Abstract

A series of TiAlCrSiXN coatings with various silicon contents were fabricated on Si(100) and 304 stainless steel substrates using a radiofrequency magnetron sputtering system, aiming to examine the effects of various Si content on wear behaviors at room temperature and 700 °C. The addition of silicon notably increased the coatings' hardness from 21 GPa to 29 GPa, attributed to significant compressive residual stress (−3.4 GPa) that inhibited dislocation movement. Room temperature wear tests revealed that wear rates varied between 0.6 and 3.7 (10−6mm3N−1 m−1) with increasing silicon content. The lowest wear rate is observed at a silicon content of 3.1 at.%, which is associated with an ideal residual stress of −1.2 GPa. This stress level played a crucial role in preventing crack propagation and delamination, thus enhancing wear protection. At 700 °C, the coatings' wear resistance was mainly governed by their oxidation resistance, with the most resistant coatings exhibiting wear rates from 1.6 to 4.4 (10−6mm3N−1 m−1). The silicon addition promoted the formation of an amorphous Si3N4 phase, serving as an oxygen diffusion barrier, thus enhancing resistance to oxidation at elevated temperatures. The findings suggest that TiAlCrSiN coatings offer a promising solution for advanced tribological applications, demonstrating improved performance at temperatures up to 700 °C.

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