In this study, we experimentally verified the synthesis of ZnO and CuO thin films using a droplet-based hydrothermal method and their hydrogen sensing performance. The hydrogen gas detection performance of the fabricated heterostructured gas sensor was evaluated based on the results of an experiment conducted while controlling the temperature and hydrogen concentration in the gas chamber. According to the responses of single metal oxide sensors made of each ZnO and CuO and their heterojunction sensors, CuO deposited with 7 cycles on 5 cycles of ZnO had a resistance change rate of about 164 % and the change of the resistance took 3 s in the environment of 4 % hydrogen at 300 °C. This sensor showed the highest response rate and fastest reaction time out of all. CuO/ZnO showed the highest reaction at 300 °C, confirming its selective reaction to hydrogen. To solve the problem of metal oxide-based gas sensors with low selectivity, the operating principle of the heterojunction between metal oxide that has selective gas reactivity was analyzed and experimentally verified. Additionally, the fabricated sensor was confirmed to have selective responsiveness to different gases at various temperatures. Using these characteristics, it was confirmed that this heterostructure based sensor can be used as a sensor array for electronic nose that could classify unknown gases using the same sensor at various temperatures.
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