Piezoelectric Resonators Research Articles

Tunable underwater sound absorption via piezoelectric materials with local resonators

In recent years, piezoelectric composite materials have been widely used in the design of underwater anechoic coatings due to their adaptability to tuning parameters. However, there are also some shortcomings, such as a single dissipation mechanism, narrow bandwidth, and poor low-frequency sound absorption. This work proposes an acoustic composite structure combining piezoelectric composite materials with local resonance units, which effectively enhances the sound absorption performance of the structure through the coupling effect of the piezoelectric energy consumption mechanism and local resonance mechanism. Compared to conventional acoustic structures, the proposed acoustic composite structure not only has a strong low-frequency sound absorption effect but also enriches the mid-high frequency sound absorption modes by connecting shunt damping circuits. On this basis, the effect of piezoelectric parameters and resonator morphological properties on structural sound absorption performance is further investigated, and the results show that the designed structure has the characteristic of sound absorption performance that is tunable. In addition, key factors affecting the sound absorption performance of the structure have been optimized to achieve better broadband sound absorption performance. This work may provide valuable ideas for the development of low-frequency broadband adjustable underwater sound-absorbing coatings.

Aspect ratio optimization of piezoelectric extensional mode resonators for quality factor and phase noise performance enhancement

Abstract This study focuses on optimizing the resonator geometry via the aspect ratio design of a width-extensional mode resonator to improve its quality factor (Q), which is one of the critical performance parameters for resonators in either sensing (Allan deviation) or frequency reference (phase noise) applications. The proposed approach uses finite element analysis to reduce the strain energy at anchor supports by altering the resonator geometric structure, thereby reducing energy loss through anchors. Moreover, process limitations on feature sizes are used as constraints to find aspect ratios that can not only increase the Q but also reduce spurious modes near the targeted frequency. The devices were fabricated using AlN thin film piezoelectric on a substrate (TPoS) process. The simulated energy dissipation trends for specific length-to-width (L/W) ratios closely match the measured changes in the resonator Q values in vacuum. In vacuum, the highest Q-factor achieved by the device is close to 8816, with a motional resistance of a few tens of ohms. Additionally, a board-level oscillator realized using a commercial low-noise amplifier exhibits phase noise performance of −141.21 dBc Hz−1 and −164.25 dBc Hz−1 at 1 kHz and 1 MHz frequency offsets, respectively. The calculated figures of merit for these offsets are 204 and 168, respectively.

Phage display–based acoustic biosensor for early cancer diagnosis

The probability of a cancer patient being cured depends largely on the stage of disease at the time of diagnosis. It is therefore very important to develop methods for early cancer diagnosis that would allow screening of a large number of samples in a short time. Here, a unique method is presented for rapid immunodetection of heat shock proteins (HSPs). The method uses a compact acoustic sensor based on a lateral-field piezoelectric resonator and specific phage antibodies. The phage antibodies for the first time were developed against HSPs of P3X63Ag8.653 mouse myeloma cells. The change in the electric impedance modulus of resonator after recording of phage antibody–HSP interaction served as the analytic signal with analysis time less than 5 min. Antibody-HSP interaction confirmed by microscopic analysis and flow cytometry. This study establishes a new strategy for early cancer diagnosis by compact acoustic sensor with phage antibodies as sensing element. The results can be used to develop a noninvasive rapid method of early cancer diagnosis on basis of HSP determination and to control the content of HSPs in the monitoring of tumor therapy.

Piezoelectrically and Capacitively Transduced Hybrid MEMS Resonator with Superior RF Performance and Enhanced Parasitic Mitigation by Low-Temperature Batch Fabrication

