In the semi‐airborne frequency domain electromagnetic detection, strong noise will be generated due to the attitude change of the receiving coil sensor. However, the existing attitude measurement system cannot be directly used in the semi‐airborne frequency domain electromagnetic system because of the requirement on the volume and accuracy of the instrument. In order to reduce the effect of attitude noise, this paper analyzes the cause and influence of attitude noise in the semi‐airborne frequency domain electromagnetic system, and presents the attitude noise correction method based on coefficient rotation matrix and Kalman algorithm. A high‐performance attitude sensor based on (Micro‐Electro‐Mechanical System (MEMS) technology is used to design an attitude measurement system for the semi‐airborne frequency domain electromagnetic system. The calculated result shows that the required accuracy of the roll angle and pitch angle of the attitude measurement system is less than 0.1°, whereas the required accuracy of the yaw angle is lower. In the field application, the apparent resistivity results show that the imaging profile corrected by attitude error is more consistent with local geological data than that without correction. Consequently, the attitude measurement system and correction method proposed in this paper can improve the detection accuracy of the semi‐airborne frequency domain electromagnetic system significantly. © 2024 Institute of Electrical Engineer of Japan and Wiley Periodicals LLC.