The interfaces between poly(vilylidene fluoride) (PVDF) and the chromium film as well as the nickel film have been studied by x-ray photoelectron spectroscopy (XPS). Chromium carbide and fluoride were formed at the interface when chromium was vapor deposited on the PVDF film. The chromium fluorides formed on the PVDF surface could be reduced by incoming Cr vapor atoms. According to mass spectroscopy, simple hydrocarbon gas species were produced during Cr deposition. While nickel carbide was detected by XPS on the Ni deposited PVDF, no fluoride was found on the substrate. In addition to simple hydrocarbon gas species, fluorocarbon gas product was produced during Ni deposition.