This study investigates a hybrid microelectromechanical system (MEMS) acoustic resonator through a hybrid approach to combine capacitive and piezoelectric transduction mechanisms, thus harnessing the advantages of both transducer technologies within a single device. By seamlessly integrating both piezoelectric and capacitive transducers, the newly designed hybrid resonators mitigate the limitations of capacitive and piezoelectric resonators. The unique hybrid configuration holds promise to significantly enhance overall device performance, particularly in terms of quality factor (Q-factor), insertion loss, and motional impedance. Moreover, the dual-transduction approach improves the signal-to-noise ratio and reduces feedthrough noise levels at higher frequencies. In this paper, the detailed design, complex fabrication processes, and thorough experimental validation are presented, demonstrating substantial performance enhancement potentials. A hybrid disk resonator with a single side-supporting anchor achieved an outstanding loaded Q-factor higher than 28,000 when operating under a capacitive drive and piezoelectric sense configuration. This is comparably higher than the measured Q-factor of 7600 for another disk resonator with two side-supporting anchors. The hybrid resonator exhibits a high Q-factor at its resonance frequency at 20 MHz, representing 2-fold improvement over the highest reported Q-factor for similar MEMS resonators in the literature. Also, the dual-transduction approach resulted in a more than 30 dB improvement in feedthrough suppression for devices with a 500 nm-thick ZnO layer, while hybrid resonators with a thicker piezoelectric layer of 1300 nm realized an even greater feedthrough suppression of more than 50 dB. The hybrid resonator integration strategy discussed offers an innovative solution for current and future advanced RF front-end applications, providing a versatile platform for future innovations in on-chip resonator technology. This work has the potential to lead to advancements in MEMS resonator technology, facilitating some significant improvements in multi-frequency and frequency agile RF applications through the original designs equipped with integrated capacitive and piezoelectric transduction mechanisms. The hybrid design also results in remarkable performance metrics, making it an ideal candidate for integrating next-generation wireless communication devices where size, cost, and energy efficiency are critical.

Vibration Propulsion in Untethered Insect-Scale Robots with Piezoelectric Bimorphs and 3D-Printed Legs

This research presents the development and evaluation of a miniature autonomous robot inspired by insect locomotion, capable of bidirectional movement. The robot incorporates two piezoelectric bimorph resonators, 3D-printed legs, an electronic power circuit, and a battery-operated microcontroller. Each piezoelectric motor features ceramic plates measuring 15 × 1.5 × 0.6 mm3 and weighing 0.1 g, with an optimized electrode layout. The bimorphs vibrate at two flexural modes with resonant frequencies of approximately 70 and 100 kHz. The strategic placement of the 3D-printed legs converts out-of-plane motion into effective forward or backward propulsion, depending on the vibration mode. A differential drive configuration, using the two parallel piezoelectric motors and calibrated excitation signals from the microcontroller, allows for arbitrary path navigation. The fully assembled robot measures 29 × 17 × 18 mm3 and weighs 7.4 g. The robot was tested on a glass surface, reaching a maximum speed of 70 mm/s and a rotational speed of up to 190 deg./s, with power consumption of 50 mW, a cost of transport of 10, and an estimated continuous operation time of approximately 6.7 h. The robot successfully followed pre-programmed paths, demonstrating its precise control and agility in navigating complex environments, marking a significant advancement in insect-scale autonomous robotics.

Neuromorphic alternating current sensing using piezoelectric resonators and physical reservoir computing

Non-contact current sensors are valuable because they can safely measure alternating current without interrupting the circuit. However, current sensors utilizing Hall elements or coils are only available for single wires, and piezoelectric resonator-based sensors have difficulty achieving both high sensitivity and linearity. To address this issue, we propose a novel approach, that is, the use of piezoelectric current sensors as nodes for physical reservoir computing (physical RC), allowing us to utilize nonlinear regions. To improve the sensitivity and short-term memory required by physical RC, a piezoelectric resonator with a quality factor of 75 was realized by employing a tuning fork structure. Nonlinearities were also introduced by analog circuits. The results of the benchmark tests indicate that the device worked as a physical RC and that it successfully predicted unknown current values from the results of training at three levels of current.

An exact analytical solution for coupled vibration analysis of a piezoelectric resonator

Abstract Piezoelectric resonators are widely used as the active components in devices such as sensors, actuators, communication filters, and micro/nano-electro-mechanical systems (MEMS / NEMS). Due to the piezoelectric effect, Poisson’s ratio, and its finite dimension, the thickness and lateral vibration modes in a piezoelectric resonator are inevitably coupled. In this paper, an exact analytical model for coupled vibration analysis of a piezoceramic disk is developed based on a new superstition method. The free vibrations are decomposed into thickness and lateral directions in a new form of Fourier-Bessel series and then they are superimposed to satisfy the boundary conditions. To verify the validity of the analytical model proposed here, numerical simulations are performed using COMSOL Multiphysics. An excellent agreement is observed. This analytical model can be applied to the design and optimization of piezoelectric devices.

