Radio Frequency Plasma Source Research Articles

Effect of gas injection pattern on magnetically expanding rf plasma source

Abstract Argon gas is injected from a back plate having either a radial center hole or shower-patterned eight holes into a 13.3-cm-diameter and 25-cm-long radio frequency (rf) plasma source attached to a 43.7-cm-diameter and 65cm-long diffusion chamber under an expanding magnetic field, which resembles the magnetic nozzle rf plasma thruster. The source has a double-turn loop antenna powered by a 13.56 MHz rf generator at a maximum power level of ~2.8 kW in low-pressure argon, providing a plasma density of about 1018 m−3 in the source. A high plasma density and a slightly low electron temperature are obtained for the shower-pattered case in both the source tube and the diffusion chamber, compared with the center hole case, suggesting that the neutral density profile significantly affects the plasma density profile. This result will provide an improvement in the thruster performance by the gas injection pattern.

Magnetic enhancement of the electrical asymmetry effect in capacitively coupled plasmas

The development of real-time control strategies for key discharge parameters, such as densities, fluxes, and energy distributions, is of fundamental interest to many plasma sources. Over the last decade, multi-harmonic ‘tailored’ voltage waveforms have been successfully employed to achieve enhanced control of key parameters in a wide range of radio-frequency (RF) plasma sources through application of the electrical asymmetry effect (EAE). More recently, the analogous magnetic asymmetry effect (MAE) has been numerically and experimentally demonstrated to achieve a notable degree of control in parallel plate RF plasma sources. The MAE is achieved via selectively magnetising the charged species adjacent to one electrode, altering the charge flux to the surface and enforcing a DC self-bias to maintain quasineutrality. This study addresses the degree of control achieved by the MAE in a non-planar geometry via 2D fluid/kinetic simulations of a magnetised RF capacitively coupled plasma source employing two different magnetic topologies. The simultaneous application of the EAE and MAE is then presented for the same geometry, demonstrating a degree of non-linear behaviour dependant upon the applied magnetic topology. Control of the DC self-bias voltage ηdc is demonstrated for a single 600 Vpp , 13.56 MHz discharge in both ‘convergent’ (maximum on-axis field strength) and ‘divergent’ (minimum on-axis field strength) magnetic topolgies. MAE induced modulations of ηdc = 0.13 Vpp and ηdc = 0.03 Vpp are achieved for each magnetic topology, respectively, for magnetic field strengths between 50 and 1000 G. Simultaneous application of an EAE and MAE is achieved through a multi-harmonic ‘peak’-type tailored voltage waveform employing varying harmonic phase offsets between 0∘ ⩽ θ ⩽ 360∘ . The degree to which the DC self-bias voltage is modulated by the applied EAE is mediated by the orientation and magnitude of the applied magnetic field. The EAE induced DC self-bias modulations exhibit non-linear behaviour in response to a superimposed MAE, such that the resulting DC self-bias differs from an additive combination of the two effects alone Simultaneous application of the electrical and MAEs offers the possibility of further decoupling ion and electron dynamics in RF plasma sources, and represents an improvement over each approach in isolation.

Combined ns pulsed-RF excitation and impedance matching considerations for the production of moderate E/n atmospheric pressure discharges for gas conversion

Sub-breakdown radiofrequency (RF) discharges enabled by a nanosecond (ns) pulse ignition source are studied at atmospheric pressure in a range of gas mixtures from completely inert (in Ar) to completely reactive (in CO2). An electrical characterisation of the continuous wave (CW) RF discharge (13.56 MHz) is performed to determine plasma impedance and plasma power dissipation. Two different measurement methods to electrically characterize the system are described and compared. One method uses in-situ measurements of discharge parameters (voltage, current and the phase angle), and the other method performs ex-situ measurements of the load circuit using a vector network analyser. It was found that RF plasma power deposition depended on the applied RF power as well as the gas mixture composition. Using the in-situ voltage, current and phase angle measurements, plasma power deposition was calculated to be as much as 85% and 76% of the applied RF power for the pure Ar and pure CO2 cases, respectively. A preliminary qualitative assessment of the plasma composition was performed by optical emission spectroscopy, and CO2 conversion by mass spectrometry. CO2 to CO conversions of 11.2% and 5.5% in a 20:80 (CO2:Ar) mixture and in 100% CO2, respectively, were observed. This study demonstrates a RF plasma source for gas conversion applications at atmospheric pressure in a completely reactive gas.

