The structural and magnetic properties of Mn 0.04 Ge 0.96 thin films grown on Si (001) substrates at different growth temperatures were investigated. The films were grown by sequential deposition of MnGe and Ge multilayers using molecular beam epitaxy . It was found that the magnetic ordering and Curie temperature could be controlled by adjusting the distance between the Mn ions in the Ge spacer layer depending on growth temperature. We found that the samples grown below 130 °C contained highly disordered ferromagnetic Mn rich domains. Both structural and magnetic characterizations revealed that Mn 5 Ge 3 precipitates were formed in Mn clusters free Ge matrix when the samples were grown at 150 °C. Both the Mn rich domains and Mn 5 Ge 3 precipitates showed out of the plane magnetic anisotropy and similar ESR line shapes. • We investigated the effects of growth temperature on spin systems in Mn 0.04 Ge 0.96 . • The degree of ferromagnetic ordering increases with temperature. • Ferromagnetism occurs due to interaction of Mn 2+ ions in Mn rich clusters. • ESR reveals that the formation of magnetic phases depends on growth temperature.