Piezoelectric Micromachined Ultrasonic Transducer Array Research Articles

A Novel Nondestructive Testing Probe Using AlN-Based Piezoelectric Micromachined Ultrasonic Transducers (PMUTs).

Ultrasonic nondestructive testing (NDT) usually utilizes conventional bulk piezoelectric transducers as transceivers. However, the complicated preparation and assembly process of bulk piezoelectric ceramics limits the development of NDT probes toward miniaturization and high frequency. In this paper, a 4.4 mm × 4.4 mm aluminum nitride (AlN) piezoelectric micromachined ultrasonic transducer (PMUT) array is designed, fabricated, characterized, and packaged for ultrasonic pulse-echo NDT of solids for the first time. The PMUT array is prepared based on the cavity silicon-on-insulator (CSOI) process and packaged using polyurethane (PU) material with acoustic properties similar to water. The fabricated PMUT array resonates at 2.183 MHz in air and at around 1.25 MHz after PU encapsulation. The bandwidth of the packaged PMUT receiver (244 kHz) is wider than that of a bulk piezoelectric transducer (179 kHz), which is good for axis resolution improvement. In this work, a hybrid ultrasonic NDT probe is designed using two packaged PMUT receivers and one 1.25 MHz bulk transmitter. The bulk transmitter radiates an ultrasonic wave into the sample, and the defect echo is received by two PMUT receivers. The 2D position of the defect could be figured out by time-of-flight (TOF) difference, and a 30 mm × 65 mm detection area is acquired. This work demonstrates the feasibility of applying AlN PMUTs to ultrasonic NDT of solids and paves the way toward a miniaturized NDT probe using AlN PMUT technology.

A two-channel ultrasonic flowmeter based on AlN piezoelectric micromachined ultrasonic transducers arrays with improved cross-correlation method

This paper presents a highly accurate two-channel ultrasonic flowmeter based on AlN piezoelectric micromachined ultrasonic transducers (PMUTs) to measure flow rate in small-diameter pipes (9.6 mm). The ultrasonic transducers consist of four 10 by 10 PMUTs arrays with resonant frequency of 1 MHz in air. The ultrasonic transducers are excited by continuous sine voltage, and the transmitted and received signals are subjected to cross-correlation operation to obtain the time delay of the ultrasonic wave in the liquid. A dual-channel design of the flowmeter can reduce measurement errors by taking the average value. To reduce errors in the cross-correlation operation, an iterative algorithm is proposed, which effectively improves the measurement accuracy. The flowmeter is evaluated in flow range of 3.5–10 l min−1, and has a small relative error of 0.7%.

78‐2: A flat‐panel‐display compatible ultrasound platform

We present a thin‐film piezoelectric micromachined ultrasonic transducer (PMUT) technology compatible with flat‐panel manufacturing methods. Using the developed flow which is based on a low temperature AlScN piezoelectric layer, we fabricate large area 48x48 element PMUT arrays on glass. Beam steering and ultrasound medical imaging are demonstrated. The developed transducer technology can be combined with a TFT backplane and has the potential of direct integration on top of display size glass sheets, expanding the boundaries of ultrasound application domains.

An Ultrasonic Target Identification System Based on Piezoelectric Micromachined Ultrasonic Transducers

In this paper, an ultrasonic target identification system based on Piezoelectric Micromachined Ultrasonic Transducers (PMUTs) is proposed to improve the productivity efficiency of industrial production. The proposed system can accurately identify targets of different shapes. Two pieces of 3 × 3 PMUTs arrays with a resonant frequency of 115 kHz are used as the transmitter and receiver of the PMUTs-based ultrasonic sensor. The sensor is small in size and has high instability. In addition, the PMUTs based ultrasonic sensors have lower environmental requirements than vision sensors and are less expensive than laser sensors. Therefore, the sensors are suitable for large-scale use in industry. The characteristics of the proposed system are investigated in the shape experiments on the square, circle, frame, and ring targets. The four kinds of targets are acrylic plates with a thickness of 5mm. The experimental results show that the system can accurately identify the shapes of the four targets through the grid-based scheme. Besides, the identification process is automatically completed by the 3D mobile platform. The proposed system has demonstrated a cost-effective method to identify targets of different shapes, which can more efficiently guide the robotic manipulator’s grasping and other behaviors.

