Radio Frequency Magnetron Sputtering Research Articles

Effects of power on ion behaviors in radio-frequency magnetron sputtering of indium tin oxide (ITO)

This study delves into ion behavior at the substrate position within RF magnetron discharges utilizing an indium tin oxide (ITO) target. The positive ion energies exhibit an upward trajectory with increasing RF power, attributed to heightened plasma potential and initial emergent energy. Simultaneously, the positive ion flux escalates owing to amplified sputtering rates and electron density. Conversely, negative ions exhibit broad ion energy distribution functions (IEDFs) characterized by multiple peaks. These patterns are clarified by a combination of radiofrequency oscillation of cathode voltage and plasma potential, alongside ion transport time. This elucidation finds validation in a one-dimensional model encompassing the initial ion energy. At higher RF power, negative ions surpassing 100 eV escalate in both flux and energy, posing a potential risk of sputtering damages to ITO layers.

Boron carbide films with reduced nodular defect density deposited by full-face erosion radio-frequency magnetron sputtering

Boron carbide films with reduced nodular defect density deposited by full-face erosion radio-frequency magnetron sputtering

DUAL MODE FRACTURE BASED ON LOADING RATE DURING SLIDING INDENTATION OF Si–C–N HARD COATINGS ON 304SS SUBSTRATES

Scratch tests were performed on thermal-resistant hard Si–C–N coatings deposited on steel (SS) 304, by radio frequency (RF) magnetron sputtering. The abrasion and wear properties were studied by analyzing the changing failure complexion inside the scratch showing a mixture of ductile and brittle properties. The change in loading rate caused noticeable changes in the failure mode. The plasticity was found to have a peripheral domination initially with an increase in load but was replaced by brittle failure on increasing the loading rate. The work of adhesion and wear rate were determined.

Fabrication of Bi2Te3 and Sb2Te3 Thermoelectric Thin Films using Radio Frequency Magnetron Sputtering Technique.

Through various studies on thermoelectric (TE) materials, thin film configuration gives superior advantages over conventional bulk TEs, including adaptability to curved and flexible substrates. Several different thin film deposition methods have been explored, yet magnetron sputtering is still favorable due to its high deposition efficiency and scalability. Therefore, this study aims to fabricate a bismuth telluride (Bi2Te3) and antimony telluride (Sb2Te3) thin film via the radio frequency (RF) magnetron sputtering method. The thin films were deposited on soda lime glass substrates at ambient temperature. The substrates were first washed using water and soap, ultrasonically cleaned with methanol, acetone, ethanol, and deionized water for 10 min, dried with nitrogen gas and hot plate, and finally treated under UV ozone for 10 min to remove residues before the coating process. A sputter target of Bi2Te3 and Sb2Te3 with Argon gas was used, and pre-sputtering was done to clean the target's surface. Then, a few clean substrates were loaded into the sputtering chamber, and the chamber was vacuumed until the pressure reached 2 x 10-5 Torr. The thin films were deposited for 60 min with Argon flow of 4 sccm and RF power at 75 W and 30 W for Bi2Te3 and Sb2Te3, respectively. This method resulted in highly uniform n-type Bi2Te3 and p-type Sb2Te3 thin films.

Flexible silver nanoparticle@aramid nanofiber SERS substrates fabricated by radio frequency magnetron sputtering for rapid detection of toxic substances

Aramid nanofibers (ANFs) have gained great interest as promising polymer substrates for various applications because of their exceptional mechanical properties, high aspect ratio, large specific surface area and excellent chemical and thermal stability. However, the use of ANFs as nano-sized functional substrates for surface-enhanced Raman scattering (SERS) sensing applications has been scarcely reported. In this research, ANF membranes fabricated by vacuum-filtration are served as SERS matrix materials. The silver nanoparticle-coated ANF (AgNP@ANF) membranes are fabricated by a facile, cost-effective, environmental-friendly, and scalable magnetron sputtering technique. Different sputtering times from 15 to 120 s have been studied for AgNP@ANF substrates in terms of their SERS performance. The optimal AgNP-90@ANF SERS substrate exhibits good detection sensitivity of 10−10 M for malachite green (MG), high enhancement factor of 7.7×108 and prominent signal reproducibility (RSD=5.87%), as well as impressive storage stability. Furthermore, the AgNP@ANF SERS substrates also demonstrated excellent detection capability for methylene blue and crystal violet, with sensitivities of 10−10 and 10−9 M, respectively. Besides, the flexible AgNP@ANF SERS substrate can also be used to rapidly detect pesticide residues on uneven surfaces through a facile paste-and-read treatment. The simple-to-manufacture, inexpensive, scalable, and sensitive AgNPs@ANF sensors are very promising for commercial SERS applications in the future.

