Radio Frequency Glow Discharge Research Articles

Transient response of the emission signal controlled by pulsated bias current in pulsed radio-frequency glow discharge optical emission spectrometry

The objective of this paper is to suggest a new method for controlling temporal response of the emission signal from a pulsed radio-frequency (RF) glow discharge plasma for optical emission spectrometry. It is a noticeable feature that the emission profile accompanies a transient stage in the pulsed operation, appearing as a pre-peak which sometimes becomes 10–20 times as large as the plateau-stage intensity. Therefore, it is worth studying how the spike-like transient signal can be modified to a smooth response following the square-wave timing signal by using any experimental procedure. For this purpose, a phenomenon regarding self-bias voltage in RF plasma was focused on. The self-bias voltage is induced near the RF-loaded electrode, and then, a bias current can be introduced through an electric circuit including the plasma body by connecting an external electric device with the glow discharge plasma source. The bias current could be also pulsated, while it was synchronized with the pulsed RF plasma. Larger pulses of the bias current could change the characteristics of the plasma for atomic emission spectrometry, extending the size of the RF plasma as well as enhancing the emission intensity, which enabled the plateau stage to become more prominent in the pulsed emission profile. Several experimental parameters, such as an amplitude of the bias current, duty ratios of both the RF power and the bias current, and a phase shift between them, were investigated to obtain a plateau-like transient response of the emission signal. It was found that the phase-shift angle should be regulated between timing pulses of the RF voltage and the bias current.

Characterization of recrystallized depth and dopant distribution in laser recovery of grinding damage in single-crystal silicon

A nanosecond pulsed Nd:YAG laser was irradiated on a boron-doped single-crystal silicon wafer with a diamond grinding finish to recover the grinding-induced subsurface damage. In order to visualize and measure the depth of the laser melted/recrystallized layer, small-angle beveled polishing was performed in pure water followed by KOH etching. It enabled the direct observation of the recrystallized region using a differential interference microscope and the measurement of its depth using a white light interferometer. Crystallinity analysis of the recrystallized region was carried out by using laser micro-Raman spectroscopy, and the dopant concentration profile was characterized by using radio frequency glow discharge optical emission spectrometry (rf-GD-OES). The results showed that the crystallinity and boron distribution in the recrystallized region changed after laser recovery. The dopant concentration becomes higher at the boundary of the recrystallized region and the bulk. This study demonstrates the possibility of boron concentration control by using suitable laser parameters.

Influences of the cold atmospheric plasma jet treatment on the properties of the demineralized dentin surfaces

Improvement of the bonding strength and durability between the dentin surface and the composite resin is a challenging job in dentistry. In this paper, a radio-frequency atmospheric-pressure glow discharge (RF-APGD) plasma jet is employed for the treatment of the acid-etched dentin surfaces used for the composite restoration. The properties of the plasma treated dentin surfaces and the resin–dentin interfaces are analyzed using the x-ray photoemission spectroscopy, contact angle goniometer, scanning electron microscope and microtensile tester. The experimental results show that, due to the abundant chemically reactive species existing in the RF-APGD plasma jet under a stable and low energy input operating mode, the contact angle of the plasma-treated dentin surfaces decreases to a stable level with the increase of the atomic percentage of oxygen in the specimens; the formation of the long resin tags in the scattered clusters and the hybrid layers at the resin–dentin interfaces significantly improve the bonding strength and durability. These results indicate that the RF-APGD plasma jet is an effective tool for modifying the chemical properties of the dentin surfaces, and for improving the immediate bonding strength and the durability of the resin-dentin bonding in dentistry.

Effect of pulsed discharge on the ignition of pulse modulated radio frequency glow discharge at atmospheric pressure

A pulsed discharge is introduced between two sequential pulse-modulated radio frequency glow discharges in atmospheric helium. The dependence of radio frequency discharge ignition on pulsed discharge intensity is investigated experimentally with the pulse voltage amplitudes of 650, 850, and 1250 V. The discharge characteristics and dynamics are studied in terms of voltage and current waveforms, and spatial-temporal evolution of optical emission. With the elevated pulsed discharge intensity of two orders of magnitude, the ignition of radio frequency discharge is enhanced by reducing the ignition time and achieving the stable operation with a double-hump spatial profile. The ignition time of radio frequency discharge is estimated to be 2.0 μs, 1.5 μs, and 1.0 μs with the pulse voltage amplitudes of 650, 850, and 1250 V, respectively, which is also demonstrated by the spatial-temporal evolution of optical emission at 706 and 777 nm.

