Plasma Diagnostic Tool Research Articles

Shaping thin film growth and microstructure pathways via plasma and deposition energy: a detailed theoretical, computational and experimental analysis.

Understanding the science and engineering of thin films using plasma assisted deposition methods with controlled growth and microstructure is a key issue in modern nanotechnology, impacting both fundamental research and technological applications. Different plasma parameters like electrons, ions, radical species and neutrals play a critical role in nucleation and growth and the corresponding film microstructure as well as plasma-induced surface chemistry. The film microstructure is also closely associated with deposition energy which is controlled by electrons, ions, radical species and activated neutrals. The integrated studies on the fundamental physical properties that govern the plasmas seek to determine their structure and modification capabilities under specific experimental conditions. There is a requirement for identification, determination, and quantification of the surface activity of the species in the plasma. Here, we report a detailed study of hydrogenated amorphous and crystalline silicon (c-Si:H) processes to investigate the evolution of plasma parameters using a theoretical model. The deposition processes undertaken using a plasma enhanced chemical vapor deposition method are characterized by a reactive mixture of hydrogen and silane. Later, various contributions of energy fluxes on the substrate are considered and modeled to investigate their role in the growth of the microstructure of the deposited film. Numerous plasma diagnostic tools are used to compare the experimental data with the theoretical results. The film growth and microstructure are evaluated in light of deposition energy flux under different operating conditions.

Electron density characterization of inductively-coupled argon plasmas by the terahertz time-domain spectroscopy

Inductively-coupled plasmas (ICP) in the high electron density regime of the order of 1013 cm−3 are generated and their electron density characteristics are investigated by the terahertz time-domain spectroscopy (THz-TDS) method. In this experiment, the plasma was produced by RF (13.56 MHz) with an applied RF power of 300–550 W and the argon gas pressure was in the range of 0.3–1.1 Torr. We generated the THz wave by focusing a femtosecond laser pulse in air with a DC electric field. As a plasma diagnostic tool, the THz-TDS method is found to successfully provide the plasma density information in the high-density regime, where other available plasma diagnostic tools are very limited. In addition, the analytical model based on the ambipolar diffusion equation is compared with experimental observations to explain the behavior of the electron density in the ICP source, where the plasma density is shown to be related to the applied RF power and gas pressure. The analytical result from the model is found to be in good agreement with the THz-TDS result.

Plasma diagnostic approach for the low-temperature deposition of silicon quantum dots using dual frequency PECVD

Although studies of silicon (Si) quantum dots (QDs) were started just a few years ago, progress is noteworthy concerning unique film properties and their potential application for devices. In particular, relating to the Si QD process optimization, it is essential to control the deposition environment by studying the role of plasma parameters and atomic and molecular species in the process plasmas. In this work, we report on advanced material processes for the low-temperature deposition of Si QDs by utilizing radio frequency and ultrahigh frequency dual frequency (DF) plasma enhanced chemical vapor deposition (PECVD) method. DF PECVD can generate a very high plasma density in the range ~9 × 1010 cm−3 to 3.2 × 1011 cm−3 at a very low electron temperature (Te) ~ 1.5 to 2.4 eV. The PECVD processes, using a reactive mixture of H2/SiH4/NH3 gases, are carefully studied to investigate the operating regime and to optimize the deposition parameters by utilizing different plasma diagnostic tools. The analysis reveals that a higher ion flux at a higher plasma density on the substrate is conducive to enhancing the overall crystallinity of the deposited film. Along with high-density plasmas, a high concentration of atomic H and N is simultaneously essential for the high growth rate deposition of Si QDs. Numerous plasma diagnostics methods and film analysis tools are used to correlate the effect of plasma- and atomic-radical parameters on the structural and chemical properties of the deposited Si QD films prepared in the reactive mixtures of H2/SiH4/NH3 at various pressures.

Plasma Process Uniformity Diagnosis Technique Using Optical Emission Spectroscopy With Spatially Resolved Ring Lens

A novel method to measure the positional plasma intensity, which indicates the uniformity of plasma processes, using optical emission spectroscopy (OES) with a spatially resolved ring lens (SRRL) is proposed. OES offers a noncontact and nondestructive plasma diagnostic tool and is easily implemented. Despite these advantages, the light intensities in local regions are difficult to measure by the principle of superposition of light. In this study, by blocking the light passage through the center of the SRRL, the intensity of the plasma light as a function of the distance in the process chamber is measured precisely. This methodology improves the distortion of the near light source and measures the local light intensities. Thus, it can be used to obtain the plasma distribution in a process chamber and thereby assess the uniformity of the plasma process.

