Abstract The low light extraction efficiency (LEE) is one of the major factors hindering the application of AlGaN based deep ultraviolet (DUV) light-emitting diodes (LEDs). Here we investigate the LEE of AlGaN based nanowire (NW) DUV LEDs emitting at 275 nm for bare NW, NW integrated with aluminum (Al) bowtie antenna array, and NW with passivation layer under transverse-electric (TE) and transverse-magnetic (TM) polarization. It is observed that by integrating plasmonic Al bowtie antenna array with AlGaN based NW, the LEE up to 83% and 74% can be achieved under TE and TM polarization. In addition, the effect of the three different passivation layer SiO2, SiNx and AlN on the LEE of AlGaN based NW is also analysed, the results suggests that SiO2, which has smaller refractive index than NW core, could extract more photons from the NW and lead to large enhancement of LEE. For SiNx and AlN passivation layer, which has refractive index similar to the NW core, have strong coupling with the NW core, when the thickness of passivation layer satisfy resonance coupling conditions, the LEE could be achieved more than 80% for both TE and TM polarization. These integrated NW/antenna array and NW with passivation layer system can provide guidelines for designing other nano-photonic devices.
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