The measurement of position accuracy of industrial robots has high complexity, and its uncertainty assessment is one of the important research topics. This study analyses the principle of measuring the position accuracy of industrial robots by laser tracker, the evaluation model of the measurement uncertainty of the position accuracy of industrial robots is established, and various factors affecting the measurement results are analysed, including industrial robot itself, the measurement instrument, the measurement personnel, the measurement strategy and the data processing method. There is a very small sample problem in the uncertainty evaluation process of the position accuracy of industrial robots. The literature and experiments show that the reliability of The Guide to the Expression of Uncertainty in Measurement is low under the condition of very small sample. In this study, an improved grey method is proposed to evaluate the uncertainty. The principle of the improved grey method is discussed in detail, and the general steps of the improved grey method are summarized. The experimental data prove that the standard deviation of very small sample calculated by the improved grey method has higher accuracy. Taking the position accuracy of an industrial robot measured by a laser tracker as an example, the improved grey method is successfully applied to the measurement uncertainty evaluation of the position accuracy of industrial robots.