Data-driven process monitoring has gained increasing attention because of the increasing demand in process safety and the rapid advancement of data gathering techniques. When monitoring a plant-wide multiunit process, establishing a monitor for each unit individually ignores the correlations among units, whereas establishing a global monitor for the entire process ignores the local process behavior. A variational Bayesian-based probabilistic modeling approach is proposed for efficient distributed process monitoring. A novel probabilistic latent variable model is developed to characterize the variable relationship in each local unit and among units. First, variational Bayesian-based latent variable extraction is performed in each local unit, through which variable relationship within a local unit is characterized. Second, variational Bayesian-based regression model is established between the latent variables and neighboring variables, through which the variable relationship among units is characterized. Then, modeling residuals and monitoring statistics are generated, through which the process status and the type of a detected fault are identified. The effectiveness of the proposed probabilistic modeling and monitoring method is verified by three case studies, including a numerical example, the Tennessee Eastman benchmark process, and a laboratory distillation process.