Low Pressure Radio Frequency Plasma Research Articles

Similarity laws for two-dimensional simulations of low-pressure capacitively coupled radio-frequency discharges

Similarity laws (SLs) for low-pressure capacitive radio-frequency plasmas are generalized from one- to two-dimensional (2D) frameworks based on kinetic particle-in-cell simulations. Fundamental discharge parameters, such as the 2D distributions of electron densities and electric fields, are examined to assess the applicability of SLs to such discharges. The discharge characteristics are found to remain invariant when external control parameters are changed according to SLs. Even under conditions where nonlinear electron resonance heating caused by the self-excitation of the plasma series resonance due to the geometric reactor asymmetry plays an important role, the electron kinetics are shown to be invariant. Moreover, the validity of SLs for the ion dynamics is demonstrated. The results advance the applicability of SLs to a 2D cylindrical reactor geometry with azimuthal symmetry, indicating broad application prospects in practice.

Model of the Interaction of Reactive Gases with Polymer Materials in Low-Pressure Radio-Frequency Plasma

Model of the Interaction of Reactive Gases with Polymer Materials in Low-Pressure Radio-Frequency Plasma

Boron carbide thin film surface characterization after graphitic carbon removal using low-pressure oxygen gas RF plasma.

B 4 C-coated thin film mirrors are used in high brilliance synchrotron and x-ray free electron laser beamlines due to their low absorption coefficient and high thermal stability. As in the case of gold, platinum, and other thin film mirrors, B 4 C-coated mirrors also are affected due to synchrotron radiation-induced carbon contaminations in beamlines. In the present study, a graphitic carbon (C) layer deposited on top of boron carbide (B x C) thin film surface is removed by five successive oxygen radio frequency (RF) plasma exposures (RF power, 10W; O 2 flow, 30sccm; exposure time, 10min each). Before and after the carbon layer removal, structural and compositional properties of the B x C/C bilayer are characterized by soft x-ray reflectivity, x-ray photoelectron spectroscopy, grazing angle x-ray diffraction, and Raman spectroscopy techniques. Characterization results reveal that in the first four exposures the carbon layer thickness decreases continuously without affecting the B x C layer properties; however, in the fifth exposure, the carbon layer is completely removed along with a partial etching of the B x C layer too.

A study of plasma−porous carbon−CO2 interactions: Ammonia plasma treatment and CO2 capture

Owing to its high porosity and tunable surface chemistry activated carbon (AC) is considered a promising material for CO2 adsorption. Functionalising porous materials by plasma is challenging but if successful, it could enhance the CO2 uptake capacity of AC via chemisorption. This work presents an in-depth analysis of the interactions between ammonia plasmas and the porous surface of AC monolithic samples. The treatment involved an ammonia based atmospheric-pressure dielectric barrier discharge and a low-pressure radio frequency plasma. Unique plasma reactor designs for treating 3-dimensional, electrically conducting and non-conducting monolithic structures at atmospheric pressure with versatile applications are presented. The plasma-surface interactions were analysed using emission spectroscopy and X-ray photoelectron spectroscopy. High surface N containing AC samples were then used to assess the treatment effect on the subsurface. A much lower although a still significant amount of N was found at depths of ∼30 µm. A simple fit of the results showed that the ratio of plasma species reaching the surface with higher to lower sticking probability was 4:1. A slight decrease in the microporosity of the plasma treated samples was found and attributed to pore blocking by the grafted N species. Plasma treated AC with high N showed an improved CO2 adsorption capacity of up to 14 % and selectivity against CH4 and N2 adsorption showed that the treatment was selective primarily towards CO2.

The impact of ion mobility coefficients on plasma discharge characteristics

In this paper, the high-accuracy ion mobility coefficient based on the Chapman–Enskog approximation to the solution of the Boltzmann equation for low pressure radio frequency plasma discharges is presented. We employ two-dimensional fluid simulations of the argon filled axisymmetric reactor, where the effect of new ion-kinetics-based fluid closure is compared to theoretical expressions and experimental data. The spatial profiles of plasma composition in the low pressure radio frequency capacitively coupled plasma are presented, which includes the metastable reactions in the simulation. Moreover, inelastic collision integrals terms, due to charge exchange inelastic collisions between ions and neutral species, have been also considered. A Monte Carlo simulation of kinetic ion energy distribution of impinging on the radio frequency powered electrode provides a measure of accuracy of the new transport model. From our simulation, the results that mirror the influence of ion mobility coefficient obtained by the Chapman–Enskog method on plasma physical quantities under different pressures, frequencies, and electrode gaps is in good agreement with experimental measurement results and theoretical expressions.

