Polymer surface modification often requires a proper control of reactants and surface activation. Ion beam techniques offer, in a rather unique manner, such processing controls. Firstly, unusual chemical species in an ion form can be generated in and extracted from a plasma, thus a large variety of reactants can be studied. The extracted ions can also be readily purified with a mass filter, such that a pure reactant can be delivered to a polymer surface. In addition, the ion fluence can be easily controlled for the prevention of an excessive reactant exposure, an exposure which can lead to undesirable multiple functionalization products. Furthermore, possible only with an ion beam approach is the control of a reactant's kinetic energy to a high enough value for promoting the chemisorption of the reactant, but a low enough value to prevent impact dissociation of the reactant. In an alternative methodology, a surface modification procedure is partitioned into a step for generating an appropriate amount of surface active sites and a subsequent step for supplying a reactant to those sites. The surface activation step can be efficiently performed by surface impact with inert gas atoms with energy of 10–20 eV. The reaction sequence involves electron impact ionization of an inert gas, extraction and acceleration of the ions, ion-neutral collision cascade in gas phase for generating energetic neutrals, and surface activation with the energetic neutral bombardment. Such a procedure can be implemented in a simple and inexpensive reactor for activating a large sheet of polymer in less than a second. For the completion of the surface functionalization process, a well-defined radical reactant can be generated by dissociative adsorption on hot filaments, or by photolysis, and then transported via a gas flow in vacuum to an activated polymer.