Physical Vapor Deposition Technology Research Articles

Chemically Processed Porous V2O5 Thin‐Film Cathodes for High‐Performance Thin‐film Zn‐Ion Batteries

AbstractThin‐film rechargeable batteries have a wide range of applications due to their unique properties such as small size, thinness, and the ability to power smart devices, including portable electronic devices, medical devices, smart cards, RFID tags, and Internet of Things (IoT) devices. Processing thin‐film electrodes for these batteries generally relies on standard physical vapor deposition technologies. However, producing porous thin‐films using these techniques presents significant challenges. Here, a rapid and cost‐effective chemical route for processing porous vanadium oxide (V2O5) thin‐film cathodes for application in Zinc‐ion‐based thin‐film batteries (Zn‐TFBs) is explored. The V2O5 precursor process uses an industrially viable spraying technique, which not only offers impressive charge storage performance of an areal capacity of 47.34 µAh cm−2, areal energy of 50.18 µWh cm−2, and areal power of 53 µW cm−2 at 50 µA cm−2 in the optimized gel‐electrolyte composition. This study introduces a cost‐effective and industrially viable method for processing highly porous thin‐film cathodes, enabling the production of high‐performance, affordable, and safer thin‐film batteries.

Electronics and Optoelectronics Based on Tellurium.

As a true 1Dsystem, group-VIA tellurium (Te) is composed of van der Waals bonded molecular chains within a triangular crystal lattice. This unique crystal structure endows Te with many intriguing properties, including electronic, optoelectronic, thermoelectric, piezoelectric, chirality, and topological properties. In addition, the bandgap of Te exhibits thickness dependence, ranging from 0.31eV in bulk to 1.04eV in the monolayer limit. These diverse properties make Te suitable for a wide range of applications, addressing both established and emerging challenges. This review begins with an elaboration of the crystal structures and fundamental properties of Te, followed by a detailed discussion of its various synthesis methods, which primarily include solution phase, and chemical and physical vapor deposition technologies. These methods form the foundation for designing Te-centered devices. Then the device applications enabled by Te nanostructures are introduced, with an emphasis on electronics, optoelectronics, sensors, and large-scale circuits. Additionally, performance optimization strategies are discussed for Te-based field-effect transistors. Finally, insights into future research directions and the challenges that lie ahead in this field are shared.

Preparation and Photophysical Properties of Znq2 Metallic Nanomaterials

AbstractBis(8‐hydroxyquinolates) Zinc (Znq2) can be used as a light‐emitting layer material in OLED devices to achieve its efficient electroluminescence effect. In this paper, Znq2 powder has been successfully synthesized and modified by the physical vapor deposition (PVD) method. Precursors and nano‐materials are characterized by XRD, SEM, PL, and so on. The performance of the modified material has been significantly improved. The emission intensity and absorption intensity in the deposited products increased with the increase in PVD temperature. At 453 K, luminous properties such as luminous intensity reach the optimal value including its fluorescence lifetime. Fluorescence lifetime values vary from 13 to 17 ns with the increase in temperature. The luminescence mechanism is also discussed. The energy gap and absorption spectrum of HOM‐LUMO are calculated by the DFT/UB3LYP method. The experimental values agree well with the theoretical values. The nanomaterial crystals modified by PVD technology are more orderly, impurities are reduced, and the luminous stability of the material is improved, which may be one of the reasons for the relatively slow decline in product life. The research combined with theoretical simulation is expected to be helpful to the research and promotion of such materials.

Research progress on the preparation of irradiation-resistant coating based on PVD technology

Nuclear energy is essential for the future development of countries. However, both structural and functional components of nuclear power equipment are facing severe challenges of nuclear irradiation damage after experiencing irradiation growth and irradiation creep. How to avoid irradiation damage to nuclear power equipment has become a hotspot in international research and development of surface protection technology. Deposition of protective coatings on the underlying object surface or in bulk materials has been considered as a near-term solution to enhanc functional components. Different substrate materials are selected according to other service conditions within the reactor. Suitable material selection combined with relevant optimization can significantly increase the service life of materials. This review summarizes recent research on several categories of anti-irradiation coatings prepared by physical vapor deposition technology for current industrial applications. These includes metallic, ceramic, composite and high entropy alloy coatings. The review endeavors to impart a thorough understanding of the properties of these selected anti-irradiation coatings, from the fundamental aspects of their substrate materials to their practical applications across diverse settings. It explores not only the current research progress but also the potential avenues for future advancements. Additionally, the intricate relationships between coating formulations, their resistance to irradiation, and their ultimate performance in various environments are illuminated in this paper.

