Piezoelectric Ceramic Actuators Research Articles

Design and experiment of multidimensional and subnanometer stage driven by spatially distributed piezoelectric ceramics.

Multidimensional microdriving stage is one of the key components to realize precision driving and high-precision positioning. To meet nanometer displacement and positioning in the fields of micro-/nano-machining and precision testing, a new six-degree-of-freedom microdriving stage (6-DOF-MDS) of multilayer spatially distributed piezoelectric ceramic actuators (PZTs) is proposed and designed. The interior of the 6-DOF-MDS is a hollow design. The flexure hinge is used as the transmission mechanism, and the series-parallel hybrid driving of the corresponding PZTs achieves the microtranslation in the X, Y, and Z directions and the microrotation around the three axes of the microdriving stage, forming a microdisplacement mechanism with high rigidity and simple structure, which can realize the microfeed of 6-DOF. The force-displacement theory and lug boss structure optimization of the 6-DOF-MDS are analyzed, while the strength checking and natural frequency of the 6-DOF-MDS are also simulated by the finite element method. In addition, the real-time motion control system of the 6-DOF-MDS is designed based on Advanced RISC Machines. Through a series of verification experiments, the stroke and resolution results of the 6-DOF-MDS are obtained, where the displacements in the X, Y, and Z directions are 20.72, 20.02, and 37.60μm, respectively. The resolution is better than 0.68nm. The rotation angles around X, Y, and Z are 38.96″, 33.80″, and 27.87″, respectively, with an angular resolution of 0.063″. Relevant coupling experiments were also performed in this paper; in the full stroke linear running of X-axis, the maximum coupling displacements of the Y- and Z-axes are 1.04 and 0.17μm, respectively, with the corresponding coupling rates of ∼5.0% and 0.8%. The maximum coupling angles for the X-, Y-, and Z-axes are 0.33″, 0.14″, and 2.30″, respectively. Considering the coupling of the 6-DOF-MDS, decoupling measures and specific mathematical models have also been proposed. The proposed multidimensional microdriving stage achieves subnanometer resolution and can be used for the precise positioning and attitude control of precision instruments at the nano-/subnanometer level.

Study on vibration suppression of an aero-engine rotor system with adjustable oil film thickness driven by piezoelectric actuator through critical speed

The squeeze film damper (SFD) is difficult to meet the vibration control requirements of the rotor at both the critical speed and other rotor speeds at the same time due to the fixed structural parameters. The control method of piezoelectric ceramic actuator (PZT) actively changing the SFD oil film gap is proposed to suppress the critical amplitude of the rotor system. The dynamic model of the rotor system with PZT is established. The mechanical controllable characteristics of SFD are revealed, and the vibration damping performance of the controllable SFD (CSFD) is studied at critical speed. Both experiment and theory show that the proposed method can effectively suppress the critical amplitude of the rotor system with different imbalance.

Achieving large strain and excellent temperature stability in PT-PZ-LST piezoelectric ceramics

Lead-based piezoelectric ceramics are the preferred material for commercial piezoelectric ceramic actuators due to their high performance and irreplaceability. However, the operating temperature (<100 °C) and strain (0.1 %∼0.2 %) of lead-based piezoelectric ceramics are still limited. Achieving large strain in a wide temperature range remains challenging. In this paper, a new strategy is proposed to effectively increase the strain value of lead-based piezoelectric ceramics through domain engineering. The new xPbTiO3-(0.97-x)PbZrO3-0.03(La0.1Sr0.80.1)TiO2.95 (xPT-PZ-LST) ternary piezoelectric ceramic system reaches a strain value as high as 0.5 % and exhibits extremely high temperature stability (13 %) in the range of 25–230 °C. By fine-tuning the content of PT components, the average length and width of a typical tetragonal domain are transformed from 800 nm to 80 nm (long and thin) to 300 nm and 200 nm (short and wide), relatively. From the experimental results of PFM and Rayleigh analysis, the high strain can be attributed to the synergistic effect of the reduced coercive field (Ec), enhanced micro-region response, and regulated domain morphology, which ensures that high intrinsic and extrinsic contribution can be achieved at the same time. In this paper, a new strain regulation method is provided for lead-based piezoelectric ceramics, and a valuable large strain material is obtained via domain engineering.

