The effects of homogeneous low voltage electron beam irradiation (HLEBI) under liquid nitrogen on the adhesive force of peeling ( o Fp )a t accumulative probability of peeling (Pp) of laminated PTFE/PDMS sheets of polytetrafluoroethylene (PTFE) and polydimethylsiloxane (PDMS) at 77K were investigated without glue. o Fp values at each Pp of PTFE/PDMS laminated sheets irradiated of 0.04 to 0.43MGy at both 77 and 298K exceed the corresponding values of the untreated samples. Although 298K-HLEBI with 0.04MGy improves o Fp value at low Pp (0.06), 77K-HLEBI didn’t improve it. On the contrary, the 77K-HLEBI with 0.22MGy apparently enhanced the o Fp at low-Pp of 0.06. It is higher than that of 298K-HLEBI with 0.22MGy. Furthermore, the operation dose range at high o Fp value of more than 1.5Nm ¹1 at low Pp (0.06) at 77K, indicator of high industrial reliability of production process, was 0.33MGy, which was more than 3.7 times broader than that at 298K. Based on the 3-parameter Weibull equation, the lowest o Fp value at Pp of zero (Fs) could be estimated. The 0.22MGy-HLEBI at 77K apparently improves the Fs, which was higher than that 0.22MGy-HLEBI at 298K. Decreasing the irradiation temperature from 298 to 77K controlled the rapid adhesion and rapid decay of adhesion at low-Pp, which were mainly caused by the low forming ability of dangling bonds induced by strong apparent bonding force, which is related to decreasing atoms vibration energy. Since the 0.22MGy-HLEBI at 77K controlled the recovery of dangling bonds and generated the chemical bonds, the strong adhesive force of PTFE/PDMS treated by 0.22MGy-HLEBI at 77K could be explained. Therefore, HLEBI under liquid nitrogen was useful tool for quick strong PTFE/PDMS lamination with sterilization for bio-adaptable application. [doi:10.2320/matertrans.MAW201416]