A space charge density distribution measuring system based on a PPP (piezoelectrically induced pressure pulse wave) method was constructed. The pressure pulse wave is generated by a pulse-driven piezoelectric PVDF (polyvinylidene fluoride) thin film used as a piezoelectric pulse generator. A thin aluminum plate is used as a shield electrode to electrically separate the pressure pulse generator and the sample holder. This thin shield electrode reduces attenuation and dispersion of the pressure pulse wave compared to the former system. The spatial resolution of the system is estimated to be about 7 μm, based on the PPP response to a sheet charge that is artificially placed on a dielectric thin film. Using space charge distribution measurements and TSDC (thermally stimulated discharge current) measurements, the charge behavior of the corona-charged PTFE Teflon TM (polytetrafluoroethylene) thin films was studied.