We investigated the properties of rare earth oxide films produced by the vacuum evaporation of rare earth metallic films and their oxidation in an oxygen atmosphere; we also studied the silicon-rare earth oxide interface. The rare earth oxide films were characterized by good insulating properties: an electrical resistivity of more than 10 12 Ω cm, a dielectric permittivity of 7–20, a dielectric dissipation factor of 0.01 or less and a breakdown field strength of (2–6) × 10 6 V cm −1. The behaviour of the effective surface charge density curve at flat-band voltages for scandium, yttrium and lanthanum to lutetium was found to be identical with that of the thermal neutron capture cross section for these elements. The presence of a deep level located some 0.3–0.38 eV below the conduction band edge was observed in fast surface state spectra of Si/Ln 2O 3 structures (Ln Sc, Y, La, Gd, Er). On heating an Si/Y 2O 3/Al structure at 423 K for 20 min with a gate voltage of +5 V we observed a shift in the capacitance-voltage curve of approximately 2.5 V towards more negative voltages; for the same conditions but with a gate voltage of −5 V the shift was about 1 V in the opposite direction.
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