Plasma-chemical technology is a new area of industrial chemical technology. Chemical processes in low-temperature plasma, the regularities of reactions, and the basis of plasma-chemical technology will require computer simulation. Building adequate simulation models of plasma-chemical processes for developing nanosystems and computer simulations with them allows the development of applied research studies in this subject area. Computer intelligence technologies provide an opportunity to use non-classical approaches to building mathematical models of chemical processes. Neural network technologies make it possible to create mathematical simulation models of various processes.