Effect of plasma parameters on characteristics of silicon nitride film deposited by single and dual frequency plasma enhanced chemical vapor deposition

This work investigates the deposition of hydrogenated amorphous silicon nitride films using various low-temperature plasmas. Utilizing radio-frequency (RF, 13.56 MHz) and ultra-high frequency (UHF, 320 MHz) powers, different plasma enhanced chemical vapor deposition processes are conducted in the mixture of reactive N2/NH3/SiH4 gases. The processes are extensively characterized using different plasma diagnostic tools to study their plasma and radical generation capabilities. A typical transition of the electron energy distribution function from single- to bi-Maxwellian type is achieved by combining RF and ultra-high powers. Data analysis revealed that the RF/UHF dual frequency power enhances the plasma surface heating and produces hot electron population with relatively low electron temperature and high plasma density. Using various film analysis methods, we have investigated the role of plasma parameters on the compositional, structural, and optical properties of the deposited films to optimize the process conditions. The presented results show that the dual frequency power is effective for enhancing dissociation and ionization of neutrals, which in turn helps in enabling high deposition rate and improving film properties.

Lifecycle of laser-produced air sparks

We investigated the lifecycle of laser-generated air sparks or plasmas using multiple plasma diagnostic tools. The sparks were generated by focusing the fundamental radiation from an Nd:YAG laser in air, and studies included early and late time spark dynamics, decoupling of the shock wave from the plasma core, emission from the spark kernel, cold gas excitation by UV radiation, shock waves produced by the air spark, and the spark's final decay and turbulence formation. The shadowgraphic and self-emission images showed similar spark morphology at earlier and late times of its lifecycle; however, significant differences are seen in the midlife images. Spectroscopic studies in the visible region showed intense blackbody-type radiation at early times followed by clearly resolved ionic, atomic, and molecular emission. The detected spectrum at late times clearly contained emission from both CN and N2+. Additional spectral features have been identified at late times due to emission from O and N atoms, indicating...

Plasma Diagnostics Using K‐Line Emission Profiles of Silicon

AbstractModifications of K‐line profiles due to a warm dense plasma environment are a suitable tool for plasma diagnostics. We focus on Si Kα emissions due to an electron transfer from 2P to 1S shell. Besides 2P fine structure effects we also consider the influence of excited and higher ionized emitters. Generally spoken, a plasma of medium temperature and high density (warm dense matter) is created from bulk Si the greater part of atoms is ionized. The high energy of Kα x‐rays is necessary to penetrate and investigate the Si sample. The plasma effect influences the many‐particle system resulting in an energy shift due to electron‐ion and electron‐electron interaction. In our work we focus on pure Si using LS coupling. Non‐perturbative wave functions are calculated as well as ionization energies, binding energies and relevant emission energies using the chemical ab initio code Gaussian 03. The plasma effect is considered within a perturbative approach to the Hamiltonian. Using Roothaan‐Hartree‐Fock wave functions we calculate the screening effect within an ion‐sphere model. The different excitation and ionization probabilities of the electronic L‐shell and M‐shell lead to a charge state distribution. Using this distribution and a Lorentz profile convolution with a Gaussian instrument function we calculate spectral line profiles depending on the plasma parameters. (© 2014 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)