Thickness effects on the physical characterization of nanostructured CuO thin films for hydrogen gas sensor

In these studies, radio frequency (RF) magnetron sputtering was used to produce nanostructured CuO thin films on glass bases with different thicknesses of (250, 300, and 350 nm). X-ray diffraction (XRD) analysis of these films revealed a polycrystalline structure with a preferred peak along the (111) plane. The Scherrer formula was used to compute the grain size. It was found that the average grain sizes are 10.78 nm, 11.36 nm, and 11.84 nm for film thicknesses of 250, 3000, and 300 nm, respectively, while the dislocation density and strain values decline. The surface roughness decreased from 9.30 nm to 4.71 nm as the thickness increased, according to atomic force microscopy (AFM) data. As the thickness of the film grew, the root mean square (RMS) roughness likewise decreased from 9.18 nm to 4.29 nm. The homogenous, semi-spherical structure comprises uniformly distributed particles, as demonstrated by SEM images. The optical properties of the grown films showed that the absorption coefficient considerably increased with film thickness. Transmittance, band gap, refractive index, and extinction coefficient all decrease with increasing film thickness. The hydrogen gas measurements, indicated a reduction in sensitivity as the thickness and gas concentration increased at 30°C.

Defectivity of Al:ZnO thin films with different crystalline order probed by Positron Annihilation Spectroscopy

Three Positron Annihilation Spectroscopy (PAS) techniques have been employed to investigate the point defects of Al-doped Zinc Oxide (AZO) thin films grown by Radio Frequency (RF) magnetron sputtering with different substrates and deposition parameters. The films were grown with thickness varying from 100 to 300 nm, and their crystalline quality ranged from single crystalline epitaxial to partially amorphous. We found that the main defect in the crystalline samples is the 3VZn−VO four vacancy complex, with a concentration around 1018−1019 cm−3. In polycrystalline films larger vacancy clusters, within 10%−20% of the total concentration, were detected. These vacancy clusters are inferred to be most likely located at the grain boundaries. In partially amorphous films the concentration of these larger vacancy clusters, located either at grain boundaries or in the amorphous regions of the film, approached even the 40%, and also some sub-nano voids have been observed.

Copper tantalum nitride (CuTaN2) thin films prepared by reactive radio-frequency magnetron sputtering

RF reactive sputtering was used to deposit copper tantalum nitride (CuTaN2) films from a Cu/Ta target in an environment containing a mixture of argon and nitrogen at two different substrate temperatures: room temperature and 200 °C. The films were studied by SEM, EDS, XRD, Raman spectroscopy, spectrophotometry, and resistivity measurements. The deposition conditions significantly impacted the morphology of the films, which varied from smooth, void-free films at high nitrogen concentrations and at room temperature substrates to cauliflower-like grains with voids at low nitrogen contents and elevated substrate temperatures. Despite the target’s 1:1 Cu: Ta ratio, the stoichiometric analysis showed a lower Ta content in the deposited film. The films produced on silicon substrates were polycrystalline, whereas those deposited on glass substrates were amorphous. The band gap (0.9 eV to 1.55 eV) and film resistivity (20 kΩ-cm to 76 kΩ-cm) are strongly affected by the nitrogen fraction in the sputtering gas. Increasing the nitrogen percentage in semiconductor films results in smoother films with larger bandgaps (approximately 1.5 eV), higher resistivity, and compositions closest to those of stoichiometric CuTaN2.

Hemocompatibility and Preangiogenic Attributes of SiBxCyNzOm Coatings for Biomedical Applications.