Research progress of metal catalysts enhanced synthesized by cold plasma

Cold plasma is a kind of non-thermal plasma, and characterized by high electron temperature (1-10 eV) and low gas temperature, which can be close to room temperature. It has been proved to be a fast, facile and environmentally friendly new method for synthesizing supported metal catalysts. Enhanced synthesis of metal catalysts by cold plasma consists of complex physical and chemical reactions. On the one hand, the active environment provided by cold plasma, can not only speed up the chemical reactions, shorten the reaction time from a few hours to several minutes, but also realize the kinetically or thermodynamically infeasible chemical reactions to achieve unconventional preparation. On the other hand, the phase contact behavior on a mesoscopic scale is influenced during cold plasma enhanced preparation, thereby the metal catalysts with structure different from that synthesized by traditional method. This review summarizes the reactor structure, physical and chemical mechanism for synthesizing metal catalysts by cold plasma, as well as the structure characteristics of the obtained metal catalysts. According to the working pressure, cold plasma can be categorized into low-pressure (LP) cold plasma and atmospheric-pressure (AP) cold plasma. The LP cold plasma is often generated by radio frequency glow discharge or direct current glow discharge, while the AP cold plasma is generally generated by dielectric barrier discharge and AP cold plasma jet. Energetic electrons are deemed to be the reducing agents for LP cold plasma. However, due to the frequent collisions among the electrons and gas molecules at atmospheric pressure, the electron energy in AP cold plasma is not high enough to reduce the metal ions directly. Therefore, hydrogen-containing gases are often adopted to generate active hydrogen species to reduce the metal ions. The process of synthesizing the metal catalysts by using the cold plasma is a fast, low-temperature process, and in the preparation process there exists a strong Coulomb repulsion. Therefore, metal catalysts with small size and high dispersion of metal nanoparticles, strong metal-support interaction, as well as specific metal structures (alloying degree and crystallinity) and modified supports can be obtained. Correspondingly, metal catalysts with high catalytic activity and stability can be synthesized. In addition, the challenges of preparing the cold plasma are discussed, and the future development is also prospected.

Nanometer‐Scale Depth‐Resolved Atomic Layer Deposited SiO2 Thin Films Analyzed by Glow Discharge Optical Emission Spectroscopy

In this contribution, pulsed radio frequency (rf) glow discharge optical emission spectroscopy (GDOES) is used to investigate the film properties of SiO2 deposited by plasma enhanced atomic layer deposition (PEALD), for example, the chemical composition, structural properties and film thickness. The total sputtering time until the interface between the SiO2 layer and the Si substrate is ≈13 s. The main impurities in the film, that is, H, C, and N, are detected. It is observed that both C and N intensities decrease with increasing plasma power during deposition of the thin film. The higher plasma power seems to increase the reactivity of the PEALD process and consequently, it might reduce the concentration of impurities in the deposited film. Moreover, the deviation of the GDOES sputtering rates on the film are related to the film density. The thickness of one‐hundred‐nanometer range SiO2 film is calculated from the GDOES silicon and oxygen emission profiles, and its difference from ellipsometry and X‐ray reflectivity measurements highlights the challenges for the GDOES technique for transparent thin films.

Review Article: Tracing the recorded history of thin-film sputter deposition: From the 1800s to 2017

Thin films, ubiquitous in today's world, have a documented history of more than 5000 years. However, thin-film growth by sputter deposition, which required the development of vacuum pumps and electrical power in the 1600s and the 1700s, is a much more recent phenomenon. First reported in the early 1800s, sputter deposition already dominated the optical-coating market by 1880. Preferential sputtering of alloys, sputtering of liquids, multitarget sputtering, and optical spectroscopy for process characterization were all described in the 1800s. Measurements of threshold energies and yields were carried out in the late 1800s, and yields in reasonable agreement with modern data were reported in the 1930s. Roll-to-roll sputter coating on flexible substrates was introduced in the mid-1930s, and the initial demonstration of sustained self-sputtering (i.e., sputtering without gas) was performed in 1970. The term magnetron dates to 1921, and the results of the first magnetron sputtering experiments were published in the late 1930s. The earliest descriptions of a parallel-plate magnetron were provided in a patent filed in 1962, rotatable magnetrons appeared in the early 1980s, and tunable “unbalanced” magnetron sputtering was developed in 1992. Two additional forms of magnetron sputtering evolved during the 1990s, both with the goal of efficiently ionizing sputter-ejected metal atoms: ionized-magnetron sputtering and high-power impulse magnetron sputtering, with the latter now being available in several variants. Radio frequency (rf) glow discharges were reported in 1891, with the initial results from rf deposition and etching experiments published in the 1930s. Modern capacitively-coupled rf sputtering systems were developed and modeled in the early 1960s, and a patent was filed in 1975 that led to pulsed-dc and mid-frequency-ac sputtering. The purposeful synthesis of metal-oxide films goes back to at least 1907, leading to early metal-oxide and nitride sputtering experiments in 1933, although the term “reactive sputtering” was not used in the literature until 1953. The effect of target oxidation on secondary-electron yields and sputtering rates was reported in 1940. The first kinetic models of reactive sputtering appeared in the 1960s; high-rate reactive sputtering, based on partial-pressure control, was developed in the early 1980s. While abundant experimental and theoretical evidence already existed in the late 1800s to the early 1900s demonstrating that sputtering is due to momentum transfer via ion-bombardment-induced near-surface collision cascades, the concept of sputtering resulting from local “impact evaporation” continued in the literature into the 1960s. Modern sputtering theory is based upon a linear-transport model published in 1969. No less than eight Nobel Laureates in Physics and Chemistry played major roles in the evolution of modern sputter deposition.

