We present our recent work on nanomachined electromechanical resonators applied as mechanically flexible beams and tunneling contacts operating in the radio frequency regime. We will discuss how to build Au/Si beams of lengths varying from 1 to 4 μm and width down to only 80 nm. The resonators are machined out of single-crystal silicon-on-insulator (SOI) substrates. We will demonstrate how these nanometer devices can be used to mechanically transfer only a few electrons.