The process of vapor deposition polymerization (VDP) of N-methylolacrylamide (NMAA) was real-time in-situ observed with infrared reflection absorption spectroscopy. The red-heated filament was used for production of the initiator for polymerization. The sticking coefficient and the polymer yield were calculated on the basis of plots of absorbance of CO and CC stretching peaks against time during and after the deposition. The sticking coefficient of NMAA molecules on the substrate maintained at 265 K was 0.53 in the case of physical vapor deposition without existence of the red-heated filament. This value reached 0.98 on heating the filament up to 2300 K. The polymer yield in the steady state of VDP was 44%, of which 26% and 18% were caused by the polymerization at the same time as deposition and the post-polymerization, respectively.