AbstractA technique is proposed for obtaining thin‐film positive temperature coefficient (PTC) microthermistors made of BaTiO3‐based material. In this technique, stacked layers of Ti and BaO thin films are irradiated in air by a YAG laser beam, which creates BaTiO3 semiconductor microregions with PTC characteristics. The experiments indicate that by suitably choosing the optical power of the laser beam and its scanning rate over the stacked layers, it is possible, and in fact easy, to control the resistance of the resulting BaTiO3 semiconductor microregions. We found that the resistance of the BaTiO3 semiconductor material created in this way must be sufficiently low in order for the material to exhibit PTC characteristics. In this case, the material becomes a thermistor, that is, its resistance increases rapidly with increasing temperature. As the temperature increases, the resistance suddenly begins to increase starting at a certain threshold temperature. In an attempt to control this threshold temperature, we modified the technique described in this research by replacing some of the Ti sites with Zr. This modified technique led us to conclude that, just as in bulk BaTiO3, such control was indeed possible. When our technique is used, high‐temperature heating of the entire substrate is not necessary, either during the deposition of the thin film or after its deposition. In this way we confirm that it is possible to create compound device modules by fabricating multiple thin‐film microdevices on a single substrate, including PTC microthermistors. © 2002 Wiley Periodicals, Inc. Electron Comm Jpn Pt 2, 85(11): 25–31, 2002; Published online in Wiley InterScience (www.interscience.wiley.com). DOI 10.1002/ecjb.1113