Review on the Nonlinear Modeling of Hysteresis in Piezoelectric Ceramic Actuators

Piezoelectric ceramic actuators have the advantages of fast response speed and high positioning accuracy and are widely used in micro-machinery, aerospace, precision machining machinery, and other precision positioning fields. However, hysteretic nonlinearity has a great influence on the positioning accuracy of piezoelectric ceramic actuators, so it is necessary to establish a hysteretic model to solve this problem. In this paper, the principles of the Preisach model, the Prandtl Ishilinskii (PI) model, the Maxwell model, the Duhem model, the Bouc–Wen model, and the Hammerstein model and their application and development in piezoelectric hysteresis modeling are described in detail. At the same time, the classical model, the asymmetric model and the rate-dependent model of these models are described in detail, and the application of the inverse model corresponding to these models in the feedforward compensation is explained in detail. At the end of the paper, the methods of inverse model acquisition and control frequency of these models are compared. In addition, the future research trend of the hysteresis model is also prospected. The ideas and suggestions highlighted in this paper will guide the development of piezoelectric hysteresis models.

An Input-Current Shaping and Soft-Switching Drive Circuit Applied to a Piezoelectric Ceramic Actuator.

Piezoelectric ceramic actuators utilize an inverse piezoelectric effect to generate high-frequency vibration energy and are widely used in ultrasonic energy conversion circuits. This paper presents a novel drive circuit with input-current shaping (ICS) and soft-switching features which consists of a front AC-DC full-wave bridge rectifier and a rear DC-AC circuit combining a stacked boost converter and a half-bridge resonant inverter for driving a piezoelectric ceramic actuator. To enable ICS functionality in the proposed drive circuit, the inductor of the stacked boost converter sub-circuit is designed to operate in boundary-conduction mode (BCM). In order to allow the two power switches in the proposed drive circuit to achieve zero-voltage switching (ZVS) characteristics, the resonant circuit of the half-bridge resonant inverter sub-circuit is designed as an inductive load. In this paper, a prototype drive circuit for providing piezoelectric ceramic actuators was successfully implemented. Experimental results tested at 110 V input utility voltage show that high power factor (PF > 0.97), low input current total harmonic distortion (THD < 16%), and ZVS characteristics of the power switch were achieved in the prototype drive circuit.

Design and Analysis of XY Large Travel Micro Stage Based on Secondary Symmetric Lever Amplification.

This study presents a newly developed piezoelectric drive mechanism for the purpose of designing, analyzing, and testing a micro-positioning platform driven by piezoelectric actuators. The platform incorporates a piezoelectric ceramic actuator and a flexible hinge drive and features a symmetrical two-stage lever (STSL) amplification mechanism and a parallelogram output structure. The implementation of this design has led to notable enhancements in the dynamic properties of the platform, thereby eliminating the undesired parasitic displacement of the mechanism. An analytical model describing the fully elastic deformation of the platform is established, which is further verified by finite element simulation. Finally, the static and dynamic performances of the platform are comprehensively evaluated through experiments. A closed-loop control strategy is adopted to eliminate the nonlinear hysteresis phenomenon of the piezoceramic actuator (PEA). The experimental results show that the piezoelectric micro-actuator platform has a motion range of 97.84 μm × 98.03 μm; the output coupling displacement error is less than 1%; the resolutions of the two axes are 8.1 nm and 8 nm, respectively; and the x-axis and y-axis trajectory tracking errors are both 0.6%. The piezoelectric micromotion platform has good dynamic properties, precision, and stability. The design has a wide application potential in the field of micro-positioning.

Design and control of a fast steering mirror based on flexible supports and piezoelectric ceramic actuators.

The use of the fast steering mirror in an optical path requires strict volume control, and traditional structures have low space-utilization efficiency, resulting in traditional actuators having limited output in narrow spaces. The design in this paper adopts a combination of flexible universal supports and piezoelectric ceramic actuators, greatly reducing the layout space of the rotating-shaft system. We accurately model the design structure and develop closed-loop control methods to further improve the closed-loop control accuracy of the system. The experimental results indicate that the developed control method effectively improves the response speed and bandwidth and thus has good potential for use in engineering applications.

Study on the Technique for Wavelength Modulation Spectroscopy with Narrow Band Interference Filter Based External Cavity Diode Laser

In this study, an improved tunable external cavity diode laser (ECDL) is proposed. It is on the basis of narrow band interference filter, and its theoretical research is carried out as the light source of tunable diode laser absorption spectrum-wavelength modulation spectrum (TDLAS-WMS) system. The proposed model can use piezoelectric ceramic actuator to change and modulate its output central wavelength so that the laser central wavelength could periodically scan the absorption spectral band of the desired gas. Compared with the tunable monolithic diode laser, the narrow band interference filter based tunable ECDL might be able to accurately sense the type and concentration of a large variety of gases. Therefore, it can be used in the TDLAS-WMS system for high precision gas sensing and is expected to replace the tunable monolithic diode laser.