In current clinical practices related to orthopedics, dental, and cardiovascular surgeries, a number of biomaterial coatings, such as hydroxyapatite (HAp), diamond-like carbon (DLC), have been used in combination with metallic substrates (stainless steel, Ti6Al4V alloy, etc.). Although SiBCN coatings are widely explored in material science for diverse applications, their potential remains largely unexplored for biomedical applications. With this motivation, the present work reports the development of SiBxCyNzOm coatings on a Ti6Al4V substrate, employing a reactive radiofrequency (RF) magnetron sputtering technique. Three different coating compositions (Si0.27B0.10C0.31N0.07O0.24, Si0.23B0.06C0.21N0.22O0.27, and Si0.20B0.05C0.19N0.20O0.35) were obtained using a Si2BC2N target and varying nitrogen flow rates. The hydrophilic properties of the as-synthesized coatings were rationalized in terms of an increase in the number of oxygen-containing functional groups (OH and NO) on the surface, as probed using XPS and FTIR analyses. Furthermore, the cellular monoculture of SVEC4-10 endothelial cells and L929 fibroblasts established good cytocompatibility. More importantly, the coculture system of SVEC4-10 and L929, in the absence of growth factors, demonstrated clear cellular phenotypical changes, with extensive sprouting leading to tube-like morphologies on the coating surfaces, when stimulated using a customized cell stimulator (StimuCell) with 1.15 V/cm direct current (DC) electric field strength for 1 h. In addition, the hemocompatibility assessment using human blood samples revealed clinically acceptable hemolysis, less erythrocyte adhesion, shorter plasma recalcification, and reduced risk for thrombosis on the SiBxCyNzOm coatings, when compared to uncoated Ti6Al4V. Taken together, the present study unambiguously establishes excellent cytocompatibility, hemocompatibility, and defines the preangiogenic properties of SiBxCyNzOm bioceramic coatings for potential biomedical applications.

Effect of sputtering time on the microstructure and properties of MAO/CoCrFeNi composite coatings on TC11 alloy

In order to further improve the wear resistance and high-temperature oxidation resistance of titanium alloys, MAO/CoCrFeNi composite coatings with different sputtering times were prepared on TC11 alloy by micro-arc oxidation combined with radio frequency magnetron sputtering. The microstructure and phase composition of the composite coatings were investigated by scanning electron microscope and X-ray diffractometer. The wear performance at different temperature and high-temperature oxidation resistance of the composite coatings were studied. The results showed that as the sputtering time increases, the phase structure of composite coatings were all FCC phase, and the number of micropore on the composite coatings decreased; At room temperature, since the film thickness is proportional to the hardness, and higher hardness is conducive to the reduction of actual contact area between coating and grinding ball, so the composite coatings sputtered for 6 h had the narrowest wear scar width and the smallest wear weight loss, and its wear mechanisms were oxidative wear and adhesive wear; At 673 K, since the softening of the abrasive chips played a lubricating role, the composite coatings sputtered for 4 h produced the most abrasive chips, so it had the narrowest wear scar width and the smallest wear weight loss, and the wear mechanisms were mainly oxidative wear and adhesive wear, with slight abrasive wear; The composite coatings sputtered for 6 h was still tightly bonded to the substrate after oxidation at 1000 K, and its weight gain is smaller than TC11, which indicated that it has the best high-temperature oxidation resistance.

Deposition and structural investigation of uniform AlN(100) films at wafer scale through RF magnetron sputtering

a-axis-oriented AlN(100) films are identified as promising candidates for surface acoustic wave devices owing to their high transversal-acoustic velocity. Achieving uniform films across a wafer scale is crucial for enhancing device performance and minimizing manufacturing costs. In this study, we employ radio-frequency magnetron sputtering to deposit AlN(100) films on 2-in Si(100) wafers. We further examine the influence of various process parameters on the nonuniformity of film thickness and structural properties, including crystallite size, microstrain, and dislocation density. The optimization of parameters leads to the selection of a gas flow ratio of N2:Ar = 4:7, a sputtering power of 160 W, and a substrate temperature of 350 °C. Under these optimized conditions, the AlN films not only demonstrate a preferred (100) orientation and remarkable crystallinity, as indicated by a full width at half maximum of the X-ray diffraction peak of just 0.03°, but also achieve an optimal film thickness nonuniformity of 1.66 %. Our results offer valuable insights for the wafer-scale fabrication of AlN(100) films, potentially enhancing industrial production yields and reducing costs.

