Electrical accidents caused by bolt looseness in transformers have been frequently reported in recent years. The monitoring, and warning of, axial force as an indicator of looseness is one of the key issues affecting the operation and maintenance of transformers. Traditional ultrasonic testing and a patch-type ultrasonic method, using piezoelectric probes and coupling agents, showed poor repeatability and accuracy in detecting the bolt pre-tightening force, because of the uncertainty of the contact interface produced via manual operation. A permanent thin-film pressure sensor (PMTS), which provides accurate and in-situ stress detection, is more suitable for bolts, to reveal the pretightening force. The key is depositing a nano-zinc oxide (ZnO) piezoelectric film with an excellent measurement performance, which could be tuned using deposition parameters. This paper investigates the effects of the current and bias voltage on the crystal structure and performance of ZnO piezoelectric films. The results show that the crystallinity degree and resistance decrease with the increase in bias voltage, while the target current could increase the crystallinity. However, a high current also brings large particles in the coating surface, which greatly decrease the resistance. The cause is expected to be related to the ion energy, which could be affected by the bias voltage and current. The PMTS deposited with an optimized bias voltage and current revealed excellent measurement performance, and is expected to be applied to the bolt, to detect the pretightening force.
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