Distinct optical properties of relativistically degenerate matter

In this paper, we use the collisional quantum magnetohydrodynamic (CQMHD) model to derive the transverse dielectric function of a relativistically degenerate electron fluid and investigate various optical parameters, such as the complex refractive index, the reflection and absorption coefficients, the skin-depth and optical conductivity. In this model we take into accounts effects of many parameters such as the atomic-number of the constituent ions, the electron exchange, electron diffraction effect and the electron-ion collisions. Study of the optical parameters in the solid-density, the warm-dense-matter, the big-planetary core, and the compact star number-density regimes reveals that there are distinct differences between optical characteristics of the latter and the former cases due to the fundamental effects of the relativistic degeneracy and other quantum mechanisms. It is found that in the relativistic degeneracy plasma regime, such as found in white-dwarfs and neutron star crusts, matter possess a much sharper and well-defined step-like reflection edge beyond the x-ray electromagnetic spectrum, including some part of gamma-ray frequencies. It is also remarked that the magnetic field intensity only significantly affects the plasma reflectivity in the lower number-density regime, rather than the high density limit. Current investigation confirms the profound effect of relativistic degeneracy on optical characteristics of matter and can provide an important plasma diagnostic tool for studying the physical processes within the wide scope of quantum plasma regimes be it the solid-density, inertial-confined, or astrophysical compact stars.

Maximal Cherenkov γ-radiation on Fermi-surface of compact stars

The quantum magnetohydrodynamic model is employed in this paper to study the extraordinary (XO) elliptically polarized electromagnetic wave dispersion in quantum plasmas with spin-1/2 magnetization and relativistic degeneracy effects, considering also the electron-exchange and quantum diffraction of electrons. From the lower and upper calculated XO-modes, it is observed that, for electrons on the surface of the Fermi-sphere, the lower XO-mode can excite the Cherenkov radiation by crossing the Fermi-line, with some proper conditions depending on the values of independent plasma parameters, such as the relativistic-degeneracy, the atomic-number of constituent ions, and the magnetic field strength. Particularly, a lower electron number-density and Cherenkov radiation frequency limits are found to exist, for instance, for given values of the plasma ions atomic-number and the magnetic field strength below which the radiation can not be excited by the electrons on the Fermi-surface. This lower density limit increases by decrease in the atomic-number but decreases with decrease in the strength of the ambient magnetic field. It is remarkable that in this research it is discovered that the maximal Cherenkov-radiation per unit-length (the energy radiated by superluminal electrons traveling through the dielectric medium) coincides with the plasma number-densities, which is present in compact stars with the maximal radiation frequency lying in the gamma-ray spectrum. Current study can provide an important plasma diagnostic tool for a wide plasma density range, be it the solid density, the warm dense matter, the inertial confined or the astrophysical compact plasmas and may reveal an important cooling mechanism for white dwarfs. Current findings may also answer the fundamental astrophysical question on the mysterious origin of intense cosmic gamma-ray emissions.

Microstructure and Thermal Characterization of Plasma-Sprayed Nanostructured La2Ce2O7-Doped YSZ Coatings

Nanostructured La2Ce2O7-doped YSZ coatings were developed using atmospheric plasma-spraying technique by optimizing various process parameters. To ensure the retention of nanostructure, the molten state of nanoagglomerates was monitored using plasma and particle diagnostic tools. It was observed that the morphology of the coating exhibits a bimodal microstructure consisting of nanozones reinforced in a matrix of fully-molten particles. The thermal diffusivity of nano-LaCeYSZ coatings is lower than that of nano and bulk YSZ. The reason for this change in thermal diffusivity may be attributed to scattering of phonons at grain boundaries, point defect scattering and higher inter-splat porosity. Also, the thermal conductivity of the nanocomposite coatings was lower than those of nanostructured and bulk YSZ coatings. XRD results show cubic zirconia with a small amount of tetragonal zirconia. The average grain size of the as-sprayed La2Ce2O7-YSZ nanocomposite coatings is ~150-200 nm. The improved thermal behavior is mainly due to a dense, packed, and more compact structure of the coatings.

Negatively Charged Oxygen Ions as a Plasma Diagnostic Tool: Application to Comets

We study the stability of the ion-acoustic (IA) wave in a collisional plasma composed of hydrogen, positively and negatively charged oxygen ions, electrons and neutral atoms. This composition approximates very well the plasma environment around a comet. A solution of the dispersion relation yields a frequency for the IA wave at around the hydrogen plasma frequency. The growth/ damping rate is sensitively dependent on the ring parameters μ ⊥s (the ring speed) and ν ts (the thermal spread). The growth rate of the wave, which decreases with increasing collisional frequencies, is larger when μ ⊥s ν ts. In the presence of negatively charged oxygen ions, the phase and group velocities of the IA wave behave in a contrasting manner when μ ⊥s ν ts (and viceversa). We propose that this behaviour be exploited as a diagnostic tool for the detection of these ions and also their thermalization.

