numerical calculations to estimate the relative error of determining H content in a sample using LIBS. As an example. we consider LIBS to study a W sample loaded with H in a vacuum. Under typical LIBS pulse parameters (10 9 W/cm 2 and 12 ns duration), the error can be quite large, approximately 70%. We demonstrate that the error tends to decrease as the laser pulse intensity increases. Various factors contributing to the relative error are examined and their dependence on the LIBS plasma parameters is discussed. The SB plot remains a straight line even when LTE conditions are violated, making it difficult to anticipate the experimental results’ error.

CF-LIBS quantification and depth profile analysis of Be coating mixed layers

• LIBS & SIMS depth profiles analysis of Be-based layers containing C, O, H, & D-fuel. • Deconvolution of D α and H α lines by Lorentz fitting for the quantification of D & H. • MESB plot and Stark broadening of H α line for the evaluation of T e and n e , resp. • Determination of the fuel content by CF-LIBS and comparison with TOF-ERDA and IBA. • Study of the variation of the elemental composition when changing T e and n e . A remote LIBS system is being considered as an analysis tool in ITER for monitoring the erosion and fuel retention in the first wall. This necessitates further investigation of the performance of LIBS for thick co-deposited layers consisting of ITER-relevant materials. The main goal of this work is determining the fuel content of the samples and D depth profile by LIBS and to compare the results with those obtained by other methods. The studied samples were Be-based mixed coatings on W substrates, containing D and in some cases C, O, or both. These impurities are relevant not only for ITER, but also for other fusion devices, such as JET-ILW. The laser ablation was performed at 10 mbar Ar pressure using a 5 ns pulse Nd:YAG laser at 1064 nm. Suitable Be and Ar spectral lines were employed for the evaluation of the electron temperature of the plasma using multi-elemental Saha-Boltzmann (MESB) plots. The electron density was obtained from the Stark broadening of the D α and H α spectral lines following deconvolution. The average elemental content of each coating was then obtained by calibration-free LIBS (CF-LIBS) and are in agreement with other techniques (TOF–ERDA, IBA).

Quantitative analysis of titanium alloys using one-point calibration laser-induced breakdown spectroscopy

The development of real-time and on-line quantitative composition analysis is desired for the products quality improvement in the metal producing and processing industries. Accuracy is still a challenge for classical calibration-free laser-induced breakdown spectroscopic (CF-LIBS) quantitative analysis due to the influence of the inaccurate plasma temperature calculations, uncertainties associated with Einstein coefficients and imprecise efficiency of spectral detection system. In this paper, we present an improving quantitative analysis for both major and minor elements in titanium alloys using the one-point calibration LIBS (OPC-LIBS) method. In OPC-LIBS, one matrix-matched standard sample of known composition was used to synchronously correct the essential experimental and spectroscopic parameters. A Saha–Boltzmann plot covering a large energy range was used to obtain more accurate plasma temperature and electron density values. From the comparison results, the OPC-LIBS method leads to a more accurate determination of the titanium alloy composition compared with the conventional CF-LIBS approach.