Q-enhancement of piezoelectric micro-oven-controlled MEMS resonators using honeycomb lattice phononic crystals

In this paper, a two-dimensional (2-D) honeycomb lattice phononic crystal (PnC) based micro-oven with large bandgap is introduced to be integrated with piezoelectric microelectromechanical systems (MEMS) resonator to reduce anchor loss for timing applications. Finite element method (FEM) analysis and experimental measurement were performed to verify that the proposed PnC micro-oven design gives advantage in quality factor (Q). The measurement results demonstrate that the resonator with 2-D honeycomb lattice PnC micro-oven shows a repeatable 1.7 times improvement of average Q compared with the bare one. The resonator with micro-oven control was further measured for frequency stability. The proposed piezoelectric micro-oven controlled MEMS resonator achieves a frequency stability of less than ±10 ppb in a stable environment, which indicates promising potential for application in high-end timing field.

Определение вязкости и диэлектрической проницаемости жидкости методом эквивалентных схем с помощью резонатора с поперечным электрическим полем

The paper presents a method for determining the viscosity and permittivity of a liquid using the equivalent circuit method. The parameters of the Mason equivalent circuit were found for a piezoelectric resonator with a lateral electric field made of PZT-19 ceramics. The frequency dependences of the real and imaginary parts of the electrical impedance of a resonator loaded with liquid samples with different viscosity and permittivity were measured. The fitting of the theoretical frequency dependences of the real and imaginary parts of the electrical impedance of a resonator loaded with mixtures of “water - isopropyl alcohol” and “water - glycerin” to the measured dependences was carried out. As the result the dependence of the permittivity of the liquid on the additional capacitance (determined from the Mason scheme) and the dependence of the shear fluid viscosity on the imaginary part of the mechanical impedance of the fluid load (determined from the Mason scheme) were built. These dependences can be used as calibration curves to determine dielectric constant and viscosity.

Investigation of Piezoelectric Properties in Ca-Doped PbBa(Zr,Ti)O3 (PBZT) Ceramics.

The perovskite-structured materials Pb0.75Ba0.251-xCax(Zr0.7Ti0.3)O3 for x = 1 and 2 at.% were synthesized using the conventional mixed-oxide method and carbonates. Microstructural analysis, performed using a scanning electron microscope, revealed rounded grains with relatively inhomogeneous sizes and distinct grain boundaries. X-ray diffraction confirmed that the materials exhibit a rhombohedral structure with an R3c space group at room temperature. Piezoelectric resonance measurements were conducted to determine the piezoelectric and elastic properties of the samples. The results indicated that a small amount of calcium doping significantly enhanced the piezoelectric coefficient d31. The calcium-doped ceramics exhibited higher electrical permittivity across the entire temperature range compared to the pure material, as well as a significant value of remanent polarization. These findings indicate that the performance parameters of the base material have been significantly improved, making these ceramics promising candidates for various applications.

Design of Acetaldehyde Gas Sensor Based on Piezoelectric Multilayer Microelectromechanical System Resonator.

Acetaldehyde is a volatile organic compound that can cause damage at the cellular and genomic levels. The monitoring of acetaldehyde gas at low concentrations requires fast-response and low-cost sensors. Herein, we propose the design of an acetaldehyde gas sensor based on a low-cost Microelectromechanical System (MEMS) process. This sensor is formed by a single-clamped piezoelectric multilayer resonator (3000 × 1000 × 52.2 µm) with a simple operating principle and easy signal processing. This resonator uses a zinc oxide piezoelectric layer (1 µm thick) and a sensing film of titanium oxide (1 µm thick). In addition, the resonator uses a support layer of 304 stainless steel (50 µm thick) and two aluminum layers (100 nm thick). Analytical and Finite-Element Method (FEM) models are developed to predict the mechanical behavior of the gas sensor, considering the influence of the different layers of the resonator. The analytical results agree well with respect to the FEM model results. The gas sensor has a first bending frequency of 4722.4 Hz and a sensitivity of 8.22 kHz/g. A minimum detectable concentration of acetaldehyde of 102 ppm can be detected with the proposed sensor. This gas sensor has a linear behavior to detect different acetaldehyde concentrations using the frequency shifts of its multilayer resonator. The gas sensor design offers advantages such as small size, a light weight, and cost-efficient fabrication.