An Ultrasonic Target Detection System Based on Piezoelectric Micromachined Ultrasonic Transducers

In this paper, an ultrasonic target detection system based on Piezoelectric Micromachined Ultrasonic Transducers (PMUTs) is proposed, which consists of the PMUTs based ultrasonic sensor and the sensor system. Two pieces of 3 × 3 PMUTs arrays with the resonant frequency of 115 kHz are used as transmitter and receiver of the PMUTs-based ultrasonic sensor. Then, the sensor system can calculate the target's position through the signal received by the above receiver. The static and dynamic performance of the proposed prototype system are characterized on black, white, and transparent targets. The experiment results demonstrated that the proposed system can detect targets of different colors, transparencies, and motion states. In the static experiments, the static location errors of the proposed system in the range of 200 mm to 320 mm are 0.51 mm, 0.50 mm and 0.53 mm, whereas the errors of a commercial laser sensor are 2.89 mm, 0.62 mm, and N\A. In the dynamic experiments, the experimental materials are the targets with thicknesses of 1 mm, 1.5 mm, 2 mm and 2.5 mm, respectively. The proposed system can detect the above targets with a maximum detection error of 4.00%. Meanwhile, the minimum resolution of the proposed system is about 0.5 mm. Finally, in the comprehensive experiments, the proposed system successfully guides a robotic manipulator to realize the detecting, grasping, and moving of a transparent target with 1 mm. This ultrasonic target detection system has demonstrated a cost-effective method to detect targets, especially transparent targets, which can be widely used in the detection and transfer of glass substrates in automated production lines.

PMUTs Arrays for Structural Health Monitoring of Bolted-Joints.

Micro-electro-mechanical systems (MEMS) have enabled new techniques for the miniaturization of sensors suitable for Structural Health Monitoring (SHM) applications. In this study, MEMS-based sensors, specifically Piezoelectric Micromachined Ultrasonic Transducers (PMUT), are used to evaluate and monitor the pre-tensioning of a bolted joint structural system. For bolted joints to function properly, it is essential to maintain a suitable level of pre-tensioning. In this work, an array of PMUTs attached to the head and to the end of a bolt, serve as transmitter and receiver, respectively, in a pitch-catch Ultrasonic Testing (UT) scenario. The primary objective is to detect the Change in Time of Flight (CTOF) of the acoustic wave generated by the PMUT array and propagating along the bolt's axis between a non-loaded bolt and a bolt in service. To model the pre-tensioning of bolted joints and the transmission of the acoustic wave to and from a group of PMUTs through the bolt, a set of numerical models is created. The CTOF is found to be linearly related to the amount of pre-tensioning. The numerical model is validated through comparisons with the results of a preliminary experimental campaign.

Theoretical Modeling of Piezoelectric Micromachined Ultrasonic Transducers With Honeycomb Structure

In this work, we reported a theoretical model for a novel piezoelectric micromachined ultrasonic transducer (PMUT). The sensing cells with hexagonal transduction diaphragms in the PMUT array are designed and arranged in a bioinspired honeycomb structure. Based on the classical piece-wise approach commonly used for PMUT with circular diaphragm, an enhanced theoretical model is developed. In this model, the deflection of the honeycomb diaphragm is analytically determined by the volume deflection, rather than the path deflection commonly used in the previous models. The hexagonal diaphragm is converted as a circular one, whose radius is derived by correcting the characteristic size of the hexagonal diaphragm multiplied by a correction factor. The calculated parameters by the reported theoretical model of a transduction cell in the PMUT array, such as resonant frequency and static deflection, matched well with the data obtained by finite element analysis and experiment. Special investigations are made on the effects of top electrode coverage and transduction layer thickness towards PMUT’s performance. The reported theoretical model in this work is suitable not only for PMUTs with circular and hexagonal transduction cells, but also for square and other arbitrary shape diaphragms. This enhanced theoretical model provides an interesting insight on design optimizations of PMUT with various transduction cell geometries. [2022-0093]

