Co (t nm)/TiO2(200 nm) films were prepared by DC facing-target magnetron reactive sputtering system onto glass substrates at room temperature. The influence of the Co distribution on microstructure and magnetic properties of films was investigated in detail. The results indicate that CoTiO2thin films with t= 2 nm island-type deposited showed a homogeneous structure, and pure ferromagnetic properties of thin films are only attributed to the CoTiO2phases. On the other hand, in case of thin films above t= 2nm, the overall ferromagnetic properties depended on both CoTiO2and CoTi phases.
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