Ultrathin Multilayer P(VDF-TrFE) Film-Based Piezoelectric Resonator for High-Quality Under-Display Fingerprint Recognition

Ultrathin Multilayer P(VDF-TrFE) Film-Based Piezoelectric Resonator for High-Quality Under-Display Fingerprint Recognition

One-pot approach for acoustic directed assembly of metallic and composite microstructures by metal ion reduction

Acoustic-directed assembly is a modular and flexible bottom-up technique with the potential to pattern a wide range of materials. Standing acoustic waves have been previously employed for patterning preformed metal particles, however, direct patterning of metallic structures from precursors remains unexplored. Here, we investigate utilization of standing waves to exert control over chemical reaction products, while also exploring their potential in the formation of multi-layered and composite micro-structures. Concentric micro-structures of gold and silver were obtained by introducing a metal precursor salt and a reducing agent into a cylindrical piezoelectric resonator that also served as a reservoir. In addition, we introduce an innovative approach to directly fabricate metallic multi-layer and composite structures by reducing different metal ions or adding nanoparticles during the reduction step. We showcased our method through the fabrication of layered structures, incorporating a combination of gold and silver, as well as structures composed of silver and hematite nanoparticles. The produced structures were characterized through both surface and cross-sectional analyses, revealing the influence of the acoustic field on the mesostructure as well. This innovative approach is promising for production of complex microstructures with enhanced functionality and controlled properties.

Piezoelectric MEMS resonator with magnetic tip mass for energy harvesting from ultra-low intensity magnetic fields

This article addresses the limitation in the implementation of the Internet of Things (IoT) due to its energy dependence on batteries. The central focus of this work is the development and characterization of a magnetoelectric (ME) energy generator for IoT, which combines a piezoelectric microelectromechanical system (MEMS) with a magnetic mass to interact with ambient magnetic fields (MFs). The device's efficiency is validated through finite element modeling (FEM) simulations and electrical characterization. Its applicability in environments with residual magnetic fields, such as near common household appliances, highlights its viability. Specific results, such as a maximum generated power of 0.55 µW, corresponding to a power density of 9.19 µW/cm³, for a magnetic field strength of 5 µT, emphasize its ability to address energy challenges and promote the sustainable autonomy of IoT.

Flexural-Mode Piezoelectric Resonators: Structure, Performance, and Emerging Applications in Physical Sensing Technology, Micropower Systems, and Biomedicine.

Piezoelectric material-based devices have garnered considerable attention from scientists and engineers due to their unique physical characteristics, resulting in numerous intriguing and practical applications. Among these, flexural-mode piezoelectric resonators (FMPRs) are progressively gaining prominence due to their compact, precise, and efficient performance in diverse applications. FMPRs, resonators that utilize one- or two-dimensional piezoelectric materials as their resonant structure, vibrate in a flexural mode. The resonant properties of the resonator directly influence its performance, making in-depth research into the resonant characteristics of FMPRs practically significant for optimizing their design and enhancing their performance. With the swift advancement of micro-nano electronic technology, the application range of FMPRs continues to broaden. These resonators, representing a domain of piezoelectric material application in micro-nanoelectromechanical systems, have found extensive use in the field of physical sensing and are starting to be used in micropower systems and biomedicine. This paper reviews the structure, working principle, resonance characteristics, applications, and future prospects of FMPRs.

Miniaturized Multi-Cantilever MEMS Resonators with Low Motional Impedance.

