International Journal of Computational Engineering ScienceVol. 04, No. 03, pp. 605-608 (2003) Poster PapersNo AccessTHREE DIMENSIONAL REFERENCE STRUCTURES FOR CONFOCAL MICROSCOPYA. H. FOITZIK, M. SCHÄFER, R. STEIN, L. VOLLMER, and G. SCHUSTERA. H. FOITZIKUniversity of Applied Sciences Esslingen, Department for Mechatronics, Robert-Bosch-Str. 1, D-73037 Goeppingen, Germany Search for more papers by this author , M. SCHÄFERUniversity of Applied Sciences Esslingen, Department for Mechatronics, Robert-Bosch-Str. 1, D-73037 Goeppingen, Germany Search for more papers by this author , R. STEINUniversity of Applied Sciences Esslingen, Department for Mechatronics, Robert-Bosch-Str. 1, D-73037 Goeppingen, Germany Search for more papers by this author , L. VOLLMERUniversity of Applied Sciences Esslingen, Department for Mechatronics, Robert-Bosch-Str. 1, D-73037 Goeppingen, Germany Search for more papers by this author , and G. SCHUSTERUniversity of Applied Sciences Esslingen, Department for Mechatronics, Robert-Bosch-Str. 1, D-73037 Goeppingen, Germany Search for more papers by this author https://doi.org/10.1142/S1465876303001861Cited by:0 PreviousNext AboutSectionsPDF/EPUB ToolsAdd to favoritesDownload CitationsTrack CitationsRecommend to Library ShareShare onFacebookTwitterLinked InRedditEmail AbstractApplying thin film MEMS technologies threedimensional reference structures for spatially high resolving optical imaging and spectroscopy techniques were manufactured containing non-transparent defects of different lateral and axial extention and being located in various heights within the samples. This special manufacture was enabled using thin films of resist as layers in between the defects layers, as well as applying a modified "single mask process", the geometrical arrangement of the defects being distributed on different quadrants of the "mask" according to their axial height in the subsequent reference structure. Minimal distances of about 600 nm in between two defect layers could be achieved.Keywords:Four or Five KeywordsSeparated by Semicolon References http://www.cs.ubc.ca/spider/ladic/confocal.html . Google Scholar R. J. Lehnert, Renishaw plc, personal communication . Google ScholarR. J. Lehnert, G.I.T. Laborator Journal — Bioforum International 2, (2000). Google Scholar D.A. Smith, S. Webster, M. Ayad, S.D. Evans, D. Fogherty and D.N. Batchelder: "Development of a scanning near-field optical probe for localised Raman Spectroscopy (SNOM)", Ultramicroscopy 61, 1995, p.247 . Google Scholar Dr. H. Bauch, Zeiss Vision GmbH, personal communication . Google Scholar W. Mirandé, PTB Braunschweig, personal communication . Google Scholar PTB Braunschweig, proc., "BCR Photomask Linewidth Standard", not dated . Google Scholar C.K. Lee, S. Arkhipov, W. Kaese, M. Schäfer and A.H. Foitzik, "Low Cost Manufacturing of MEMS for Educational Purposes", proc. MicroTec 2000, Hannover, VDE-Verlag Berlin Offenbach, (2000), pp. 597-601 . Google Scholar W. Kaese, C.K. Lee, R.J. Lehnert and A.H. Foitzik, "Low Budget Manufacturing of Reference Structures for Raman Spectroscopy", proc. MicroTec 2000, Hannover, VDE-Verlag Berlin Offenbach, (2000) pp. 603-608 . Google Scholar A. Foitzik, "Dreidimensionale Messstandards für konfokale Mikroskopieverfahren", Final Report to the Ministry for Education, Research and Arts of the State of Baden-Wuerttemberg, in German, (2000) . Google Scholar A. Foitzik et al., to be published . Google Scholar FiguresReferencesRelatedDetails Recommended Vol. 04, No. 03 Metrics History KeywordsFour or Five KeywordsSeparated by SemicolonPDF download
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