Experimental characterization of the optical klystron effect to measure the intrinsic energy spread of high-brightness electron beams

The intrinsic energy spread of electron beams needs to be measured to characterize and optimize high-brightness electron beam sources such as those driving x-ray free-electron lasers (FELs). We demonstrate the use of the optical klystron effect as a precise and high-resolution method to measure the electron beam energy spread. The optical klystron setup consists of undulator modules and magnetic chicanes placed between them. The energy spread is found by measuring the radiation power produced in the undulators as a function of the chicanes’ strengths. High resolution and simplicity are the advantages of this approach, in contrast to the standard method, which measures the longitudinal phase space of the electron beam with a transverse deflector. The demonstration was performed at Athos, the soft x-ray FEL beamline of SwissFEL, for which we measured energy spreads below 1 MeV at a central beam energy of 3.4 GeV. We have verified the consistency of the method for different parameters (radiation wavelengths, undulator polarization configurations, and electron bunch durations) and we have benchmarked it against the standard measurement approach using a transverse deflector. Our results confirm the optical klystron as a valid approach to measure the electron beam energy spread. The method can be especially useful to reconstruct low energy spread values, where the conventional approach may be resolution limited, such as in ultra high-brightness radiofrequency photoinjectors or plasma sources, or when transverse deflectors are not available. Published by the American Physical Society 2024

Effect of a permanent-magnet-induced cusp field on a magnetic nozzle radio frequency plasma thruster

A cusp magnetic field is formed upstream of a radio frequency antenna by using a permanent magnet (PM) array in a radio frequency plasma source attached to a diffusion chamber, while an expanding magnetic field configuration downstream of the source is maintained by placing a solenoid near the source tube’s exit, resembling a magnetic nozzle plasma thruster. The PM array is composed of 16 neodymium magnets and is designed to be movable axially, providing a movable axial location of the cusp field. The source is operated at a frequency of 13.56 MHz and an rf power of up to 2.6 kW in low-pressure argon. A force exerted on a target plate located downstream of the source is assessed by a pendulum target technique, showing that the force is increased if the cusp field is closer to the radio frequency antenna. The result is consistent with the previously reported result for the cusp field configuration applied by two sets of solenoids, while the present configuration can reduce the consumed electricity for the upstream solenoid.

Atmospheric Plasma Sources as Potential Tools for Surface and Hand Disinfection

Good hand hygiene has proven to be essential in reducing the uncontrolled spread of human pathogens. Cold atmospheric plasma (CAP) may provide an alternative to disinfecting hands with ethanol-based handrubs when handwashing facilities are unavailable. CAP can be safely applied to the skin if the energy is well controlled. In this study, radio frequency (RF) and direct current (DC) plasma sources were built with a pin-to-mesh electrodes configuration inside a fused silica tube with a 5 mm inner diameter. Microbiological assays based on EN 13697:2015+A1:2019 using Escherichia coli DSM 682 or Staphylococcus epidermidis DSM 20044 were used to examine the antimicrobial effect of various plasma conditions. Metal and silicone disks that model skin were used as inoculation matrices. The prototype air RF CAP achieved significant disinfection in the MHz range on stainless steel and silicone substrates. This is equivalent to half the performance of direct current CAP, which is only effective on conductive substrates. Using only electricity and air CAP could, with further optimization to increase its efficacy, replace or complement current hand disinfection methods, and mitigate the economic burden of public health crises in the future.

Effect of rf driving frequency on peripheral high energy electrons in a magnetically expanding plasma reactor

Two operational rf driving frequencies of 2 and 13.56 MHz are employed in a 14-cm-diameter radio frequency (rf) plasma source under an expanding magnetic field. The changes in the radial profiles of the ion saturation current and the electron temperature are observed in the magnetically expanding plasma when changing the driving frequency. Peripheral high temperature electrons are detected for the higher frequency case, which is consistent with previous studies, implying a localized electron heating in the radially outer region near the antenna and a transport along the magnetic field. However, it disappears when lowering the rf driving frequency, which would be due to an increase in a skin depth. Therefore, the present results demonstrate that the rf power would be absorbed in radially outer and entire regions of the discharge tube for the higher and lower rf driving frequency cases, respectively. As a result of the ionization induced by the peripheral high temperature electrons in the expanding magnetic field, the density in the expanding magnetic field for the 13.56 MHz case is higher than the 2 MHz case, resulting in the larger thrust as measured by a pendulum target technique.