Development of MEMS Airflow Volumetric Flow Sensing System with Single Piezoelectric Micromachined Ultrasonic Transducer (PMUT) Array

Compared to conventional ultrasonic flowmeters using multiple transducers, this paper reports, for the first time, an airflow volumetric flowmeter using a signal PMUT array to measure the flow rate in a rectangular pipe. The PMUT around 200 kHz is selected to fit the system requirements. All PMUT elements on this single array are then electrically grouped into transmitter and receiver. In order to minimize the crosstalk signal between transmitter and receiver, a phase shift signal is applied at the transmitter to reduce the amplitude of the crosstalk signal by 87.8%, hence, the resultant high sensing resolution. Based on the analog signal extracted from the single PMUT array, a complete flow sensing system is built by using the cross-correlation method and cosine interpolation, whereby the change in flow rate is reflected by the time of flight difference (dTof) recorded at the receiver. Meanwhile, the acoustic path self-calibration is realized by using multiple echoes. Compared with the previously reported MEMS flowmeters with dual or multiple PMUT devices, this paper proposes a single PMUT array flow sensing system, which is able to measure the flow rate changes up to 4 m3/h. With the implementation of a single device, the problem of ultrasound device/reflector misalignment during system setup is completely eradicated.

AlScN Film Based Piezoelectric Micromechanical Ultrasonic Transducer for an Extended Long-Range Detection.

Piezoelectric micromachined ultrasonic transducers (PMUTs) have been widely applied in distance sensing. However, the sensing distance of currently reported miniaturized ultrasonic sensors (e.g., PMUTs or CMUT) is still limited up to a certain range (e.g., ≤5 m) compared to conventional bulk ultrasonic devices. This paper reports a PMUT array design using scandium-doped aluminum nitride (AlScN) as its piezoelectric layer for an extended long-range detection purpose. To minimize air attenuation, our device is resonating at 66 kHz for a high receive sensitivity of 5.7 mV/Pa. The proposed PMUT array can generate a sound pressure level (SPL) as high as 120 dB at a distance of 10 cm without beam forming. This PMUT design is catered for a pin-to-pin replacement of the current commercial bulk ultrasonic ranging sensor and works directly with the conventional range finding system (e.g., TI PGA460). In comparison with the common bulk transducer, the size of our device is 80% smaller. With the identical ranging detection setup, the proposed PMUT array improves the system SNR by more than 5 dB even at a distance as far as 6.8 m. The result of extended sensing distance validates our miniaturized PMUT array as the optimized candidate for most ultrasonic ranging applications. With the progressive development of piezoelectric MEMS, we believe that the PMUT technology could be a game changer in future long-range sensing applications.

An ultrasound-induced wireless power supply based on AlN piezoelectric micromachined ultrasonic transducers

Wireless power transfer is one of the enabling technologies for powering implantable biomedical devices. Biocompatibility and CMOS compatibility of wireless power transfer devices are highly desired due to safety and footprint concerns. Toward implantable applications, this paper presents an ultrasound-induced wireless power supply based on AlN piezoelectric micromachined ultrasonic transducer (PMUT). The wireless power supply integrates wireless power transfer, power management and energy storage functions. The PMUT array is used as a passive wireless power receiver, followed by electrical impedance matching networks and a voltage multiplier for efficient power transmission and rectification. The output power intensity of the wireless receiver reaches 7.36 μW/mm2 with an incident ultrasound power below the FDA safety limit. The output power of the wireless power supply reaches 18.8 μW and a 100-μF capacitor is fully charged to 3.19 V after power management, which are sufficient to power many low-power implantable biomedical devices such as for neural electrical stimulation, biosensors and intrabody communication applications. The wireless power supply is implemented in a PCB with a diameter of 1 cm. With biocompatibility and CMOS compatibility of AlN thin film compared to commonly used PZT, the proposed solution paves the way for safer and ultraminiaturized wireless power supplies with further development incorporating all the functions on a monolithic chip in the future.