The Influence of Temperature on the Photoelectric Properties of GeSe Nanowires.

Using physical vapor deposition (PVD) technology, GeSe nanowires were successfully fabricated by heating GeSe powder at temperatures of 500 °C, 530 °C, 560 °C, 590 °C, and 620 °C. The microstructure, crystal morphology, and chemical composition of the resulting materials were thoroughly analyzed employing methods like Scanning Electron Microscopy (SEM), X-ray Diffraction (XRD), plus Raman Spectroscopy. Through a series of photoelectric performance tests, it was discovered that the GeSe nanowires prepared at 560 °C exhibited superior properties. These nanowires not only possessed high crystalline quality but also featured uniform diameters, demonstrating excellent consistency. Under illumination at 780 nm, the GeSe nanowires prepared at this temperature showed higher dark current, photocurrent, and photoresponsivity compared to samples prepared at other temperatures. These results indicate that GeSe nanomaterials hold substantial potential in the field of photodetection. Particularly in the visible light spectrum, GeSe nanomaterials exhibit outstanding light absorption capabilities and photoresponse.

Comparative study of anti-corrosion properties in different CrN/WC-Co duplex coatings processed by PVD/HVOF

WC-Co coatings produced by high-velocity oxy-fuel (HVOF) show the high porosity which limits their application in seawater. Herein, we prepared CrN/WC-12Co and CrN/WC-10Co-4Cr duplex coatings combined with the physical vapor deposition (PVD) and HVOF technologies. The microstructure and the corrosion behavior were studied and compared with WC-Co coatings. The CrN film covers the pores on the surface of WC-Co coatings which enhances the corrosion resistance. In addition, the corrosion products of WC-10Co-4Cr coating seal the defects in the CrN film, and further improve the corrosion resistance of the duplex coatings. The CrN/WC-Co duplex coatings enhance the corrosion resistance of WC-Co coatings, especially for CrN/WC-10Co-4Cr, which greatly increases the corrosion potential and reduces the corrosion current density of WC-Co coatings.

Doping with KBr to Achieve High-Performance CsPbBr3 Semitransparent Perovskite Solar Cells.

Wide-bandgap semitransparent perovskite photovoltaics are emerging as one of the ideal candidates for building-integrated photovoltaics (BIPV). However, surface defects in inorganic CsPbBr3 perovskite prepared by vapor deposition severely limit the optoelectronic performance of perovskite solar cells. To address this issue, a strategy of doping a trace amount of KBr into perovskite by vapor deposition is adopted, effectively improving the quality of the film, reducing surface defect concentration, and enhancing the transportation and extraction of charge carriers. Simultaneously, fully physical vapor deposition technology is employed to fabricate perovskite solar cells with an average visible light transmittance of 44%. These devices exhibited an ultrahigh open-circuit voltage of 1.55 V and a superior power conversion efficiency (PCE) of 7.28%, demonstrating excellent moisture and heat resistance. Moreover, the corresponding 5 cm × 5 cm modules achieve a PCE of 5.35% with great thermal insulation capability. This work provides an approach for fabricating highly efficient all-inorganic perovskite solar cells with high average visible light transmittance, demonstrating new insights into their application in building-integrated photovoltaics.