Microelectromechanical system (MEMS) cantilever resonators suffer from high motional impedance (Rm). This paper investigates the use of mechanically coupled multi-cantilever piezoelectric MEMS resonators in the resolution of this issue. A double-sided actuating design, which utilizes a resonator with a 2.5 μm thick AlN film as the passive layer, is employed to reduce Rm. The results of experimental and finite element analysis (FEA) show agreement regarding single- to sextuple-cantilever resonators. Compared with a standalone cantilever resonator, the multi-cantilever resonator significantly reduces Rm; meanwhile, the high quality factor (Q) and effective electromechanical coupling coefficient (Kteff2) are maintained. The 30 μm wide quadruple-cantilever resonator achieves a resonance frequency (fs) of 55.8 kHz, a Q value of 10,300, and a series impedance (Rs) as low as 28.6 kΩ at a pressure of 0.02 Pa; meanwhile, the smaller size of this resonator compared to the existing multi-cantilever resonators is preserved. This represents a significant advancement in MEMS resonators for miniaturized ultra-low-power oscillator applications.

A Hybrid Actuator Model for Efficient Guided Wave based Structural Health Monitoring Simulations

Abstract Simulation has been recognized as a promising option to reduce the time and costs associated with determining Probability of Detection (POD) curves to demonstrate the performance of Guided Wave based Structural Health Monitoring (GW-SHM) systems. Time domain transient spectral finite element schemes have been used for large GW-SHM simulation campaigns, but the most common piezoelectric transducer model used for actuation, the pin force model, has limitations in terms of its range of validity. This is because the excitation frequency for the pin force model has only been validated far below the first electromechanical resonance frequency of the piezoelectric transducer mainly due to not considering the normal stress and dynamics of the transducer. As a result, the value of simulation tools for performance demonstrations may be limited. To address this limitation, this paper introduces a Hybrid Actuator Model that integrates frequency-dependent complex interfacial stresses in both the shear and normal directions, computed using finite elements. These surface stresses are compatible with time domain transient spectral finite element schemes, enabling their seamless integration without compromising the required performance for conducting intensive simulation campaigns. The proposed hybrid actuator model undergoes validation through a combination of simulation and experimental studies. Additionally, a comprehensive parametric study is conducted to assess the model's validity across a wide range of excitation frequencies. The results demonstrate the accurate representation of the transduction signal above the piezoelectric transducer's first free electromechanical resonance frequency.

Complex electromechanical parameters and microstructure peculiarities of PZT-type porous piezoceramics

In this work, we studied the microstructure peculiarities and complex electromechanical parameters of porous piezoelectric ceramics based on the PZT system with different relative porosity and pore sizes. The complex elastic, dielectric, and electromechanical parameters of the porous piezoceramics were measured on the radial vibrational mode of standard samples and analyzed using piezoelectric resonance analysis (PRAP) software. It was revealed that the microstructural features of porous piezoceramics defined the character of the porosity dependences of real and imaginary parts of dielectric, piezoelectric, and electromechanical properties of porous piezoelectric ceramics.

Uniaxially drawn poly (L-lactic acid)/ poly (vinylidene fluoride) polymer blend as a promising piezoelectric material: Hysteresis and resonance spectroscopy study

This study explores the potential for piezoelectricity in a blend of polyvinylidene fluoride (PVDF) and poly-L-lactic acid (PLLA) prepared using the solution casting method. Dielectric frequency measurements across a range of 102 to 106 Hz revealed piezoelectric resonance within a broader dielectric relaxation regime. Analysis of the resonance spectra for length and width vibrational modes enabled the determination of the piezoelectric tensor components of the PVDF/PLLA blend. The blend exhibited enhanced ferroelectric polarization reversal, remnant polarization, and coercive field compared to pristine PVDF samples. The piezoelectric constants d31 and d14 (d36 of the blend) were determined. Mechanical drawing and poling techniques were employed to generate multiple piezoelectric constants, allowing for efficient energy harvesting from various directions. This flexible blend offers promising prospects for versatile energy conversion applications.

Piezoelectric hysteresis and relaxation process in ferroelectric ceramics in a weak electric field

In this work, the piezoelectric hysteresis and relaxation process induced by a weak DC electric field in ferroelectric ceramics were studied using the impedance spectroscopy method and piezoelectric resonance analysis program (PRAP). The DC field and time dependences of the complex dielectric constants were measured for the radial extensional mode of vibrations of thin piezoceramic disks. It was found that the hysteresis and relaxation nature of the field and time dependences of the complex dielectric constants were caused by the reversible displacements of 90° domain walls as well as the space charge transformation.