Abstract This paper describes the main achievements in the development of radiation resistant silicon detectors to be used in the CMS tracker. After a general description of the basic requirements for the operation of large semiconductor systems in the LHC environment, the issue of radiation resistance is discussed in detail. Advantages and disadvantages of the different technological options are presented for comparison. Laboratory measurements and test beam data are used to check the performance of several series of prototypes fabricated by different companies. The expected performance of the final detector modules are presented together with preliminary test beam results on system prototypes.