High-performance (K,Na)NbO 3-based multilayer piezoelectric ceramic actuators with nickel inner electrodes

High-performance (K,Na)NbO ₃-based multilayer piezoelectric ceramic actuators with nickel inner electrodes

Design of a Focusing Mechanism Actuated by Piezoelectric Ceramics for TMA Telescope.

With the development of space telescopes towards high-resolution and intelligent imaging, the scale and complexity of the focal plane components of large-aperture, off-axis, three-mirror anastigmatic (TMA) optical systems are increasing. Traditional focal plane focusing technology reduces the system reliability and increases the scale and complexity. This paper proposes a three-degrees-of-freedom focusing system based on a folding mirror reflector, with a piezoelectric ceramic actuator as the driver. An environment-resistant flexible support was designed for the piezoelectric ceramic actuator through an integrated optimization analysis. The fundamental frequency of the large-aspect-ratio rectangular folding mirror reflector focusing mechanism was around 121.5 Hz. After testing, it was found to meet the requirements of the space mechanics environment. This system shows promise for application to other optical systems as an open-shelf product in the future.

Energy-Based Optimal Placement of Piezoelectric Actuator on Smart Thin Plate

PurposeTo establish a smart thin plate in which structural health monitoring (SHM) and active vibration control purposes are integrated, the locations of attached piezoelectric ceramic (PZT) actuators as well as their applied normalized voltage are investigated.MethodNormal strains of such coupled electro-mechanical systems are defined using Kirchoff's classical laminate plate theory (CLPT), and then, by Ritz solution, these normal strains are converted to spatially dependent functions that are employed to define virtual work for the actuators as a function of location and applied voltage. Finally, genetic algorithm (GA)-based iterative optimization is carried out to locate the actuators as well as determine the normalized applied voltage for each of them in the desired modes.ResultsThree plates with different boundary conditions are studied for optimal placement of PZT actuator/s . The PZT actuator/s are optimally placed where the maximum amount of exerted virtual work is reached to fulfil the perfect excitation needed by SHM and provide the highest damping energy for undesired vibration at designated modes. The results show that the optimum location of PZT actuator/s lies where the maximum sum of normal strains is.ConclusionThe proposed process is valid for any mixed boundary conditions on a thin plate with any number of square actuators with a minimum computational effort, where both location of the actuator/s and applied voltage can be manipulated via GA to achieve the maximum exerted work done by PZT actuator/s at each desired natural mode.

Active Damping, Vibration Isolation, and Shape Control of Space Structures: A Tutorial

This tutorial reviews the author’s contributions to the active control of precision space structures over the past 35 years. It is based on the Santini lecture presented at the IAC-2022 Astronautical Congress in Paris in September 2022. The first part is devoted to the active damping of space trusses with an emphasis on robustness. Guaranteed stability is achieved by using decentralized collocated actuator–sensor pairs. The so-called integral force feedback (IFF) is simple, robust, and effective, and the performances can be predicted easily with simple formulae based on modal analyses. These predictions have been confirmed by numerous experiments. The damping strategy for trusses has been extended to cable structures, and also confirmed experimentally. The second part addresses the problem of vibration isolation: isolating a sensitive payload from the vibration induced by the spacecraft (i.e., the unbalanced mass of attitude control reaction wheels and gyros). A six-axis isolator based on a Gough–Stewart platform is discussed; once again, the approach emphasizes robustness. Two different solutions are presented: The first one (active isolation) uses a decentralized controller with collocated pairs of the actuator and force sensor, with IFF control. It is demonstrated that this special implementation of the skyhook, unlike the classical one, has guaranteed stability, even if the two substructures it connects are flexible (typical of large space structures). A second approach (passive) discusses an electromagnetic implementation of the relaxation isolator where the classical dash-pot of the linear damper is substituted by a Maxwell unit, leading to an asymptotic decay rate of −40 dB/decade, similar to the skyhook (although much simpler in terms of electronics). The third part of the lecture summarizes more recent work done on the control of flexible mirrors: (i) flat mirrors for adaptive optics (AO) controlled by an array of piezoelectric ceramic (PZT) actuators and (ii) spherical thin shell polymer reflectors controlled by an array of piezoelectric polymer actuators (PVDF-TrFE) aimed at being deployed in space.