21304 レーザー誘起蛍光法を用いた完全無電極ヘリコンプラズマスラスターにおける粒子計測

To establish a completely electrodeless plasma thruster, we have been studying electromagnetic acceleration methods proposed and estimating plasma performance by the use of various diagnostics. This scheme employs a high-density (〜 10^<13> cm^<-3>) helicon plasma accelerated by the Lorentz force, which is produced by some acceleration methods. To prove its principle, Laser Induced Fluorescence (LIF) system has been developed, which is a powerful tool for plasma diagnostics, due to a non-invasive method with a high spatial resolution. It can deduce velocity distribution functions of any particles (ions, atoms and molecules). Here, we report details of new 2D LIF system for ions and argon neutral particles of argon, and preliminary experimental results.

Fusion neutron diagnostics on ITER tokamak

ITER is an experimental nuclear reactor, aiming to demonstrate the feasibility of nuclear fusion realization in order to use it as a new source of energy. ITER is a plasma device (tokamak type) which will be equipped with a set of plasma diagnostic tools to satisfy three key requirements: machine protection, plasma control and physics studies by measuring about 100 different parameters. ITER diagnostic equipment is integrated in several ports at upper, equatorial and divertor levels as well internally in many vacuum vessel locations. The Diagnostic Systems will be procured from ITER Members (Japan, Russia, India, United States, Japan, Korea and European Union) mainly with the supporting structures in the ports. The various diagnostics will be challenged by high nuclear radiation and electromagnetic fields as well by severe environmental conditions (ultra high vacuum, high thermal loads). Several neutron systems with different sensitivities are foreseen to measure ITER expected neutron emission from 1014 up to almost 1021 n/s. The measurement of total neutron emissivity is performed by means of Neutron Flux Monitors (NFM) installed in diagnostic ports and by Divertor Neutron Flux Monitors (DNFM) plus MicroFission Chambers (MFC) located inside the vacuum vessel. The neutron emission profile is measured with radial and vertical neutron cameras. Spectroscopy is accomplished with spectrometers looking particularly at 2.5 and 14 MeV neutron energy. Neutron Activation System (NAS), with irradiation ends inside the vacuum vessel, provide neutron yield data. A calibration strategy of the neutron diagnostics has been developed foreseeing in situ and cross calibration campaigns. An overview of ITER neutron diagnostic systems and of the associated challenging engineering and integration issues will be reported.

Microparticles as Plasma Diagnostic Tools

AbstractAn interesting aspect in the research of complex (dusty) plasmas is the experimental study of the interaction of microparticles with the surrounding plasma for diagnostic purposes. Local electric fields can be determined from the behavior of particles in the plasma, i.e. particles may serve as electrostatic probes. From particle trajectories, also the determination of momentum flux in beams is possible, and the particles serve as force probes. Recently, temperature sensitive features of particular phosphors were utilized for measuring the surface temperature of microparticles confined in the sheath of a rf plasma. The experiments were performed under variation of gas pressure and rf power of the process plasma and offer a promising approach for the improvement of process plasmas and the understanding of plasma‐particle interaction (© 2011 WILEY‐VCH Verlag GmbH &amp; Co. KGaA, Weinheim)

Quantum cascade laser absorption spectroscopy as a plasma diagnostic tool: an overview.

The recent availability of thermoelectrically cooled pulsed and continuous wave quantum and inter-band cascade lasers in the mid-infrared spectral region has led to significant improvements and new developments in chemical sensing techniques using in-situ laser absorption spectroscopy for plasma diagnostic purposes. The aim of this article is therefore two-fold: (i) to summarize the challenges which arise in the application of quantum cascade lasers in such environments, and, (ii) to provide an overview of recent spectroscopic results (encompassing cavity enhanced methods) obtained in different kinds of plasma used in both research and industry.