Efficient Modeling and Simulation of PMUT Arrays in Various Ambients.

This paper presents a numerical reduced-order modeling (ROM) approach for complex multi-layered arrays of piezoelectric micromachined ultrasonic transducers (PMUTs). The numerical modeling technique adopted to generate an array of PMUTs consisting of a considerable number of transducers allows for a large reduction in computational cost without reducing accuracy. The modeling idea is based on coupling shell elements applied to the PMUT structural layers with 3D-solid elements applied to the piezoelectric layer. A set of eigenfrequency and frequency domain analyses are presented considering a single ROM of a PMUT performing in different ambients and the performing central frequencies are obtained for every considered scenario. A unique arrangement of 228 PMUTs is presented and tested for its ability to transmit and receive acoustic waves. The operating frequency band of the array and the level of interference and cross-talk among different PMUTs in the near field are estimated. Finally, the results from a preliminary experimental test performed to analyze the acoustic abilities of an 8 × 8 array of PMUTs are presented. A corresponding numerical model is created and the obtained results matched the experimental data, leading to a validation of the modeling technique proposed in this work.

Piezoelectric Micromachined Ultrasonic Transducer Array-Based Electronic Stethoscope for Internet of Medical Things

A piezoelectric micromachined ultrasonic transducer (PMUT) array-based smart electronic stethoscope is presented for Internet of Medical Things (IoMT). For the first time, an electronic stethoscope based on a high-performance PMUT array is demonstrated to record mechanoacoustic cardiopulmonary signals from the body. This electronic stethoscope can continuously capture the cardiopulmonary signals and enable the telemedicine as well as the digital smart medical becoming a reality. The measured cardiopulmonary signals are collected using the PMUT array and transmitted to a mobile terminal via Bluetooth. Then, primary diagnosis can be implemented in real time using a customized APP in the terminal. The PMUT array was designed with high acoustic pressure sensitivity, high noise resolution, and wide operation bandwidth. These crucial parameters enabled simultaneous monitoring of multiple health parameters associated with the cardiopulmonary system, namely, respiratory rate, heart rate, lung sounds, and heart sounds. A feasibility test was implemented on patients with preexisting medical condition, in order to detect weak mechanoacoustic signals related to tachyarrhythmia and asthma. This article demonstrates the potential use of smart electronic stethoscope in healthcare applications, such as the assessment of heart and lung diseases, which provides an innovative auscultation technology and brings great benefits to IoMT.

Air-coupled piezoelectric micromachined ultrasonic transducers for surface stain detection and imaging

This paper proposes an air-coupled piezoelectric micromachined ultrasonic transducer (PMUT) for detection and imaging of surface stains. A 508 kHz PMUT array is designed, fabricated, and characterized in terms of its electrical and acoustic properties, and it is used in a pulse echo validation test. Imaging of stains on metal blocks is successfully demonstrated. Compared with existing optical methods for stain detection, the proposed approach can work in a dark environment without color requirements. This work provides a new and promising route for the development of miniaturized stain detection systems.

A Miniaturized Ultrasonic Sugar Concentration Detection System Based on Piezoelectric Micromachined Ultrasonic Transducers

A miniaturized ultrasonic sugar concentration detection system based on piezoelectric micromachined ultrasonic transducers (PMUTs) is presented in this work. An 8×9 PMUT array together with a TDC1000 ultrasonic sensing analog front end is used to alternately transmit and receive ultrasonic signals. A PT1000 temperature sensor is employed for real-time monitoring the solution temperatures. The acquired and processed signals are sequentially subjected to ultrasonic time-of-flight (TOF), ultrasonic velocity and sugar concentration calculations, followed by a temperature compensation by a microcontroller unit (MCU). A feasibility evaluation of the designed ultrasonic sugar concentration detection system is conducted. A sucrose solution is selected as the measurement sample. Measurement results show that the reported system can be used to determine sugar concentration in solutions well and can perform automatic temperature compensation. The reported ultrasonic sugar concentration system has a fast response of less than 1 s, an accuracy of 1.4% and a high resolution of 0.6%, which is comparable to the classical optical saccharimeter. Furthermore, the reported system can be designed as a small catheter-based test probe with high portability for portable sugar concentration detections in food industry, thanks to the compact size of the PMUT sensor.