Optimization design of two-stage amplification micro-drive system without additional motion based on particle swarm optimization algorithm

With the increasing requirements of precision mechanical systems in electronic packaging, ultra-precision machining, biomedicine and other high-tech fields, it is necessary to study a precision two-stage amplification micro-drive system that can safely provide high precision and a large amplification ratio. In view of the disadvantages of the current two-stage amplification and micro-drive system, such as poor security, low motion accuracy and limited amplification ratio, an optimization design of a precise symmetrical two-stage amplification micro-drive system was completed in this study, and its related performance was studied. Based on the guiding principle of the flexure hinge, a two-stage amplification micro-drive mechanism with no parasitic motion or non-motion direction force was designed. In addition, the structure optimization design of the mechanism was completed using the particle swarm optimization algorithm, which increased the amplification ratio of the mechanism from 5 to 18 times. A precise symmetrical two-stage amplification system was designed using a piezoelectric ceramic actuator and two-stage amplification micro-drive mechanism as the micro-driver and actuator, respectively. The driving, strength, and motion performances of the system were subsequently studied. The results showed that the driving linearity of the system was high, the strength satisfied the design requirements, the motion amplification ratio was high and the motion accuracy was high (relative error was 5.31%). The research in this study can promote the optimization of micro-drive systems.

Hysteresis Segmentation Modeling and Experiment of Piezoelectric Ceramic Actuator

Piezoelectric ceramics have been widely used in ultraprecision displacement drive systems because of their excellent performance such as fast response and high positioning accuracy. However, its tracking control accuracy is limited by its inherent hysteresis nonlinearity. To date, the parameter identification of the hysteresis model that has been developed is complex. This situation has resulted in the difficulty for the model to be used in the real-time control system of piezoelectric ceramic actuators. This article proposed a new mathematical model that can accurately describe hysteresis nonlinearity. The hysteresis main loop in the model is approximated using high-order rational fractions. The hysteresis segmentation model is completed through the recursive algorithm. Simulation and experimental results show that the hysteresis characteristics between the input voltages and output displacements have been clearly modeled. This segmentation modeling process is simple. In addition, the computation is low and accuracy is high. The model proposed in this article can complete the modeling of complex hysteresis phenomena of the multidegree-of-freedom micromotion stage with force–voltage coupling. Through a series of experiments to verify the effectiveness of the model in this article, thereby laying the model foundation for the subsequent control of the piezoelectric ceramic actuator. This result also provides a strong scientific basis for future research on the application of piezoelectric ceramic actuators in ultraprecision motion systems and further improves the positioning accuracy of the system.

A low-cost multilayer piezoelectric actuator for ultrasonic motor stator driving fabricated by a low-temperature co-fired ceramic process

Multilayer piezoelectric ceramics have wide application prospects in the fields of precision driving and intelligent sensing owing to their low driving voltages and large strains. However, high sintering temperatures and expensive noble metal electrodes limit their application as multilayer piezoelectric ceramic actuators (MLAs) in conventional devices. In this study, a modified piezoelectric ceramic powder and Ag inner electrode were used to prepare a low-cost MLA with a low sintering temperature of 900 °C. The MLA showed superior piezoelectric properties with d33 = 3015 pC/N and a large electric-field-induced strain of 0.13% at 22.2 kV/cm. Moreover, the stator of the ultrasonic motor composed of this MLA produced the ideal vibration mode, and the maximum rotation speed of the ultrasonic motor was 192 r/min under a 50 g load, which verifies the applicability of this component in practical minimised devices. These results demonstrate a strategy for fabricating low-cost and high-precision micro-actuators for precision driving.

Design and Performance Research of a Precision Micro-Drive Reduction System without Additional Motion.

A micro-drive system is a key part of macro-micro-drive technology and precision positioning technology in which a micro-drive reduction system can provide more precise motion and suitable small space motion. Therefore, it is necessary to study precision micro-drive reduction systems. In this paper, based on the design of a micro-drive reduction mechanism without force and displacement in non-motion direction, a precision micro-drive reduction system driven by a piezoelectric ceramic actuator (PZT) was designed, and the strength, dynamic and motion performance of the system was analyzed. First, based on the principle of a flexure hinge lever and the principle of balanced additional force, a type of precision micro-drive reduction mechanism with an adjustable reduction ratio was designed. Second, the strength performance of the system was analyzed by finite element analysis, and the dynamic performance of the system was analyzed by finite element analysis and experiments. Finally, the kinematic performance of the system was analyzed by theoretical analysis, the finite element method and experiment, and the motion linear equation was calculated based on the linear fitting equations of three methods. The study results showed that the system had good strength and dynamic performances, and the system’s motion had the advantages of high precision and good linearity. This research has certain reference value for the design and performance research of micro-drive mechanisms.