Characterization of cesium and H−/D− density in the negative ion source SPIDER

The Heating Neutral Beam Injectors (HNBs) for ITER will have to deliver 16.7 MW beams of H/D particles at 1 MeV energy. The beams will be produced from H−/D− ions, generated by a radiofrequency plasma source coupled to an ion acceleration system. A prototype of the ITER HNB ion source is being tested in the SPIDER experiment, part of the ITER Neutral Beam Test Facility at Consorzio RFX. Reaching the design targets for beam current density and fraction of coextracted electrons is only possible by evaporating cesium in the source, in particular on the plasma facing grid (PG) of the acceleration system. In this way the work function of the surfaces decreases, significantly increasing the amount of surface reactions that convert neutrals and positive ions into H−/D−. It is then of paramount importance to monitor the density of negative ions and the density of Cs in the proximity of the PG. Monitoring the Cs spatial distribution along the PG is also essential to guarantee the uniformity of the beam current. In SPIDER, this is possible thanks to the Cavity Ringdown Spectroscopy (CRDS) and the Laser absorption Spectroscopy diagnostics (LAS), which provide line-integrated measurements of negative ion density and neutral, ground state Cs density, respectively. The paper discusses the CRDS and LAS measurements as a function of input power and of the magnetic and electric fields used to reduce the coextraction of electrons. Negative ion density data are in qualitative agreement with the analogous measurements in Cs-free conditions. In agreement with simulations, Cs density is peaked in the center of the source; a top/bottom non uniformity is also present. Several effects of plasma on Cs deposition and negative ion production are presented.

Enhanced electron heating in the magnetic nozzle of a radio-frequency plasma via electron cyclotron resonance

The effect of electron cyclotron resonance on the electron flow is experimentally examined in the magnetic nozzle of a radio-frequency plasma source powered at 13.56 MHz under a series of operating conditions. Measurements of the electron energy probability function show that the bulk of electrons is effectively heated when the external magnetic field meets the cyclotron resonance condition in the proximity of the antenna. A careful tuning of the magnetic field topology inside the plasma source leads to a gain in electron density and temperature up to about 20% and 40%, respectively.

Downstream Electric Field Effects during Film Deposition with a Radio Frequency Plasma and Observations of Carbon Reduction

Strong electric fields are generated by radio frequency (RF) plasma sources, and though the RF portion is too high a frequency for ions to react, the direct current (DC) portion of these fields has been shown to cause the atomic migration of metals, which can influence film morphology even downstream of the plasma where ionized plasma species are absent. In particular, we have observed the growth of nanopillars due to metal atoms migrating toward the positive field of the remote plasma. A biased grid placed between the plasma and the substrate can shield the substrate from these fields so that, when grounded, smooth films can be grown to a root mean square roughness of less than 1 nm. Positively biasing the grid returns the growth of nanocolumns. Interestingly, negatively biasing the grid significantly reduced the carbon and hydrocarbon content of gallium nitride films grown at a low temperature (~660 °C) using a nitrogen plasma, as observed using secondary ion mass spectroscopy (SIMS) and optical absorption measurements. The films also showed a notable improvement in conductivity and visible appearance.

Radial characterization of an ion beam in a deflected magnetic nozzle

The radial characterization of an ion beam generated in a magnetically steered radio-frequency (RF) plasma source is presented. In the symmetrical magnetic nozzle (MN) configuration, radial profiles of the ion saturation current obtained with a planar Langmuir probe show a double-peaked profile. The same behaviour is confirmed by the radial measurements of the total ion current and the ion energy distribution functions (IEDFs) obtained with a retarding field energy analyzer. The IEDFs also show the presence of an ion beam centred at r = -2 cm. On the contrary, radial measurements taken with a magnetic nozzle deflected on the r - z plane exhibit a single-peaked profile with both the local ion population and the ion beam centred at r = -5 cm, in the direction of the MN orientation. It is shown that the ion beam location is changed as a result of a deflected magnetic nozzle, and that it follows the direction of increasing radial magnetic field.