Piezoelectric Micromachined Ultrasonic Transducer for Arterial Wall Dynamics Monitoring.

In this article, a [Formula: see text] piezoelectric micromachined ultrasonic transducer (PMUT) array is designed and driven with one cycle of a 5-MHz sinusoid at 10 [Formula: see text] for radial artery motion tracking. The transmit and receive performance figure of merit (FOM) of an individual PMUT over operating frequency is modeled and validated using laser Doppler vibrometer (LDV) measurements. Given a fixed cross section, the FOM inversely scales with frequency. The array aperture size is selected to obtain enough pressure and received signal to measure the radial artery wall reflection at a 5-mm depth in tissue. The 2-mm acoustic beamwidth provides enough lateral resolution for radial artery wall motion tracking. Single-line ultrasonic pulse-echo measurements with high time resolution, also called M-mode ultrasound imaging, are demonstrated to reproduce a known target motion profile with a precision of around 0.5 [Formula: see text]. In vivo radial artery dynamics are measured by placing the sensor on the wrist of a volunteer. The measured diameter change waveform of the radial artery is consistent with reports in the literature and captures key arterial pulse waveform features, including systolic upstroke, systolic decline, dicrotic notch, and diastolic runoff. The system has sufficient accuracy and precision to measure both the 50 [Formula: see text] overall diameter change and the 5- [Formula: see text] diameter change due to the dicrotic notch. A heart rate of 70 beats/min is also derived. This demonstrates the great potential of custom PMUT arrays for continuous cardiovascular system monitoring.

A Novel Transfer Function Based Ring-Down Suppression System for PMUTs.

In this paper, a novel ring-down suppression system based on transfer function is proposed for the first time to suppress the ring-down time and decrease the blind area of PMUTs (Piezoelectric Micromachined Ultrasonic Transducers). This suppression system includes a transfer function and a simple P (proportion) controller, which can reduce the ring-down time without degrading any performances of PMUTs. The transfer function serves as a virtual PMUT device, feeding its output into the P controller; then, the P controller generates a suppression signal to the actual PMUT device. The ring-down time of a 115-kHz PMUT array is demonstrated to be reduced by up to 93% through the suppression system. In addition, the P controller has been experimentally optimized, reducing the blind area of the PMUT array by about 40%. Moreover, a low ring-down PMUTs system design guideline is established, which is practical and straightforward for industrial scenarios. Finally, the system can be easily integrated into ASIC (Application Specific Integrated Circuit).

Design and analysis of piezoelectric micromachined ultrasonic transducer using high coupling PMN-PT single crystal thin film for ultrasound imaging

Due to its higher frequency, improved impedance matching, and easy formation of array, piezoelectric micromachined ultrasonic transducer (PMUT) has drawn much attentions for application in ultrasound imaging. In this paper, PMUT based on [011] poled 0.70Pb(Mg1/3Nb2/3)O3–0.30PbTiO3 (PMN-0.30PT) single crystal thin film was proposed and modeled by performing finite element method. Influences of different configurations of top electrode shape and bottom cavity shape on PMUT performance were studied. The investigation results show that the resonant frequency of PMN-PT-based PMUT with circular top electrode and square bottom cavity is up to 27.155 MHz. The effective electromechanical coupling coefficient ( of PMUT was up to 2.32%, which was 127% larger than that of lead zirconate titanate-based PMUT. The static transmitting sensitivity was three times enhancement compared to PMUT with square top electrode and square bottom cavity. Furthermore, acoustic field characteristics of PMUT and PMUT arrays based on PMN-PT in water were investigated. The relative pulse-echo sensitivity level of 2 × 2 PMUT array was −35 dB with the reflector at 200 μm. The obtained results demonstrated that the proposed PMN-PT-based PMUT can achieve high frequency and large as well as considerable sensitivity, which is promising for application in high resolution ultrasound imaging.

