Based on that chain packing which is associated with the number of entanglements per chain and thereby chain length is an influential factor closely related to the properties of polymeric coating film, the nanothin film of zinc oxide (ZnO) nanofiller–incorporated polystyrene (PS) coated on Si substrate important to electronic packaging for protecting electronic material surface is fabricated with different PS molecular weights primarily for heat–resistant coating. Synergistically, through directly–measurable film characteristics obtained using atomic force microscopy (AFM) and spectroscopy (AFS) in conjunction with Raman spectroscopy (RS), the internal structures of the films are evaluated which helps indicate the corresponding film properties tested afterwards. Considering mechanical responses of individual nanoscale surface features together with surface morphology, the optimal PS–ZnO film is pointed out which indicates improved resistance to thermal dewetting compared to pure PS films while providing sub–nanometer roughness and the highest contact area of relatively low–surface–energy sites. Correlated with Raman analysis, chain packing structure encouraging multiple amplification of incident light is ascribed to the films made of the optimal chain length which indicates and describes the observed enhancement of photocatalytic self–cleaning. This study not only contributes to the development of PS–ZnO composite for multi–function coating but also to the design of structure and inspection of nanoparticle–reinforced polymer thin films.