Investigation on thermoelectric properties of SnSe thin films as prepared by RF magnetron sputtering

In this work, we investigated the thermoelectric properties of SnSe (Tin Selenide) thin films onto SiO2/Si-wafer substrates as prepared by RF (radio frequency) magnetron sputtering technique. The sputtering conditions used base pressure below 5.5 10−4 Pa and working pressure at 0.93 Pa within the Ar atmosphere as a flow rate fixed 40 sccm. The RF sputtering power was applied at 80 W and sputtering time for 30 min. After thin film deposition, as-deposited thin films were annealed by the vacuum annealing method at 300–450 °C. The crystal structure, morphology and film thickness, and atomic composition of SnSe thin film were carried out by X-ray diffraction (XRD), the field emission scanning electron microscope (FE-SEM), and energy-dispersive X-ray spectroscopy (EDS) techniques, respectively. The thermoelectric properties (electrical resistivity; ρ) and Seebeck coefficient; S) were measured by the ZEM-3 method to calculate the power factor (PF) value. The results showed that the as-deposited thin films had improved the crystallography of SnSe from amorphous to crystalline phases after thin films were annealed at a temperature range of 300–400 °C. At room temperature, the maximum power factor of 0.35 mW m˗1 K˗2 (ρ = 202 mΩ m and S = 165 μV K˗1) could be found to estimate the dimensionless Figure of Merit (ZT) values around 0.44 for annealing thin film sample at 400 °C.

Corrosion Resistance of Fe-Based Amorphous Films Prepared by the Radio Frequency Magnetron Sputter Method.

Amorphous thin films can be applied to increase the anti-corrosion ability of critical components. Atomized FeCrNiMoCSiB powders were hot-pressed into a disc target for R. F. magnetron sputtering on a 316L substrate to upgrade its corrosion resistance. The XRD spectrum confirmed that the film deposited by R. F. magnetron sputtering was amorphous. The corrosion resistance of the amorphous film was evaluated in a 1 M HCl solution with potentiodynamic polarization tests, and the results were contrasted with those of a high-velocity oxy-fuel (HVOF) coating and 316L, IN 600, and C 276 alloys. The results indicated that the film hardness and elastic modulus, as measured using a nanoindenter, were 11.1 and 182 GPa, respectively. The principal stresses in two normal directions of the amorphous film were about 60 MPa and in tension. The corrosion resistance of the amorphous film was much greater than that of the other samples, which showed a broad passivation region, even in a 1 M HCl solution. Although the amorphous film showed high corrosion resistance, the original pinholes in the film were weak sites to initiate corrosion pits. After polarization tests, large, deep trenches were seen in the corroded 316L substrate; numerous fine patches in the IN 600 alloy and grain boundary corrosion in the C276 alloy were observed.

Sputtered Sn-doped Ga2O3 films under balance controlled of energy supply and ion bombardment for solar-blind detection application

The characteristics of amorphous Sn-doped Ga2O3 films deposited using radio frequency magnetron sputtering at room temperature under different sputter powers have been demonstrated. A balance mechanism of energy supply and ion bombardment controlled by sputter power has been found during the deposition. The increasing growth rate as power can be due to the increased yield sputtering species indicated by an in situ optical emission spectroscopy. As the power increases to 700 W, an obvious change from discrete nanoparticles to flat-continuous film can be observed because of sufficient energy supply for oxidation reaction, which leads to the maximum ratio of lattice oxygen and Sn4+ indicating the optimal film quality and conductive property. However, a non-negligible high energy ion bombardment presented at 900 W leads to the degraded film quality. The influence of sputtering power on Sn-doped Ga2O3 solar-blind photodetectors is demonstrated. It can obtain a good performance with an ultra-low dark current density of 2.2 × 10−11 A/cm2, a substantial light-dark current ratio of 1.08 × 103 and fast rise/decay time of 1.59 s/0.54 s at 700 W. The revelation of the role of sputtering power on the properties of Sn-doped Ga2O3 films may offer an interesting direction for low-cost and high-performance solar-blind photodetectors.

