A compact microwave ECR-source of ions and free radicals has been fabricated. It includes a stainless steel tube, ceramic microwave input and permanent SmCo 5 ring-shaped magnets. Its working pressure range is 10 −4−10 −2 torr using Ar, H 2, N 2 and some other gases. The maximum ion current density in a hydrogen discharge at 10 −3 torr reaches 3 mA cm −2 15 cm downstream with a microwave power and plasma stream diameter of 100 W and 8 cm, respectively.