The Influence of Glow and Afterglow Cold Plasma Treatment on Biochemistry, Morphology, and Physiology of Wheat Seeds.

Cold plasma (CP) technology is a technique used to change chemical and morphological characteristics of the surface of various materials. It is a newly emerging technology in agriculture used for seed treatment with the potential of improving seed germination and yield of crops. Wheat seeds were treated with glow (direct) or afterglow (indirect) low-pressure radio-frequency oxygen plasma. Chemical characteristics of the seed surface were evaluated by XPS and FTIR analysis, changes in the morphology of the seed pericarp were analysed by SEM and AFM, and physiological characteristics of the seedlings were determined by germination tests, growth studies, and the evaluation of α-amylase activity. Changes in seed wettability were also studied, mainly in correlation with functionalization of the seed surface and oxidation of lipid molecules. Only prolonged direct CP treatment resulted in altered morphology of the seed pericarp and increased its roughness. The degree of functionalization is more evident in direct compared to indirect CP treatment. CP treatment slowed the germination of seedlings, decreased the activity of α-amylase in seeds after imbibition, and affected the root system of seedlings.

Experimental installation for study the low-power ICRF plasma at low pressures with equipment for experiment data synchronization

An installation for numerical and experimental studies of low-pressure radio frequency plasma for surface modification of functional materials with equipment for data synchronization are presented. The equipment for data synchronization as well as intermediate results for plasma generation are showed.

A self-consistent method for solving ion diffusion and mobility coefficients

A self-consistent method for computation and testing of transport coefficients in low pressure radio frequency plasma discharges is detailed by comparing the experimental fitting formula and previous results gained from the Langevin expression. In this paper, for the first time, we apply the Chapman–Enskog method for calculating transport coefficients of ions to a weakly ionized plasma which is laid in a thermodynamic non-equilibrium and chemical non-equilibrium state. The ion diffusion coefficient is obtained by using the Chapman–Enskog method expanded to the second order approximation. The corresponding ion mobility coefficient is deduced from Einstein's relation. A two-dimensional axisymmetric fluid model of capacitively coupled plasmas is employed to determine the plasma composition. Moreover, the comparison of plasma physical characteristics using ion transport coefficients calculated by the Chapman–Enskog method with those derived from theoretical and experimental methods is also investigated. The results show that the ion transport coefficients obtained by the Chapman–Enskog method and their effect on plasma physical quantities are in good agreement with the experimental measurement and theoretical expression. Furthermore, the results indicate that the set of exponential and Morse potentials is more reasonable for the ion–neutral particles' interaction.

Probing negative ions and electrons in the afterglow of a low-pressure oxygen radiofrequency plasma using laser-induced photodetachment

This paper reports on the further development and improvement of time-resolved laser-induced photodetachment in concert with microwave cavity resonance spectroscopy. The method is applied to measure—with microsecond time resolution—the decaying density of negative oxygen ions (O−, O, and O) and that of free electrons in the afterglow of a pulsed capacitively coupled radiofrequency-driven oxygen plasma. The afterglow behavior of the electrons shows a significant dependence on the gas pressure between 3 Pa and 6 Pa. For a pressure of 3 Pa, at which the plasma is in the so-called γ-mode, the decay of the negative ion density is slower than that of the electron density, eventually leading to the occurrence of a negative-ion-positive-ion plasma. At a slightly elevated pressure of 6 Pa (and higher), the plasma transits into the so-called α-mode, in which a short period of increased electron density is detected just after switching off the plasma. In the α-mode, the negative ion and electron densities decay within similar timescales, leading to the trapping of negative ions. In this pressure range, the decay of the additional electron density released by the photodetachment of negative ions occurs according to two distinct timescales. However, for increasingly elevated pressures above 10 Pa, the photodetachment signal is characterized by decay with an undershoot, which may indicate a temporary local disturbance of the plasma’s quasi-neutrality in the volume irradiated by the laser beam.

Influence of Processing in Radio-Frequency Low Pressure Plasma on the Adhesion of Synthetic Fibers to Polymer Binders

The paper presents the results of a study of the effect of radio-frequency (RF) plasma modification on the adhesion of ultra-high molecular weight polyethylene (UHMWPE) and polypropylene (PP) fibers to epoxy-diane (ED), epoxy-urethane (EU) and polyester (PES) binder. To assess the adhesive properties, the wet-pull-out method was used, which makes it possible to determine the normalized value of the destructive load of the microcomposite by the force of pulling out the fiber from the polymer matrix.

