The ball screw feed system of CNC machine tools is a typical mechatronic motion mechanism. During the operation of the machine tool, not only the dynamic characteristics of the mechanical structure will affect its performance, but also the electrical characteristics of the servo system will affect the movement of the worktable, which will lead to displacement fluctuation and bring adverse effects on the precision of the machine tool and even the quality of the processed parts. Therefore, the electrical system and the mechanical system are strongly coupled to each other due to their high integration. In this paper, the fluctuation of current, torque, and displacement during the motion of the worktable is studied. Firstly, the mechatronic model of the ball screw feed system, which not only consists of all components of the feed system but also takes different nonideal characteristics of each component into consideration, is established to realize the physical simulation of the whole system. Then, with the consideration of the impacts of inverter dead zone, motor cogging torque, rotor mixed-eccentricity, winding asymmetry, and collecting error of feedback current, the frequency components of fluctuations caused by the nonlinear electrical characteristics of inverter and servo motor in the servo drive system are obtained. Finally, the influences of load, feedrate, servo parameters, and dynamic characteristics of mechanical structure on fluctuation are analyzed in the time domain and frequency domain. The phenomenon of displacement fluctuation of the worktable caused by the electrical characteristics of the servo system indicates that it is necessary and meaningful to build the integrated model to study the ball screw feed system from the view of the whole system.