Characterization of a 2 MHz-radiofrequency-driven magnetically expanding plasma source

A radio frequency (rf) plasma source is operated at 2 MHz under an expanding magnetic field. The source consists of a 14-cm-diameter and 25-cm-long source tube wound by a seven-turn rf loop antenna powered via an impedance matching circuit. The efficient rf power transfer to the plasma is demonstrated, and the high-density plasma above 1012 cm−3 is successfully obtained for a kW level of the rf power. The radial density profile having a center peak is observed both in the source and in the expanding magnetic field; it does not show the conical density structure previously observed in 13.56 MHz rf sources. This implies that the electron heating layer is changed by lowering the driving frequency. Even in the source operated at 2 MHz, the measurement of the ion energy distribution shows the presence of the supersonic ion beam as well as the sources operated at higher frequencies, e.g., 13.56 MHz in the previous studies.

A 1.5D fluid—Monte Carlo model of a hydrogen helicon plasma

Helicon plasma sources operating with hydrogen or deuterium might be attractive for fusion applications due to their higher power efficiency compared to inductive radiofrequency plasma sources. In recent years, the resonant antenna ion device (RAID) has been investigating the physics of helicon plasmas and the possibility of employing them to produce negative ions for heating neutral beam injectors (HNBs). Herein, we present a fluid Monte Carlo (MC) model that describes plasma species transport in a typical helicon hydrogen plasma discharge. This work is motivated by an interest in better understanding the basic physics of helicon plasma devices operating in hydrogen and, in particular, the volume production of negative ions. This model is based on the synergy between two separate self-consistent approaches: a plasma fluid model that calculates ion transport and an MC model that determines the neutral and rovibrational density profiles of . By introducing the electron density and the temperature profiles measured by Langmuir probes as model constraints, the densities of ion species (, , , ) are computed in a 1.5D (dimensional) geometry. The estimate of the negative ion density profile represents a useful benchmark that is comparable with dedicated diagnostics, such as cavity ring-down spectroscopy and Langmuir probe laser photodetachment. Neutral gas particles (atoms and molecules) are calculated assuming a fixed plasma background. This gas–plasma decoupling is necessary due to the different timescales of plasma (microseconds) and gas kinetics (milliseconds).

Impedance Characteristic Analysis and Preliminary Experimental Results of a High-Power RF Plasma Source

To study the characteristics of radio frequency (RF) power coupling, RF plasma diagnostics, actively cooled tube, and negative ion production, a plasma source was designed as a small-scale test facility. The matching network was carefully designed and successfully applied to the 2-MHz RF plasma source. In this article, the design method of the matching unit will be presented; with the assistance of this matching unit, the RF plasma source was successfully lit and the reflected power was reduced to a very low level. A <inline-formula> <tex-math notation="LaTeX">$V\!\!-\!\!I$ </tex-math></inline-formula> probe was installed in front of or in the rear of the matching network, respectively, to <i>in situ</i> measure the RF voltage, current, and phase angle. The equivalent resistance of the RF plasma source was analyzed in detail. The RF power coupling efficiency was derived in two different methods, and the relationship between the coupling efficiency and the equivalent resistance of the plasma source is verified. At the same time, the equivalent resistance of the plasma source was also collected to optimize the matching unit.

Plasma-enhanced thermal growth of copper oxide nanostructures on anode of glow discharge setup

Plasma-enhanced growth of copper oxide nanostructures is widely explored in science and manufacturing, since it provides the flexibility, productivity, and cost-effectiveness necessary to meet the growing demands of customers. However, in the field of growth of metal oxide nanostructures, thermal methods still prevail in plasma methods in spite of long production time up to ten hours. Radiofrequency and microwave plasma sources were applied to grow CuO nanostructures, which are of high interest in various branches of industry, and allowed obtaining a large variety of the nanostructures, and nanowires in particular. At that, high price of the equipment limits the implementation of the results and urges to find cheaper plasma-enhanced method of growth. For this purpose, a common glow discharge plasma setup was engaged to grow the nanostructures in an oxygen atmosphere on surfaces of samples installed on the anode of the electric circuit designed to sustain the glow discharge. An additional heater was mounted under the anode. The proposed combination allowed conducting the growth process under conditions of the delivery of the necessary heat flux and removal the excessive ion flux that can destroy the growing nanostructures because of sputtering. In the first set of experiments, the additional heater was not used, and the observed nanostructures were presented by grains (2D) of about 370 nm in diameter and 80 nm in thickness. This structure is supposedly formed because of action of the internal stresses in the oxide layer. After turning on the heater, the nanowires (1D) were the only nanostructures observed in the experiment, and since no nanowires were found in a case of heating the anode without plasma ignition, one can consider the plasma as a factor determining the nanowire growth.

