Herein, the cobalt oxide thin films are elaborated by spray pyrolysis technique. The effect of temperature of substrates on several properties of cobalt oxide is studied. The thin layers are characterized by using X‐ray diffraction (XRD), Raman spectrometry (RS), and UV–vis spectrophotometer. The XRD analysis shows that Co3O4 thin layers have been formed along <111> preferential orientation. The RS displays the characteristic vibration modes of cobalt oxide phase, which confirms the formation of a single phase of spinel Co3O4 thin layers. The UV–vis spectrophotometer allows us to investigate the optical properties such as the absorbance, the transmittance, and the optical bandgap. The variation of electrical properties with the variation of temperature deposition confirms the high impact of the effect that study to make the cobalt oxide an important candidate for gas sensor devices.