Cutting edge preparation of micro end mills by PVD-etching technology

Micromilling tools face significant challenges in achieving cutting edge preparation by mechanical processes due to their small size. To address these limitations, a new approach for cutting edge preparation of micro end mills by physical vapor deposition (PVD) etching technology is presented. By adapting the etching strategy, which is conventionally used as pre-treatment process for PVD technology to clean and condition the surface of cemented carbide substrate, cutting edges of micromilling tools were successfully modified. The high-energy process variation by Advanced Arc-Enhanced Glow Discharge (AEGD) offers the possibility of achieving high material removal rates on the tool surfaces and thereby altering the cutting edge geometry. Fundamental investigations on material removal as well as on the effects on surface topography, sub-surface properties, and coating adhesion of a subsequently applied PVD coating are performed. To influence the topography and the cutting edge geometry, the preparation time tp and bias voltage UB were selected. Subsequently, the machining performance of the modified tools is evaluated in a micromilling process of the hardened powder-metallurgical high-speed steel AISI M3:2 with a hardness of 62 ± 1 HRC. For this purpose, micro end mills of cemented carbide with a diameter of D = 1 mm were conditioned, achieving asymmetric geometric properties of cutting edges with varying average cutting edges rounding of S¯\\documentclass[12pt]{minimal} \\usepackage{amsmath} \\usepackage{wasysym} \\usepackage{amsfonts} \\usepackage{amssymb} \\usepackage{amsbsy} \\usepackage{mathrsfs} \\usepackage{upgreek} \\setlength{\\oddsidemargin}{-69pt} \\begin{document}$${\\overline S}$$\\end{document}= 5.8 … 14.8 µm and a form-factor of K = 2.0 … 2.7. Based on the application tests a positive influence on the process forces was found. Thus, an efficient approach to cutting edge preparation can be identified by specifically designing ion etching in the PVD coating process.

Wear characteristics of PVD coated carbide tools in milling of TA15 titanium alloy

Titanium alloy, due to its small elastic modulus and poor thermal conductivity, is easy to exacerbate tool wear during milling which affects its machinability. In this work, an experimental investigation was conducted to analyze the effect of the properties and microstructure of different coatings on tool wear behavior and machining stability during the milling process of TA15 titanium alloy. Physical vapor deposition technology was applied to prepare AlTiSiN and AlZrTiN coatings on carbide samples, respectively, and their microstructures and mechanical properties were investigated. The results showed that AlZrTiN coating exhibited a higher elastic modulus, indicating that it had better resistance to peel off than AlTiSiN coating. Moreover, milling experiments were performed with AlTiSiN and AlZrTiN coated tools to investigate wear characteristics and mechanism. When milling TA15, the two coated tools mainly suffered adhesive wear and oxidation wear. AlZrTiN coated tool exhibited a better wear resistance during long time milling. The surface roughness of TA15 obtained by AlZrTiN coated tool was better than that by AlTiSiN coated tool, achieving approximately Ra0.089 µm. As a result, AlZrTiN coated tool exhibits a better cutting characteristic and is preferred for milling of TA15 titanium alloy.

LIOVIX® Printable Lithium Technology for Lithium Anode Manufacturing at Scale

The commercialization of lithium metal batteries requires the mass production of cost-effective thin lithium metal foil with thickness less than 30 µm. However, today’s known technologies are not yet commercially available. For example, thin lithium metal foil can be produced by hydraulic extrusion followed by a rolling process. This process usually requires a delicate balance between the pressure and tension created by both extruder and winder, so that the resulting foil is not torn or stretched, retaining all the dimensional characteristics required. This process can be extremely challenging when making lithium metal films with thickness less 20 µm due to the poor mechanical properties of lithium metal. Lithium metal foil can also be produced by physical vapor deposition (PVD). Lithium metal foil produced by PVD process are generally homogenous and have good control in thickness. However, PVD technology requires high vacuum chamber and is slow in the deposition rate, typically in the range of 0.1 to 100 nm s−1, making industrial scale of 20 µm lithium foil very challenging1.Livent has developed LIOVIX®printable lithium technology, a proprietary formulation that combines Stabilized Lithium Metal Powder (SLMP®), rheology modifiers and solvent to produce a stable suspension that can be printed on most common substrates. LIOVIX®printable lithium technology is an enabling technology that can produce thin lithium foil with thickness of 5 µm to 50 µm with no limitation in width, length and at high deposition speed. LIOVIX®enables pattern printing and can be applied to any substrate, for example a prefabricated anode, cathode, current collector, separator, and solid or polymer electrolyte. This technology enables 3D battery printing in a custom form factor shape.In this presentation, we will cover thin lithium foil manufacturing processes using standard industrial equipment and electrochemical performance results.References Acebedo, Begoña, et al. "Current Status and Future Perspective on Lithium Metal Anode Production Methods." Advanced Energy Materials (2023): 2203744.

Investigation of the Dislocation Density of NiCr Coatings Prepared Using PVD-LMM Technology.