Plasma treatment for enhancement of the sorption capacity of carbon fabric

In this work we carried out an experimental investigation into enhancement of the sorption capacity of carbon fabric using plasma treatment methods. Carbon fabric is based on viscose fiber and is hydrophobic by nature. Enhancement of the fabric sorption capacity is required for its application in medicine. For this purpose, two plasma treatment methods were considered, i.e. atmospheric nonequilibrium radiofrequency (RF) discharge and a vacuum RF plasma source with an external magnetic field. Samples treated by atmospheric discharge demonstrated aging effects during the first week after treatment. The sorption capacity of samples treated by the RF plasma source was stable over the same period and reached values as high as 0.95. Parameters of the beam created by the vacuum RF plasma source were analyzed and dependences of the fabric sorption capacity and specific surface area on plasma treatment time were investigated. We found that sorption capacity reached its maximum value after 30 min of treatment and did not change significantly if processing was continued, while the specific surface area reached its maximum after 3 min of treatment and quickly decreased after that. It was found that the micropore structure of the fabric remained almost the same during plasma treatment. The volume of mesopores in a unit of the fabric mass (specific volume) doubled during the first 5 min of treatment and returned to initial values after 30 min of treatment. The sorption capacity continued to increase even when the specific surface area decreased after reaching its peak value. This indicates the important role of surface functional groups formed on carbon fibers during plasma treatment. This is consistent with the results of x-ray photoelectron spectroscopy analysis showing changes in surface oxidation during plasma treatment.

Branching fraction measurements of arsenic 4p25s-4p3 transitions

Transition lines of neutral arsenic atom (As I) have been observed in the spectra of stellar and sub-stellar objects. Accurate and reliable data of oscillator strengths of those transitions allow differentiating between different evolution models of those objects. We have measured branching fractions for As I (4p25s-4p3) transition lines in 180–310 nm spectral range with higher increased accuracy using light source powered by inductively coupled radio frequency plasma (RF-ICP) source – not earlier applied in studies of atomic arsenic. The measurements were performed for 7 excited states of As I and compared with data from the literature. We combined them with the selected lifetime values reported in the literature. The transition probabilities for 26 spectral lines are obtained and compared with other experimental and theoretical data from literature. The absorption oscillator strengths for two As I (4p25s-4p3) resonance transitions (197.3 nm, f = 0.127, and 193.8 nm f = 0.059) are also reported.

Intense biogeochemical iron cycling revealed in Neoarchean micropyrites from stromatolites

Iron isotope compositions of sedimentary pyrites (FeS2) are used to constrain the redox evolution of the Precambrian ocean and early Fe-based metabolisms such as Dissimilatory Iron Reduction (DIR). Sedimentary pyrites can record biotic and abiotic iron reduction, which have similar ranges of Fe isotopic fractionation, as well as post-depositional histories and metamorphic overprints that can modify Fe isotope compositions. However, some exceptionally well-preserved sedimentary records, such as the stromatolite-bearing Tumbiana Formation (ca. 2.7 Ga, Western Australia) have been proven to retain primary information on Early Neoarchean microbial ecosystems and associated metabolic pathways. Here, we present in situ Fe isotope measurements of micropyrites included in four stromatolites from the Tumbiana Formation in order to assess iron respiration metabolism using Fe isotope signatures. A set of 142 micropyrites has been analyzed in three lamina types, i.e. micritic, organic-rich and fenestral laminae, by Secondary Ion Mass Spectrometry (SIMS), using a Hyperion radio-frequency plasma source. The diversity of laminae is attributed to specific depositional environments, leading to the formation of Type 1 (micritic laminae) and Type 2 (organic-rich laminae) and early diagenetic effects (Type 3, fenestral laminae). Type 1 and 2 laminae preserved comparable δ56Fe ranges, respectively from −1.76‰ to +4.15‰ and from −1.54‰ to +4.44‰. Type 3 laminae recorded a similar range, although slightly more negative δ56Fe values between −2.20‰ and +2.65‰. Globally, our data show a large range of δ56Fe values, from −2.20‰ to +4.44‰, with a unimodal distribution that differs from the bimodal distribution previously reported in the Tumbiana stromatolites. Such a large range and unimodal distribution cannot be explained by a unique process (e.g., biotic/abiotic Fe reduction or pyrite formation only controlled by the precipitation rate). It rather could reflect a two-step iron cycling process in the sediment pore water including i) partial Fe oxidation forming Fe(OH)3 with positive δ56Fe values followed by ii) partial, possibly microbially induced, Fe reduction leading to Fe2+ availability for pyrite formation by sulfate reducers carrying both negative δ56Fe and δ34S signatures. In this model, the buildup and subsequent reduction through time of a residual Fe(OH)3 reservoir arising from the activity of methanotrophs, can explain the strongly positive δ56FeFe(OH)3 values up to 4‰. These results indicate that Archean microbial mats have been the site of the interaction of several closely linked biogeochemical cycles involving Fe, S and C.