Total-Focus Ultrasonic Imaging of Defects in Solids Using a PZT Piezoelectric Micromachined Ultrasonic Transducer Array.

This work demonstrates the ultrasonic imaging ability of piezoelectric micromachined ultrasonic transducer (PMUT) for the detection of defects deep in solids by total-focus imaging algorithm. The 3-MHz PMUT array uses thin-film PZT as the material for energy transformation because of its high piezoelectric coefficient. Six columns with 12 PMUT units each exhibit an acoustic pressure of 137 kPa measured in water at 1 cm away when driven by a 27-Vpp input. Butter is chosen experimentally as the coupling agent to solids because of its low noise level and short cycling down. Through multilevel processing of echoes and total-focus algorithm, the 2-D image of a graphite plant was obtained with four holes identified based on our customized impedance-matched imaging system. The 16 columns of PMUT array with an area of 5.8 mm ×4.2 mm exhibit the imaging ability of an area of 40 mm ×40 mm in the graphite plant with identified defects deep as 3 cm. These results indicate that PMUT has the detection and imaging ability for defects deep in solids, not merely surface within hundreds of micrometers, and it has the potential for 3-D imaging, especially those occasions in limited space.

Non-Contact Ultrasonic Flow Measurement for Small Pipes Based on AlN Piezoelectric Micromachined Ultrasonic Transducer Arrays

In this paper, we propose a non-contact ultrasonic liquid flowmeter based on AlN piezoelectric micromachined ultrasonic transducer (PMUT) arrays. Two 10 by 10 PMUT arrays with resonant frequency of 980 kHz in air are mounted outside of a pipe to measure liquid flow without contacting the liquid. An acoustic matching layer is designed to mitigate the loss of sound waves caused by sound reflection. Under excitation of continuous wave, the flow of the liquid can be determined via detecting the phase difference between transmitting and received signals. The measurement range of flow is 0.515 L/min ~ 3.40 L/min and the measurement error is less than 3%. Moreover, an interpolation method is proposed to reduce the signal sampling frequency without obviously affecting the measurement accuracy, which shows potential for further system integration.

An Ultrasonic Proximity Sensing Skin for Robot Safety Control by Using Piezoelectric Micromachined Ultrasonic Transducers (PMUTs)

The safety issue of robot becomes a key challenge in modern manufacturing industry, especially in the scenario of frequent human-robot collaboration. This paper presents a flexible ultrasonic proximity sensing skin which can be integrated on the surface of robot arm to ensure the safe human-robot collaboration. The sensing skin is composed of three pieces of aluminum nitride based piezoelectric micromachined ultrasonic transducers (PMUTs) arrays at the resonance frequency of 115 kHz and chip size of 4 mm <inline-formula xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"> <tex-math notation="LaTeX">$\times 4$ </tex-math></inline-formula> mm <inline-formula xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"> <tex-math notation="LaTeX">$\times0.5$ </tex-math></inline-formula> mm. The three pieces of PMUTs arrays are evenly integrated on the flexible printed circuit board (FPCB) with a device size of 8.8 mm <inline-formula xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"> <tex-math notation="LaTeX">$\times60$ </tex-math></inline-formula> mm <inline-formula xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"> <tex-math notation="LaTeX">$\times1.7$ </tex-math></inline-formula> mm. The proximity sensing skin can detect obstacles within 300 mm and 60 degrees in front, and shows a large sensing coverage in comparison with capacitive/infrared devices. Besides, it is capable of sensing transparent materials like glass. Finally, since the small size and good scalability of micro-electro-mechanical system (MEMS), the PMUTs are easy to install onto robots and to integrate with other ultrasonic transducers in the future. This PMUTs based sensing skin will greatly enhance the sensing capability of robots and human safety during collaborative work.