Performance evaluation of flexible thermoelectric generator with Bi2Te3 thin-film

In the information society, carrying devices such as smartphones and tablets is crucial, and ensuring their power supply is essential. Furthermore, from the perspective of energy security, being able to secure their power supply from low-quality energy sources could reduce dependence on fossil fuels. In this study, we fabricated a flexible thermoelectric generator capable of harvesting energy from a low-temperature difference between a low-temperature heat source and room or outdoor temperature and evaluated its performance. The device was fabricated by depositing an n-type Bismuth telluride (Bi2Te3) film onto a polyimide film substrate using radio frequency (RF) magnetron sputtering. A 3D printer was used to fabricate flexible fins for attaching and bonding the films. Owing to their adaptability, these flexible models can be installed on heat sources of different shapes. The experimental conditions for this study were as follows: the temperature in the test chamber was maintained at 25 ± 1 °C and that of the heat source ranged from 35 to 75 °C; further, thermoelectric elements in numbers varying from 1 to 6 were installed. The maximum open-circuit output voltage |E| and power generation (Pmax) were determined to be 11.4 mV and 69 nW, respectively. The fins with the Bi2Te3 thin film maintained a temperature of approximately 25 to 30 °C at the tip of the fin, even when exposed to the highest temperature (75 °C) of the heat source during the experiment. As a result, the thermoelectric device developed in this study has demonstrated the potential to power sensors operating in the tens of nW range.

Strong nonlinear-polarization in ZnMgO epitaxial thin-films with Li incorporation

The second-order nonlinear-polarization originated from the interaction between thin-film materials with second-order nonlinear susceptibility (χ (2)) and high-power laser is essential for integrated optics and photonics. In this work, strong second-order nonlinear-polarization was found in a-axis oriented Zn1-x Mg x O (ZnMgO) epitaxial thin-films with Li incorporation, which were deposited by radio-frequency magnetron sputtering. Mg incorporation (x > 0.3) causes a sharp fall in the matrix element χ 33 of χ (2) tensor, although it widens optical bandgap (E opt). In contrast, moderate Li incorporation significantly improves χ 33 and resistance to high-power laser pulses with a little influence on E opt. In particular, a Zn0.67Mg0.33O:Li [Li/(Zn + Mg + Li) = 0.07] thin-film shows a |χ 33| of 36.1 pm V−1 under a peak power density (E p) of 81.2 GW cm−2, a resistance to laser pulses with E p of up to 124.9 GW cm−2, and an E opt of 3.95 eV. Compared to that of ZnO, these parameters increase by 37.8%, 53.4%, and 18.6%, respectively. Specially, the Zn0.67Mg0.33O:Li shows higher radiation resistance than a Mg-doped LiNbO3 crystal with a comparable E opt. First-principle calculations reveal the Li occupation at octahedral interstitial sites of wurtzite ZnO enhances radiation resistance by improving structural stability. X-ray photoelectron spectroscopy characterizations suggest moderate Li incorporation increases χ 33 via enhancing electronic polarization. These findings uncover the close relationship between the octahedra interstitial defects in wurtzite ZnMgO and its nonlinear-polarization behavior under the optical frequency electric field of high-power laser.

Influence of silicon content on high temperature tribology performance of TiAlCrSiN coatings