Contamination of the 5394 Å spectral region by telluric lines

The spectral region in the vicinity of 5394 Å contains three prominent photospheric spectral lines, which can be used as a solar plasma diagnostic tool. The occurrence of telluric lines in this region is a potential source of systematic and random errors in these solar spectral lines. The goal of our investigation was to determine the telluric line contamination of this interesting spectral region. Several series of high-resolution solar spectra within an interval of about 4 Å around the 5394 Å wavelength were observed at different zenith distances of the Sun. Comparison of these spectra has permitted identification of telluric lines in this spectral interval. The observations were carried out with the horizontal solar spectrograph of the Heliophysical Observatory in Debrecen. Telluric feature blending was identified in the blue and red wings of the Fe I 5393.2 Å line, and in the local continuum of the Mn I 5394.7 Å line. The blue wing of the Fe I 5395.2 Å line is contaminated by a weak telluric feature too. The red continuum of this line has a more prominent telluric contamination. A dozen of water vapor telluric lines that determined the observed telluric features were identified in this spectral interval. The profiles of three telluric lines that have a significant influence on both the profiles of solar spectral lines and the level of local continuum were derived, and the variation of their parameters (equivalent width and central depth) with air mass were analyzed.

Electron density measurement for plasmas by terahertz time-domain spectroscopy

A new plasma diagnostic tool of terahertz time-domain spectroscopy (THz-TDS) has been developed. The THz-TDS system allows one to obtain the electron density and collision frequency of a plasma simultaneously from the phase shift and absorption rate of THz waves that are transmitted through the plasma. The line-averaged electron densities of Ar inductively coupled plasmas (ICPs) and CH4/Ar capacitively coupled plasmas (CCPs) were evaluated by the system and found to be 1017−1018 m−3 for Ar ICPs and 1015−1016 m−3 for CH4/Ar CCPs, depending on the discharge conditions. These results have demonstrated the feasibility of electron density measurements by THz-TDS for reactive plasmas.

Plasma probes for the lunar surface

Dust particles on the lunar surface, or on any other airless planetary surface, can be directly exposed to solar wind plasma and ultraviolet radiation, resulting in electrostatic charging and possible subsequent mobilization and transport. Although there are several independent observations indicating dust levitation and transport on the Moon, these processes are still poorly understood, and the development of specialized plasma and dust diagnostic tools will be necessary for future missions. Here we discuss a measurement technique that could characterize the near surface lunar plasma environment. We report on laboratory experiments using an asymmetric double probe with vastly different collection areas to characterize the sheath above a photoemissive surface in a vacuum chamber. The approach could form the basis of a future in situ experiment that probes the photoelectron layer on the lunar surface.

Plasma diagnostics by means of the scattering of electrons and proton beams

Scattering of energetic electron and proton beams by cold matter is significantly different from the scattering of these particles by plasma, which may be either highly ionized or dense strongly coupled plasma. This is due to the difference in the shielding of the target nuclei between the two cases. Quantitatively, we treat the problem by means of the Bethe Moliere multiple scattering theory and the version of this theory for plasma as derived by Lampe. We propose to use this effect as a plasma diagnostic tool, utilizing monoenergetic, well-collimated electron or proton beams produced either by femtosecond laser plasma interactions or by accelerators. The effect is first illustrated for simplicity, by calculating the widths of the angular distribution of scattered particles interacting with the extreme cases of very hot fully ionized carbon, and iron plasmas, and comparing these results to the corresponding cold material. The more relevant case of electron scattering from partially ionized iron and carbon plasmas covering the entire range from a cold to a completely ionized target is also dealt with here. This paper brings up and highlights the difference between scattering by plasma and by cold material in light of the recent proposals to employ particle beams for various fusion applications.

Space-time characterization of laser plasma interactions in the warm dense matter regime

Laser plasma interaction experiments have been performed using an fs Titanium Sapphire laser. Plasmas have been generated from planar PMMA targets using single laser pulses with 3.3 mJ pulse energy, 50 fs pulse duration at 800 nm wavelength. The electron density distributions of the plasmas in different delay times have been characterized by means of Nomarski Interferometry. Experimental data were compared with hydrodynamic simulation. First results to characterize the plasma density and temperature as a function of space and time are obtained. This work aims to generate plasmas in the warm dense matter (WDM) regime at near solid-density in an ultra-fast laser target interaction process. Plasmas under these conditions can serve as targets to develop X-ray Thomson scattering as a plasma diagnostic tool, e.g., using the Vacuum ultraviolet (VUV) free-electron laser (FLASH) at Dentsches Elektronen-Synchrotron (DESY) Hamburg.