Feedforward Control of Piezoelectric Ceramic Actuators Based on PEA-RNN.

Multilayer perceptron (MLP) has been demonstrated to implement feedforward control of the piezoelectric actuator (PEA). To further improve the control accuracy of the neural network, reduce the training time, and explore the possibility of online model updating, a novel recurrent neural network named PEA-RNN is established in this paper. PEA-RNN is a three-input, one-output neural network, including one gated recurrent unit (GRU) layer, seven linear layers, and one residual connection in the linear layers. The experimental results show that the displacement linearity error of piezoelectric ceramics reaches 8.96 m in the open-loop condition. After using PEA-RNN compensation, the maximum displacement error of piezoelectric ceramics is reduced to 0.465 m at the operating frequency of 10 Hz, which proves that PEA-RNN can accurately compensate piezoelectric ceramics’ dynamic hysteresis nonlinearity. At the same time, the training epochs of PEA-RNN are only 5% of the MLP, and fewer training epochs provide the possibility to realize online updates of the model in the future.

Electroactive Polymer-Based Composites for Artificial Muscle-like Actuators: A Review.

Unlike traditional actuators, such as piezoelectric ceramic or metallic actuators, polymer actuators are currently attracting more interest in biomedicine due to their unique properties, such as light weight, easy processing, biodegradability, fast response, large active strains, and good mechanical properties. They can be actuated under external stimuli, such as chemical (pH changes), electric, humidity, light, temperature, and magnetic field. Electroactive polymers (EAPs), called ‘artificial muscles’, can be activated by an electric stimulus, and fixed into a temporary shape. Restoring their permanent shape after the release of an electrical field, electroactive polymer is considered the most attractive actuator type because of its high suitability for prosthetics and soft robotics applications. However, robust control, modeling non-linear behavior, and scalable fabrication are considered the most critical challenges for applying the soft robotic systems in real conditions. Researchers from around the world investigate the scientific and engineering foundations of polymer actuators, especially the principles of their work, for the purpose of a better control of their capability and durability. The activation method of actuators and the realization of required mechanical properties are the main restrictions on using actuators in real applications. The latest highlights, operating principles, perspectives, and challenges of electroactive materials (EAPs) such as dielectric EAPs, ferroelectric polymers, electrostrictive graft elastomers, liquid crystal elastomers, ionic gels, and ionic polymer–metal composites are reviewed in this article.

Design of a Panoramic Scanning Device Based on a Piezoelectric Ceramic Stack Actuator and Friction Transmission

In view of the complex structure and inaccurate positioning capabilities of the existing panoramic scanning system, a panoramic scanning device based on a piezoelectric ceramic stack actuator and friction transmission was designed. In our model, the output displacement of the piezoelectric ceramics is amplified by a bridge-type flexure hinge and applied to a shaft by friction to achieve panoramic scanning imaging. The mathematical model of the device was established, and the working characteristics were analyzed. The analysis demonstrated that the linear displacement increment of the shaft is a superposition. A modality simulation was performed, and the simulation results show that the designed device works normally at a frequency of 511.5 Hz. The test results indicated that the displacement of the actuator can reach 6 μm at an input voltage of 100 V. Moreover, the laser scanning results showed that the designed device can perform panoramic scanning imaging, which meets the requirements for use on the high-speed imaging system.

Compensation method for complex hysteresis characteristics on piezoelectric actuator based on separated level-loop Prandtl–Ishlinskii model

Piezoelectric ceramic actuators show nonlinear hysteresis characteristics due to material properties. In order to modify the inverse piezoelectric effect as an ideal linear execution, the classical Prandtl–Ishlinskii (PI) model is usually used on compensation by feedforward control. The PI model performs well on the simple hysteresis characteristics. However, when the output requirements are complex, the PI model has uneven compensation accuracy on the complex hysteresis characteristics and cannot achieve the accuracy as same as the simple hysteresis. This paper proposes a simplification of the complex hysteresis: Separated level-loop PI (SLPI) model. Firstly, use a loop separation logic algorithm simplification of the complex hysteresis characteristics to obtain hysteresis single loops with loop levels and vertexes. Secondly, hysteresis characteristics of each loop are independently modeled using the PI model. Finally, the inverse model is reconstructed by the rollback method to restore a positive sequence of the feedforward voltage and then input the feedforward voltage as a compensation to achieve higher and more uniform accuracy. Experiments and discussions show that the SLPI model can effectively improve the compensation results of complex hysteresis characteristics by 50.3%, and the average compensation accuracy difference between single hysteresis loops is reduced by 53.7%.