Hydrogen energy has great potential as a fuel for the future, but its leakage poses a major threat. Thus, our main concern is to detect it very quickly. In this work, we investigate the effect of transparent glass, ITO, and quartz substrates on hydrogen gas sensing properties of magnetron sputter- deposited Pd-capped SnO2 (Pd/SnO2) thin film sensor material. The XRD study reveals that all Pd-capped SnO2 thin films deposited on different substrates has polycrystalline tetragonal structure. Sensors fabricated on quartz substrates exhibit homogeneous grain distributions at the interface, whereas sensors deposited on ITO and glass substrates have randomly size grains distribution at the interface. Sensors deposited on glass and ITO show lower sensitivity compare to sensors fabricated on quartz substrate at a working temperature of 250°C. The Pd/SnO2 sensor @ quartz shown a maximum response of ∼ 9.3 and better stability toward 500 ppm hydrogen gas, and a fast response/recovery time of 30/26 s for 5 ppm hydrogen gas. The sensor @ quartz substrate shows a small reduction in response and baseline at 60% RH. The sensor fabricated on quartz substrate exhibits better selectivity toward hydrogen gas and significant stability for long duration of three months in high humid conditions. The performance of the Pd/SnO2 thin sensor fabricated on quartz proves that the sensor based on average grains have a wide potential for real hydrogen gas monitoring.
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