Abstract Highly oriented PZT, PLZT and PMN thin films were fabricated on various substrates using sol-gel method. The thin films having different orientation were fabricated by different drying conditions for pyrolysis. The preferred orientations of the PZT, PLZT and PMN thin films were observed using XRD(X-ray diffraction). The hysteresis loops, capacitance-voltage, and fatigue characteristics of the films were investigated using an RT66A standardized ferroelectric test system. The dielectric constant and current-voltage characteristics of the films were investigated using impedance analyzer and pA meter, respectively. The films oriented in particular direction showed better electrical characteristics to the randomly oriented films.
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