Polycrystalline BiFeO3 (BFO) films were prepared on a Pt/TiO2/SiO2/Si substate using magnetic field-assisted 90° off-axis pulsed laser deposition (PLD). We have successfully obtained polycrystalline BFO films owing to a high deposition rate derived by the confinement of the plume under a magnetic field. The obtained polycrystalline BFO films have a droplet-free surface morphology and a columnar-like microstructure. A RT ferroelectric hysteresis loop is obtained, and at the same time, the remanent polarization of 90 μC cm−2 and the reduced coercive field of 178 kV cm−1 are confirmed. Also, an evolution of the polarization switching is observed by the piezoresponse force microscopy. In this study, we provide a possible route to realize the polycrystalline film growth which has a good quality in a 90° off-axis deposition system using magnetic field-assisted PLD.
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