The sol-gel technique has been used to prepare ferroelectric barium titanate (BaTiO3) films. The electrical properties of the films have been investigated systematically. The room temperature dielectric constant (ϵ) and loss tangent (tanδ) at 1 kHz were respectively found to be 370 and 0.012. Both ϵ and tanδ showed anomaly peaks at 125°C. The room temperature remanant polarization (Pr) and coercive field (Ec) were found to be 3.2 μC/cm2 and 30 kV/cm, respectively. The capacitance–voltage (C–V) and conductance–voltage (G–V) characteristics also showed hysteresis effect. The temperature variation of C–V and G–V characteristics also confirms the ferroelectric to paraelectric phase transition at 125°C.
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