Development of megawatt radiofrequency ion source for the neutral beam injector on HL-2A tokamak

A radiofrequency (RF) ion source with a megawatt power extraction, thunder I, has been developed for the neutral beam injector (NBI) on HL-2A tokamak. A full solid-state RF generator with output power of 80 kW and frequency of 2 MHz was built by an RF combiner using 8 modules of solid-state RF generator with power of P RF = 10 kW. The line electric efficiency of whole RF generator reaches 92% and its voltage standing wave ratio (VSWR) is 1.01, thus no water-cooling system is supplied. A quartz vessel with the inner diameter of 250 mm is directly adopted for resisting atmospheric pressure, which can dramatically simplify source structure. Nowadays, the extracted beam parameters of RF hydrogen ion source are 32 kV/20 A/0.1 s on a test bed, while the design parameters are 50 kV/20 A/3 s. The beam density profile measured by the infrared imaging technique at 1.3 m downstream from the grounded grid obeys a Gaussian distribution, and the corresponding half width of 1/e power decay at the matched condition is about 80 mm. Plasma homogeneity is over 90% at low RF power. The beam divergence angle meets the requirement of NBI system on HL-2A tokamak. The extractable current density increases almost linearly with the RF power. It reaches 2400 A m−2 at P RF = 32 kW. The ion density in front of plasma grid is about 1 × 1018 m−3, corresponding to an ionized fraction of about 1% at the gas pressure of 0.5 Pa. Single hydrogen ion fraction reaches 79% at the beam current of 12.4 A. Some improvements have been considered for optimizing ion source performance on next experimental campaign. One smaller auxiliary RF discharge chamber equipped with a gas feed path, driven by 13.56 MHz/3.5 kW generator, is connected to main discharge chamber driven by 2 MHz/40 kW generator. By this dual-driven configuration, the innovative RF plasma source with high-pressure density gradient solves the initial ignition problem of powerful RF ion source even if the gas pressure below 0.1 Pa. In addition, the RF negative hydrogen ion source of 200 kV/20 A/3600 s is also developed at SWIP for the China fusion engineering test reactor.

Experimental and numerical characterization of a radio-frequency plasma source with a DC-grounded electrode configuration using a quarter-wavelength filter

We present a combined experimental and numerical investigation of the plasma properties in an asymmetric capacitively coupled radio frequency plasma source using argon discharge. Besides driving the system in the conventional way, which results in a high negative self-bias voltage due to the asymmetric configuration, we also connect a ‘quarter-wavelength filter’ to the powered electrode, which lifts its DC potential to zero. At the powered side of the plasma, we employ electrodes with conducting and insulating surfaces, as well as electrodes combining both in different proportions (‘hybrid electrodes’). Measurements are carried out for the plasma potential, the electron density and temperature in the bulk plasma, as well as for the flux-energy distribution of the ions at the grounded surface of the system. The nature of the surface of the powered electrode as well as the presence of the quarter-wavelength filter are found to highly influence the plasma potential, . For the electrode with a conducting surface 20 V and ∼150 V are found in the absence and the presence of the filter, respectively. For the electrode with an insulating surface, the self-bias voltage builds up directly at the plasma interface, thus the filter has no effect and a plasma potential of ∼20 V is found. For the electrodes with different conducting/insulating proportions of their surface, ranges between the above values. Particle-in-Cell/Monte Carlo Collisions calculations for identical conditions with hybrid electrodes predict double-peaked ion energy distribution at the powered electrode with peaks corresponding to and along with a lowering of the plasma potential (whencompared to wholly conducting electrode), a trend that is observed experimentally. These studies are of great importance for the application of similar plasma sources with in-situ cleaning of mirrors in fusion devices and the results can be extended to a variety of plasma processing applications.