Micron-sized coatings prepared using physical vapor deposition (PVD) technology can peel off in extreme environments because of their low adhesion. Laser micro-melting (LMM) technology can improve the properties of the fabricated integrated material due to its metallurgical combinations. However, the microstructural changes induced by the high-energy laser beam during the LMM process have not been investigated. In this study, we used the PVD-LMM technique to prepare NiCr coatings with a controlled thickness. The microstructural changes in the NiCr alloy coatings during melting and cooling crystallization were analyzed using molecular dynamics simulations. The simulation results demonstrated that the transition range of the atoms in the LMM process fluctuated synchronously with the temperature, and the hexagonal close-packed (HCP) structure increased. After the cooling crystallization, the perfect dislocations of the face-centered cubic (FCC) structure decreased significantly. The dislocation lines were mainly 1/6 <112> imperfect dislocations, and the dislocation density increased by 107.7%. The dislocations in the twinning region were affected by the twin boundaries and slip surfaces. They were plugged in their vicinity, resulting in a considerably higher dislocation density than in the other regions, and the material hardness increased significantly. This new technique may be important for the technological improvement of protective coatings on Zr alloy surfaces.

Improvement in surface performance of stainless steel by nitride and carbon-based coatings prepared via physical vapor deposition for marine application

To meet the escalating energy demands, marine resources have assumed a significant role in the field of renewable energy. High performance and extended lifespan of offshore equipment provide robust underpinnings for marine resource exploration. Stainless steel, as one of the most widely used marine materials, its friction and corrosion problems in extreme marine environments have become critical factors influencing the service life of marine equipment. Physical vapor deposition (PVD) technology is a compelling method for current and future applications due to the advantages of simple process, no pollution, few consumables, and uniform film formation. The preparation of suitable strengthening coatings by PVD provides a promising approach for enhancing the surface properties of stainless steel. Here, we review the current status of research on the preparation of wear resistance and anti-corrosion coatings on stainless steel surfaces by PVD in marine environments. First, an overview of PVD technology is given. Second, the influence of nitride and carbon-based coatings prepared by PVD technology on the tribological and corrosion properties of stainless steel in the marine environment is discussed, and the strengthening mechanisms of the two coatings are compared and analyzed from the aspects of elemental doping and multilayer structure design. Finally, the challenges and future directions in the development of nitride and carbon-based coatings for marine environments are prospected. The goal is to propose the design ideas of a new generation of anti-wear and corrosion-resistant coatings.

A novel development of sustainable cutting inserts based on PVD-coated natural rocks

The demand for modern cutting tool materials poses significant challenges due to their high energy consumption and reliance on expensive raw materials, which can have adverse effects on the environment, economic development, and geopolitical conditions. In response to these challenges, natural rocks are proposed as a sustainable and cost-effective alternative cutting tool material. By employing physical vapor deposition (PVD) technology to apply hard coatings onto natural rocks, their suitability as cutting inserts can be enhanced, thereby improving cutting performance. Titanium nitride (TiN) coatings were deposited on various types of natural rocks by magnetron sputtering. The natural rocks Alta quartzite, flint, lamellar obsidian, quartz, and Silver quartzite were utilized as substrate materials. The TiN coatings exhibit a crystalline structure on all rock inserts and significantly increase the surface hardness. Cutting tests using the PVD-coated rock inserts revealed enhanced wear resistance due to the TiN coating. However, the cutting performance was notably influenced by the distinct material properties of the natural rocks. Among them, flint as a substrate material ensures the highest wear resistance over an extended cutting length. Consequently, the utilization of PVD-coated natural rocks as cutting tools offers a novel concept to expand the group of cutting materials and provide a sustainable cutting material.

Development of Resonant Cavity Film for 575 nm All-Solid-State Laser System

Yellow lasers have attracted much attention due to their applications in biomedicine, astronomy and spectroscopy, and the resonant cavity is an important part of lasers. In this work, the resonant cavity film was studied and prepared using physical vapor deposition (PVD) technology to couple and match the optical properties of Dy,Tb:LuLiF4 crystal to generate yellow laser. In the process of film deposition, the substrate temperature has an important influence on the quality of the film. Therefore, we first investigated the effect of HfO2 film quality at different substrate temperatures. Furthermore, the multilayer film was designed to couple and match the optical properties of Dy,Tb:LuLiF4 crystal. According to the designed film system scheme, HfO2 and UV-SiO2 were used as high- and low-refractive index film materials for resonant cavity film preparation using the PVD technique, and the effect of process parameters on the film quality was investigated. A 450 nm pump laser was used to directly pump Dy3+ to excite and generate the yellow laser. In this process, the excited radiation jump occurs in the crystal, and the generated laser in the new band reaches a certain threshold after oscillation and gain in the resonant cavity, thus successfully outputting a 575 nm yellow laser.