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A simple and rapid method for determination of boron in fast breeder reactor components

The present paper describes a new analytical method developed for direct determination of boron in steels using radio frequency glow discharge optical emission spectrometer. “Single parameter alternative method” technique has been used to optimize the various experimental conditions of glow discharge plasma such as forward power, gas pressure inside plasma chamber, pre-integration time, and integration time. Different emission lines for boron were studied and inter element interference effect is also discussed in the paper. A complete statistical analysis has been done to validate the developed method. A RSD of less than ±5% is achieved for boron in the range of 0.0010–0.020% in Steels using this method.

Rapid Elemental Analysis of Aerosols Using Atmospheric Glow Discharge Optical Emission Spectroscopy.

A new, low-cost approach based on the application of atmospheric radio frequency glow discharge (rf-GD) optical emission spectroscopy (OES) has been developed for near real-time measurement of multielemental concentration in airborne particulate phase. This method involves deposition of aerosol particles on the tip of a cathode in a coaxial microelectrode system, followed by ablation, atomization, and excitation of the particulate matter using the rf-GD. The resulting atomic emissions are recorded using a spectrometer for elemental identification and quantification. The glow discharge plasma in our system was characterized by measuring spatially resolved gas temperatures (378-1438 K) and electron densities (2-5 × 1014 cm-3). Spatial analysis of the spectral features showed that the excitation of the analyte occurred in the region near the collection electrode. The temporal analysis of spectral features in the rf-GD showed that the collected particles were continuously ablated; the time for complete ablation of 193 ng of sucrose particles was found to be approximately 2 s. The system was calibrated using 100 nm particles containing C, Cd, Mn, and Na, respectively. The method provides limits of detection in the range of 0.055-1.0 ng, and a measurement reproducibility of 5-28%. This study demonstrates that the rf-GD can be an excellent excitation source for the development of low-cost hand-held sensors for elemental measurement of aerosols.

Emission characteristics of 6.78-MHz radio-frequency glow discharge plasma in a pulsed mode

This paper investigated Boltzmann plots for both atomic and ionic emission lines of iron in an argon glow discharge plasma driven by 6.78-MHz radio-frequency (RF) voltage in a pulsed operation, in order to discuss how the excitation/ionization process was affected by the pulsation. For this purpose, a pulse frequency as well as a duty ratio of the pulsed RF voltage was selected as the experimenter parameters. A Grimm-style radiation source was employed at a forward RF power of 70W and at an argon pressures of 670Pa. The Boltzmann plot for low-lying excited levels of iron atom was on a linear relationship, which was probably attributed to thermal collisions with ultimate electrons in the negative glow region; in this case, the excitation temperature was obtained in a narrow range of 3300–3400K, which was hardly affected by the duty ratio as well as the pulse frequency of the pulsed RF glow discharge plasma. This observation suggested that the RF plasma could be supported by a self-stabilized negative glow region, where the kinetic energy distribution of the electrons would be changed to a lesser extent. Additional non-thermal excitation processes, such as a Penning-type collision and a charge-transfer collision, led to deviations (overpopulation) of particular energy levels of iron atom or iron ion from the normal Boltzmann distribution. However, their contributions to the overall excitation/ionization were not altered so greatly, when the pulse frequency or the duty ratio was varied in the pulsed RF glow discharge plasma.

