Abstract Understanding the rapid dynamics of the primary streamer is crucial for comprehending the nanosecond pulsed discharge process. To reveal the fast primary streamer process, this study introduces a newly developed quadruple emICCD camera system capable of capturing a sequence of four discharge images in single pulse, coupled with self-customized software for data analysis. A nanosecond pulse power with its FWHM of 10.5 ns was applied to a coaxial reactor, focusing on the dynamics of the primary streamer. Our research clarifies the spatiotemporal variations of the primary streamer’s properties and examines their relation with inner electrode diameter (i.d. 0.2–2.0 mm). Results showed that in a pulse-powered coaxial electrode, there are three stages in the primary streamer process and that i.d. serves as an important factor influencing the formation and propagation of streamers. Interestingly, we found that streamer head velocity, streamer width, and streamer area for individual streamers remain constant prior to streamer channels reaching the outer electrode. Furthermore, we also observed an initial increase followed by a decrease in both streamer head velocity and streamer width with increasing i.d values. This study sheds light on the fundamental properties of the primary streamer during nanosecond pulsed discharge, contributing valuable insights for future plasma applications.