Mass Production of Customizable Core-Shell Active Materials in Seconds by Nano-Vapor Deposition for Advancing Lithium Sulfur Battery.

Rational design and scalable production of core-shell sulfur-rich active materials is vital for not only the practical success of future metal-sulfur batteries but also for a deep insight into the core-shell design for sulfur-based electrochemistry. However, this is a big challenge mainly due to the lack of efficient strategy for realizing precisely controlled core-shell structures. Herein, by harnessing the frictional heating and dispersion capability of the nanostorm technology developed in the authors' laboratory, it is surprisingly found that sulfur-rich active particles can be coated with on-demand shell nanomaterials in seconds. To understand the process, a micro-adhesion guided nano-vapor deposition (MAG-NVD) working mechanism is proposed. Enabled by this technology, customizable nano-shell is realized in a super-efficient and solvent-free way. Further, the different roles of shell characteristics in affecting the sulfur-cathode electrochemical performance are discovered and clarified. Last, large-scale production of calendaring-compatible cathode with the optimized core-shell active materials is demonstrated, and a Li-S pouch-cell with 453Wh kg-1 @0.65 Ah is also reported. The proposed nano-vapor deposition may provide an attractive alternative to the well-known physical and chemical vapor deposition technologies.

Characterization of the Internal Stress Evolution of an EB-PVD Thermal Barrier Coating during a Long-Term Thermal Cycling

Electron beam physical vapour deposition (EB-PVD) technology is a standard industrial method for the preparation of a thermal barrier coating (TBC) deposition on aeroengines. The internal stress of EB-PVD TBCs, including stress inside the top coating (TC) and thermal oxidation stress during long-term service is one of the key reasons for thermal barrier failures. However, research on the synergistic characterization of the internal stress of EB-PVD TBCs is still lacking. In this work, the stress inside the TC layer and the thermal oxidation stress of EB-PVD TBC during long-term thermal cycles were synergistically detected, combining Cr3+-PLPS and THz-TDS technologies. Based on a self-built THz-TDS system, stress-THz coefficients c1 and c2 of the EB-PVD TBC, which are the core parameters for stress characterization, were calibrated for the first time. According to experimental results, the evolution law of the internal stress of the TC layer was similar to that of the TGO stress, which were interrelated and influenced by each other. In addition, the internal stress of the TC layer was less than that of the TGO stress due to the columnar crystal microstructure of EB-PVD TBCs.

A Comparative Investigation on the Microstructure and Thermal Resistance of W-Film Sensor Using dc Magnetron Sputtering and High-Power Pulsed Magnetron Sputtering

Traditional dc magnetron sputtering has a low ionization rate when preparing metallic thin films. With the development of thin film science and the market demand for thin film material applications, it is necessary to improve the density of magnetron-sputtered films. High-power pulsed magnetron sputtering (HiPIMS) technology is a physical vapor deposition technology with a high ionization rate and high energy. Therefore, in this work, HiPIMS was applied to prepare metallic tungsten films and compare the surface morphology and microstructure of metallic tungsten films deposited using HiPIMS and dc magnetron sputtering (dcMS) technology under different pulse lengths, as well as related thermal resistance performance, followed by annealing treatment for comparative analysis. We used AFM, SEM, XRD, and plasma characterization testing to comprehensively analyze the changes in the TCR value, stability, repeatability and other related performance of the metallic tungsten thin-film sensor deposited by the HiPIMS technology. It was determined that the thin film prepared by the HiPIMS method is denser, with fewer defects, and the film sensor was stable. The 400 °C annealed sample prepared using HiPIMS with a 100 μs pulse length reaches the largest recorded TCR values of 1.05 × 10−3 K−1. In addition, it shows better stability in repeated tests.