A Comparative Evaluation of Contact Angle Changes on three Topical Surfactant Application and Exposure to Radio-Frequency Glow Discharge

Introduction The construction of an acceptable fixed or removable prosthesis depends upon casts and dies having maximum accuracy. An accurate die must be a perfect positive replica of the prepared tooth. An important factor involved in making accurate casts or dies is the interaction of the gypsu

Comparison of the observed and calculated coherent forward scattering spectra of the 842.5 nm Ar I and 844.6 nm O I lines in a radio frequency glow discharge

The coherent forward scattering (CFS) spectra of O I 844.6nm and Ar I 842.5nm lines in a radio frequency (RF) glow discharge were measured using a CFS spectrometer that functions in the Faraday configuration with permanent double-ring magnets and a diode-laser source. A significant change in the CFS spectrum of the Ar I 842.5nm line was observed when the partial pressures of argon in a HeAr RF glow discharge were changed . Based on the theoretical calculations of the CFS spectra performed using Faraday functions, a comparison between the observed and calculated spectra was performed. The CFS line profile of O I 844.6nm and changes in the Ar I 842.5nm CFS spectrum are explained by theoretical calculations.

Application of Radio Frequency Glow Discharge Sputtering for Nanoindentation Sample Preparation

The applicability of radio frequency glow discharge (rf-GD) sputtering to the surface finishing of nanoindentation specimens was examined for pure Al, Cu, and Ni. Comparisons were made between specimens that had been subjected to the following surface finishing: (1) rf-GD sputtering, (2) electropolishing, and (3) mechanical polishing with 0.25 µm of diamond suspension. It was suggested from the nanoindentation behavior and the quality of electron backscattered diffraction patterns that residual damage on the surface of the rf-GD sputtered samples was as small as that of electropolished samples, while some damages remained on the surface of the mechanically polished samples. The areal roughness within a 1-μm square of the rf-GD sputtered surface was comparable to that of the mechanically polished surface and slightly larger than that of the electropolished surface. Nonetheless, the difference of the roughness within the range of this study has no practical impact upon nanohardness and elastic modulus evaluation. Pop-in events occurred in the electropolished and rf-GD sputtered specimens, but not in the mechanically polished samples. The critical load for pop-in to occur was slightly smaller in rf-GD sputtered sample than in electropolished samples.

Numerical study on the gas heating mechanism in pulse-modulated radio-frequency glow discharge**Project supported by the National Natural Science Foundation of China (Granted Nos. 11405022 and 11475040) and Dalian High Level Talent Innovation Support Plan, China (Grant No. 2015R050).

The gas heating mechanism in the pulse-modulated radio-frequency (rf) discharge at atmospheric pressure was investigated with a one-dimensional two-temperature fluid model. Firstly, the spatiotemporal profiles of the gas temperature () in both consistent rf discharge and pulse-modulated rf discharge were compared. The results indicated that decreases considerably with the pulse-modulated power, and the elastic collision mechanism plays a more important role in the gas heating change. Secondly, the influences of the duty cycle on the discharge parameters, especially on the , were studied. It was found that decreases almost linearly with the reduction of the duty cycle, and there exists one ideal value of the duty cycle, by which both the can be adjusted and the glow mode can be sustained. Thirdly, the discharge mode changing from α to γ mode in the pulse-modulated rf discharge was investigated, the spatial distributions of in the two modes show different features and the ion Joule heating is more important during the mode transition.

Signal Enhancement with Stacked Magnets for High-Resolution Radio Frequency Glow Discharge Mass Spectrometry.

A method for signal enhancement utilizing stacked magnets was introduced into high-resolution radio frequency glow discharge-mass spectrometry (rf-GD-MS) for significantly improved analysis of inorganic materials. Compared to the block magnet, the stacked magnets method was able to achieve 50-59% signal enhancement for typical elements in Y2O3, BSO, and BTN samples. The results indicated that signal was enhanced as the increase of discharge pressure from 1.3 to 8.0 mPa, the increase of rf-power from 10 to 50 W with a frequency of 13.56 MHz, the decrease of sample thickness, and the increase of number of stacked magnets. The possible mechanism for the signal enhancement was further probed using the software "Mechanical APDL (ANSYS) 14.0". It was found that the distinct oscillated magnetic field distribution from the stacked magnets was responsible for signal enhancement, which could extend the movement trajectories of electrons and increase the collisions between the electrons and neutral particles to increase the ionization efficiency. Two NIST samples were used for the validation of the method, and the results suggested that relative errors were within 13% and detection limit for six transverse stacked magnets could reach as low as 0.0082 μg g-1. Additionally, the stability of the method was also studied. RSD within 15% of the elements in three nonconducting samples could be obtained during the sputtering process. Together, the results showed that the signal enhancement method with stacked magnets could offer great promises in providing a sensitive, stable, and facile solution for analyzing the nonconducting materials.