SOMAFOAM: An OpenFOAM based solver for continuum simulations of low-temperature plasmas

We report the development of SOMAFOAM, a finite volume framework for performing continuum simulations of low-temperature plasmas. The primary goal of this work is to discuss the features of SOMAFOAM along with representative results provided as examples for a range of operating conditions and geometries. This includes plasma and plasma–dielectric systems operating in direct current, radio frequency, and microwave regimes from pressures as low as 100 mTorr to atmospheric pressure. The code has several useful features including the ability to run massively parallel simulations using arbitrary geometries, structured/unstructured meshes, choice of models such as drift–diffusion/full-momentum at runtime, and species-dependent timesteps to name a few. The verification/validation studies presented include comparison with previously published continuum simulations (low-pressure direct current and radio frequency plasma), with experiments (Gaseous Electronics Conference Reference Cell and microwave microplasma ignited in a split ring resonator), and previously published kinetic simulations (low-pressure radio frequency plasma). Other examples provided include a direct current atmospheric pressure microplasma bounded by dielectric sidewalls and a helium–nitrogen plasma ignited using a needle electrode facing a dielectric. The performance of the code is also discussed with serial and distributed memory parallel runs demonstrated up to 512 cores. The design and implementation of the code in a modular object-oriented framework allows for easy extension and seamless coupling with other codes and can be expected to play an important role in both academia and industry.

Effect of pressure and space between electrodes on the deposition of SiN x H y films in a capacitively coupled plasma reactor

The fluid model, also called the macroscopic model, is commonly used to simulate low temperature and low pressure radiofrequency plasma discharges. By varying the parameters of the model, numerical simulation allows us to study several cases, providing us the physico-chemical information that is often difficult to obtain experimentally. In this work, using the fluid model, we employ numerical simulation to show the effect of pressure and space between the reactor electrodes on the fundamental properties of silicon plasma diluted with ammonia and hydrogen. The results show the evolution of the fundamental characteristics of the plasma discharge as a function of the variation of the pressure and the distance between the electrodes. By examining the pressure-distance product in a range between 0.3 Torr 2.7 cm and 0.7 Torr 4 cm, we have determined the optimal pressure-distance product that allows better deposition of hydrogenated silicon nitride (SiN x H y ) films which is 0.7 Torr 2.7 cm.

In situ XPS analysis of the electronic structure of silicon and titanium thin films exposed to low-pressure inductively-coupled RF plasma

Carbon contamination of synchrotron and free-electron lasers beamline optics continues to be a major nuisance due to the interaction of the intense photon beams with the surfaces of the optical elements in the presence of residual gases even in ultrahigh vacuum (UHV) conditions. Among the available in situ cleaning strategies, low-pressure radio frequency (RF) plasma treatment has emerged as a useful and relatively simple approach to remove such carbon contamination. However, the irreversible damage that the plasma may induce in such critical surfaces has to be carefully characterized before its general application. In this study, we focus on reducing the amount of carbon from UHV chamber inside surfaces via silicon and titanium coatings using a low-pressure inductively-coupled downstream plasma source and we characterize the surface alterations by in situ X-ray photoemission spectroscopy (XPS). The in situ mirror cleaning is simulated by means of silicon wafers. We observe upward band bending, which translates into lower binding energies of the photoemission lines, that we attribute to the generation of vacancies and trapped charges in the oxide layers.

High-energy ballistic electrons in low-pressure radio-frequency plasmas

This work demonstrates the presence of a small number of high-energy ballistic electrons (HEBEs) that originate from secondary electrons in low-pressure radio-frequency (rf) plasmas. The kinetic behaviors of the HEBEs are illustrated through electron energy probability functions from the fully kinetic particle-in-cell simulations, showing two wavy high-energy tails and two bifurcations during one rf cycle. Test-particle simulations and a semi-analytical method associated with nonlocal electron kinetics are performed to characterize the HEBE trajectories, which reveal the ballistic nature of the HEBEs and their typical bouncing features between the rf sheaths. Parameter dependence of the HEBEs on the discharge conditions (e.g., gas pressure, gap distance, and rf frequency) are identified, which is relevant to the plasma collisionality. With a pronounced presence of HEBEs, the overall impacts of the secondary electron emission on discharge parameters, such as electron power absorption and ionization rate, are also illustrated.

Influence of Low-Pressure RF Plasma Treatment on Aramid Yarns Properties.

