In this paper, the Primary Knock-on Atoms (PKAs) density and energy distributions in InAlAs and InGaAs materials have been analyzed by an energy stopping power improved Monte Carlo (MC) method under proton-radiation with energies of 25 keV, 50 keV, 100 keV, and 150 keV. The results show that in the initial incident stage of protons, the electronic energy loss density is 2–3 orders of magnitude higher than the nuclear energy loss density, afterwards, the injected protons accelerate to deposit more energy and finally stop in the target, producing a large number of PKAs. The injected proton density, PKA density and PKA energy density almost follow a Bragg-shape distribution. With the increase of irradiation energy, their peak-positions shift toward deeper direction with peak values decrease gradually, and moreover, the PKA peaks are always shallower than the irradiated protons. In addition, Frenkel Pairs generation rate has been calculated based on Kinchin-Pease (K-P) model modified by Ziegler, which decreases as proton energy increases because of the reduction of scattering cross section. The verification of this method combines both SRIM 2013 and Northcliffe experimental data and the results have shown compatible trends.
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