Radiofrequency Glow Discharge as a Mode of Disinfection for Elastomeric Impression Materials.

Prosthodontic practice involves procedures in which impressions of the maxillary and mandibular arches are mandatory. Cross infection is one of the major problems that can occur in regular dental practice. Every dentist should take utmost care to prevent cross infection as oral cavity is the source of variety of microorganisms which can often cause diseases that can be fatal. Although precautions, such as wearing of gloves and mask, sterilization of instruments are given importance, the need for disinfection of impressions is often neglected. Hence, the aim of the study was to assess the disinfection potential of radiofrequency glow discharge (RGD) by microbiological studies. Disinfection potential of RGD on addition silicone (Reprosil, Dentsply, Milford DE, USA) was assessed. Total sample size was 20. Samples were divided into two groups of 10 each. Group I - control group and group II -RGD-treated group. Main groups were subdivided into subgroups A and B. Data collected were analyzed. The RGD-treated samples were found to be culture sterile which meant that there were no signs of growth of any organisms, thus proving the disinfection potential of RGD. From this study, we can conclude that RGD is a very rapid and handy device, which can disinfect saliva contaminated elastomeric impression material surfaces. When compared with the difficulties and lack of efficiency encountered in disinfecting impressions by immersion and spray atomization, RGD can be very handy in dental clinics, as it is a very rapid and convenient method for infection control.

Improvement in Signal Response of In-depth Elemental Profiles in Radio-frequency Glow Discharge Optical Emission Spectrometry by Using a Bias-current Introduction Method

Improvement in Signal Response of In-depth Elemental Profiles in Radio-frequency Glow Discharge Optical Emission Spectrometry by Using a Bias-current Introduction Method

A chemical stability study of trimethylsilane plasma nanocoatings for coronary stents

Trimethylsilane (TMS) plasma nanocoatings were deposited onto stainless steel coupons in direct current (DC) and radio frequency (RF) glow discharges and additional NH3/O2 plasma treatment to tailor the coating surface properties. The chemical stability of the nanocoatings were evaluated after 12 week storage under dry condition (25 °C) and immersion in simulated body fluid (SBF) at 37 °C. It was found that nanocoatings did not impact surface roughness of underlying stainless steel substrates. X-ray photoelectron spectroscopy and Fourier transform infrared spectroscopy were used to characterize surface chemistry and compositions. Both DC and RF nanocoatings had Si- and C-rich composition; and the O- and N-contents on the surfaces were substantially increased after NH3/O2 plasma treatment. Contact angle measurements showed that DC-TMS nanocoating with NH3/O2 treatment generated very hydrophilic surfaces. DC-TMS nanocoatings with NH3/O2 treatment showed minimal surface chemistry change after 12 week immersion in SBF. However, nitrogen functionalities on RF-TMS coating with NH3/O2 post treatment were not as stable as in DC case. Cell culture studies revealed that the surfaces with DC coating and NH3/O2 post treatment demonstrated substantially improved proliferation of endothelial cells over the 12 week storage period at both dry and wet conditions, as compared to other coated surfaces. Therefore, DC nanocoatings with NH3/O2 post treatment may be chemically stable for long-term properties, including shelf-life storage and exposure to the bloodstream for coronary stent applications.

Operation Mode on Pulse Modulation in Atmospheric Radio Frequency Glow Discharges**supported by National Natural Science Foundation of China (Nos. 11475043 and 11375042)

The discharge operation regime of pulse modulated atmospheric radio frequency (RF) glow discharge in helium is investigated on the duty cycle and frequency of modulation pulses. The characteristics of radio frequency discharge burst in terms of breakdown voltage, alpha(α)-gamma(γ) mode transition voltage and current are demonstrated by the discharge current voltage characteristics. The minimum breakdown voltage of RF discharge burst was obtained at the duty cycle of 20% and frequency of 400 kHz, respectively. The α-γ mode transition of RF discharge burst occurs at higher voltage and current by reducing the duty cycle and elevating the modulation frequency before the RF discharge burst evolving into the ignition phase, in which the RF discharge burst can operate stably in the γ mode. It proposes that the intensity and stability of RF discharge burst can be improved by manipulating the duty cycle and modulation frequency in pulse modulated atmospheric RF glow discharge.