Micro manufacturing using micro direct metal deposition was successfully implemented on NiTi powder alloy. Micro direct metal deposition was optimized through a set of process parameters and designed experiments to improve the geometrical accuracy and repeatability of micro fabrication. Scanning electron microscopy and micro X-ray computed tomography were used to analyze the surface quality, micro porosity, and deviations of products with respect to nominal geometrical models. Results showed that increasing scanning speed is an efficient way to improve the surface quality and decrease the micro porosity content. Below 15% deviation to nominal geometrical models was achieved in hollow NiTi samples through a set of micro direct metal deposition process parameters and designed experiments.