A novel 6DoF Tapered beam energy harvester, capable of operating across a broad and low frequency range, is proposed in this work. The hybrid structure incorporates regular beam array and zig-zag sections, enhancing deformation and bending. Width tapering with constant thickness optimizes the structural performance and energy harvesting capabilities of the beam. Tapering ensures even strain distribution, reducing the risk of structural failure. The proposed structure demonstrates wide band characteristics at low frequencies, delivering higher power output compared to an array of cantilevers for a given area. FEM analysis is conducted to optimize proof mass, aiming for closely spaced resonance frequencies and high-power output. Experimental validation on a prototype confirms the accuracy of the frequency response predicted by the models. Under harmonic base excitation of 0.4 g, the harvester yields an average DC power of 2497 μW, accounting for signal conditioning losses, within the frequency range of 9–20 Hz. The suggested structure offers excellent design flexibility, allowing adjustment of resonant frequencies by varying the number of beams, the slope and the proof mass of individual beams. The geometry of the proposed structure provides versatility, mechanical resilience, uniform strain distribution make it suitable for developing MEMS energy harvesters.
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