Optical emission spectroscopy of an industrial thermal atmospheric pressure plasma jet: Parametric study of electron temperature

Abstract

The plasma parameters of an industrial atmospheric pressure plasma jet (APPJ) are measured as a function of the electric power of the plasma generator, the gas flow, and the distance from the jet nozzle exit. The APPJ device operates an electric discharge under Argon gas flow resulting into a continuous Argon plasma jet in the kW power range expanding into ambient air. The plasma temperature Te and electron number density Ne are determined by optical emission spectroscopy (OES) analyzing up to 17 emission lines of neutral Ar (I) and singly-ionized Ar (II) species using the Saha-Boltzmann plot (SBP) method. For the accurate determination of plasma parameters a methodology is developed to overcome fundamental limitations in OES of Argon plasma that is due to the strongly different intensities of Ar (I) and Ar (II) emission lines. The most significant step is the use of spectral bandpass filters in the optical collection system. The experimental parameters of the jet device are playing a crucial role for APPJ applications (e.g. thermal load to the workpiece, plasma chemistry interaction etc.). We measure Te and Ne in dependence of the experimental parameters and obtain consistent and accurate values of Te = 9000 ± 150 K and Ne = 5 × 1015 cm−3 (typ.). For comparison, plasma characterization using only the neutral Ar lines gives inaccurate and inconsistent Te values. This highlights the importance of using also the ionic Ar lines. The developed methodology may be diversified and applied also for OES of other rare gas plasma.