The aim of the study was to modify the surface free energy (SFE) of meta- (mAr) and para-aramid (pAr) yarns by their activation in low-pressure air radio frequency (RF) (40 kHz) plasma and assessment of its impact on the properties of the yarns. After 10 and 90 min of activation, the SFE value increased, respectively, by 14% and 37% for mAr, and by 10% and 37% for pAr. The value of the polar component increased, respectively by 22% and 57% for mAr and 20% and 62% for pAr. The value of the dispersion component for mAr and pAr increased respectively by 9% and 25%. The weight loss decreased from 49% to 46% for mAr and 62% to 50% for pAr after 90 min of activation. After 90 min, the specific strength for mAr did not change and for pAr it decreased by 40%. For both yarns, the 10 min activation in plasma is sufficient to prepare their surface for planned nanomodification.

Modification of Particulate Fillers in Low-Pressure Radio Frequency Gas Discharge

The paper aims at investigating the effects of low-pressure radio-frequency plasma on properties of zeolites which may be used as fillers for producing composite materials.

Stimulating effects of plasma and radio-wave treatments of red clover seeds on morphological and physiological parameters of seedlings

It was established that the treatment of clover seeds with radio frequency (RF) electromagnetic field and low pressure (200 Pa) RF plasma excited at a frequency of 5.28 MHz has a stimulating effect both on the germination of seeds and on the growth and development of plants grown in laboratory and field conditions. Plasma treatment for 5 min led to the greatest stimulation of seed germination and germination energy, a significant increase in the biomass of shoots and roots. At the same time, the content of phenolic compounds and flavonoids in plant leaves decreased.

The effect of low-pressure plasma treatment of seeds on the plant resistance to pathogens and crop yields

The effect of pre-sowing plasma seed treatment of maize (Zea mays L.), narrow-leaved lupine (Lupinus angustifolius L.) and winter wheat (Triticum aestivum L.) on seed germination, plant resistance to common diseases during vegetation and crop yield is studied in laboratory and field experiments. It is shown the efficiency of seed treatment by low-pressure radio frequency plasma in suppression of a number of fungal crop diseases such as boil smut of maize, root rot of lupine and winter wheat at different growth stages. At the stage of V9 (9th leaf visible) the infection level in maize plants from treated seeds was 3 times less than that in control. Root rot disease development of lupine at the first stages (3rd–4th leaves emerged) of growth did not exceed 6.9% in plants from the treated seeds while reached to 47.8% in control. Pre-sowing seed treatment led to suppress the anthracnose spreading on narrow-leaved lupine up to the flowering stage. It was revealed that, due to a decrease in the level of seed infection, stimulation of field germination, early seedling growth and plant resistance to pathogens during the vegetation period, the winter wheat grain yield increased by 2.3%, maize—by 1.7%, narrow–leaved lupine—by 26.8% compared to control plants. Increases in activity of non-enzymatic antioxidants (proline, anthocyanins as well as total phenolic content) in roots of maize seedling were observed which may indicate a significant role of plasma seed treatment in improving the plant resistance to biotic and abiotic stress during the vegetation.

Pattern Formation in Low-Pressure Radio-Frequency Plasmas due to a Transport Instability.

Pattern formation, observed experimentally in a radio-frequency plasma in annular geometry, and characterized by azimuthal symmetry breaking of the plasma parameters, is reported. The azimuthal modulation increases with increasing pressure in the range 1-300Pa. These experimental observations are accurately described by a fluid model in which the transport coefficients are computed from a 0D Boltzmann kinetic equation. A linear stability analysis shows that unstable modulations develop at low and intermediate pressures, following an instability mechanism due to an energy transport effect-the instability mechanism lies in the sign of off-diagonal terms for the electron particles and energy fluxes expressed as functions of gradients of the plasma density and the electron temperature. This model is an excellent candidate to explain the occurrence of striations in radio-frequency plasmas.

A combination of plasma diagnostics and Raman spectroscopy to examine plasma-graphene interactions in low-pressure argon radiofrequency plasmas

Graphene films were exposed to low-pressure capacitively coupled (E-mode) and inductively coupled (H-mode) argon radio frequency plasmas to investigate damage formation by very-low-energy ion irradiation. In the H-mode, plasma parameters were assessed by a Langmuir probe and plasma sampling mass spectrometry to determine the conditions of fixed ion fluence but with different average ion energies. The populations of argon metastable and resonant argon atoms were also measured by optical absorption spectroscopy to determine their contribution to the total energy flux during plasma treatment. In the H-mode, in which plasma-graphene interactions are dominated by ion irradiation effects, Raman spectroscopy reveals a significant rise in the D/G ratio and full width at half maximum of the G peak as well as the onset of graphene amorphization, even at very low ion energies (between 7 and 13 eV). In the E-mode characterized by comparable ion energy but much lower ion density, significant damage is also observed, a feature ascribed to the additional energy flux linked to the de-excitation of metastable argon species on the graphene surface.