A series of TiAlCrSiXN coatings with various silicon contents were fabricated on Si(100) and 304 stainless steel substrates using a radiofrequency magnetron sputtering system, aiming to examine the effects of various Si content on wear behaviors at room temperature and 700 °C. The addition of silicon notably increased the coatings' hardness from 21 GPa to 29 GPa, attributed to significant compressive residual stress (−3.4 GPa) that inhibited dislocation movement. Room temperature wear tests revealed that wear rates varied between 0.6 and 3.7 (10−6mm3N−1 m−1) with increasing silicon content. The lowest wear rate is observed at a silicon content of 3.1 at.%, which is associated with an ideal residual stress of −1.2 GPa. This stress level played a crucial role in preventing crack propagation and delamination, thus enhancing wear protection. At 700 °C, the coatings' wear resistance was mainly governed by their oxidation resistance, with the most resistant coatings exhibiting wear rates from 1.6 to 4.4 (10−6mm3N−1 m−1). The silicon addition promoted the formation of an amorphous Si3N4 phase, serving as an oxygen diffusion barrier, thus enhancing resistance to oxidation at elevated temperatures. The findings suggest that TiAlCrSiN coatings offer a promising solution for advanced tribological applications, demonstrating improved performance at temperatures up to 700 °C.

Optical and electronic properties of BCN films deposited by magnetron sputtering.

Boron carbonitride (BCN) films containing hybridized bonds involving B, C, and N over wide compositional ranges enable an abundant variety of new materials, properties, and applications; however, their electronic performance is still limited by the presence of structural and electronic defects, yielding sluggish mobility and electrical conductivity. This work reports on mechanically stable BCN films and their corresponding optical and electronic properties. The ternary BCN films consisting of hybridized B-C-N bonds have been achieved by varying N2 flow by the radio frequency magnetron sputtering method. The BCN films show a bandgap value ranging from 3.32 to 3.82eV. Hall effect measurements reveal an n-type conductivity with an improved hall mobility of 226cm2/V s at room temperature for the optimal film. The n-BCN/p-Si heterojunctions exhibit a nonlinear rectifying characteristic, where the tunneling behavior dominates the injection regimes due to the density of defects, i.e., structural disorder and impurities. Our work demonstrates the tunable electrical properties of BCN/Si p-n diodes and, thus, is beneficial for the potential application in the fields of optics, optoelectronics, and electrics.

Fabrication of thin-film batteries composed of LiCoO2, Li3PO4, and Li layers

AbstractThis paper reports the fabrication of thin-film batteries which are composed of three stacking layers: LiCoO2, Li3PO4, and Li. First, a LiCoO2 layer is constructed on an electron-conductive substrate by pulsed laser deposition as a cathode. The crystallinity of the LiCoO2 layer is mainly controlled by the cationic ratio of Li and Co. Subsequently, an amorphous Li3PO4 layer with a high ionic conductivity is further deposited on the cathode LiCoO2 layer by radio frequency magnetron sputtering as a solid electrolyte. To avoid any possible damage which causes the formation of resistive species between LiCoO2 and Li3PO4, bias control of the substrate during Li3PO4 deposition is essential. Finally, a Li metal layer is deposited as an anode/current collector on the Li3PO4/LiCoO2 bilayer by resistive heating evaporation in a vacuum at an elevated temperature for the formation of a low resistive interface. The fabricated three-layer thin-film battery shows a high-rate capability when the LiCoO2 layer is a (104)-oriented epitaxial film.

The Impact of Temperature and Power Variation on the Optical, Wettability, and Anti-Icing Characteristics of AZO Coatings

The structural, wettability, and optical characteristics of aluminum-doped zinc oxide (AZO) thin films were studied with the objective of understanding the impact of deposition power and deposition temperature. Thin films were deposited using a radio frequency (RF) magnetron sputtering technique. The power output of the RF was augmented from 200 to 260 W, and the temperature was increased from 50 to 200 °C, which led to the development of a (002) peak for zinc oxide. The study of film thickness was carried out using the Swanepoel envelope method from data obtained through the UV-Vis spectrum. An increase in surface roughness value was shown to be connected with fluctuations in temperature as well as increases in deposition power. The findings revealed that as deposition power and temperature increased, the value of optical transmittance decreased, ranging from 70% to 90% based on the deposition parameters within the range of wavelengths that extend from 300 to 800 nm. The wettability properties of the samples were studied, and the maximum contact angle achieved was 110°. A Peltier apparatus was utilised in order to investigate the anti-icing capabilities, which revealed that the icing process was slowed down 3.38-fold. This work extends the understanding of the hydrophobicity and anti-icing capabilities of AZO thin films, specifically increasing both attributes which provide feasible options for purposes requiring resistance to ice.