Application of physical vapor deposition technology for practical utilization of nano-size copper oxide for lead uptake from solution: kinetics, equilibrium, and recycling studies

For the first time, copper oxide-coated glass beads (CuO-GBs) were fabricated using physical vapor deposition (PVD) technology for sequestrating Pb2+ ions from solution is addressed. Compared to other coating procedures, PVD offered high-stability uniform CuO nano-layers attached with 3.0-mm glass beads. Heating of copper oxide-coated glass beads after deposition was rather necessary to achieve the best stability of the nano-adsorbent. Detection of nano-size copper oxide on the beads was made by FTIR (intense peak at 655cm-1 for CuO bond stretching) and XRF (Cu peak at 8.0keV). Scanning electron micrographs taken at high magnification power indicated the presence of CuO in nano-range deposited over glass beads. The maximum deposited amount of CuO on the beads was 1.1% and accomplished at the following operational conditions: internal pressure 10-5mmHg, Ar flow rate 8.0mL/min, voltage 84V, pre-sputtering time 20s, total sputtering time 10.0min, and post-heating temperature 150°C for 3h. A univariate analysis indicated that the optimum Pb2+ uptake by CuO-GBs from solution was achieved at pH 7.0-8.0, 7 beads/50mL, 120-min contact time, and 15-mg/L initial concentration. Kinetic data for Pb2+ uptake was best presented by a pseudo-second-order model with a relative prediction error of 3.2 and 5.1% for GBs and CuO-GBs, respectively. On the other hand, Pb2+ equilibrium isotherms at 25°C were fairly presented by the Langmuir model, and the predicted saturation values were 5.48 and 15.69mg/g for GBs and CuO-GBs, respectively. CuO and CuO-GBs had similar Pb2+ saturation values (~ 16mg/g), although the latter demonstrated 4 times faster kinetic, thanks to fixation CuO on glass beads. Moreover, the chemical stability of copper oxide-coated glass beads was tested under different conditions. Recycling of copper oxide-coated glass beads was also investigated, and 90% of the surface was recovered using 0.01-M HNO3.

Preparation of hybrid conducting polymers blend nanocomposite for energy conversion using experimental data and TD-DFT/DMOl3 computations

In the presence of sodium dodecyl sulphate in an acidic solution while using ferric chloride as an oxidizing agent, a blend of three conducting polymers of poly (ortho-phenylene diamine) (PoPDA), poly (meta phenylene diamine), and polypyrrole was produced. ZrO2 nanoparticles were prepared via sol-gel method and a hybrid nanocomposite of the three conducting polymers blend and zirconium oxide nanoparticles (TCPB/ZrO2)HNC was synthesized. Using the Physical Vapor Deposition technology, a hybrid nanocomposite thin film was prepared from (TCPB/ZrO2)HNC. Density functional theory (DFT) was also used to develop optimization using TD-DFTD/Mol3 and Cambridge Serial Total Energy Bundle (TD-FDT/CASTEP). By closely matching the reported XRD and Raman spectra, the TD-DFT computations validated the molecular structure of the studied materials and confirmed its molecular structure. According to XRD calculations, (TCPB/ZrO2)HNC has an average crystallite size of 61.67 nm. The direct and indirect optical energy bandgaps for the (TCPB/ZrO2)HNC, are 2.352 and 2.253 eV, respectively. As measured by TD-DFT/DMol3, the isolated molecule of (TCPB/ZrO2) HNC has a bandgap of 2.415 eV. The optical properties suggested by CASTEP in TD-DFT agree quite well with the values obtained experimentally. The large optical energy bandgap of (TCPB/ZrO2)HNC is advantageous for various energy storage applications.

Cathodic arc deposition of high entropy alloy thin films with controllable microstructure

High entropy alloys (HEAs) are a novel class of materials exhibiting properties of high strength, high corrosion and oxidation resistance, and superb thermal stability. Cathodic arc deposition is an established physical vapor deposition (PVD) technology offering high deposition rate and high degrees of plasma ionization with controllable ion kinetic energy. Here we employed cathodic arc deposition to fabricate AlCrFeCoNiCu0.5 HEA thin films. To elucidate the growth mechanisms and microstructures of the HEA thin film microstructures, we varied arc and duct currents. The crystallography of the films was investigated using X-ray diffraction (XRD). The film chemistry and microstructure of the film-substrate interphase were comprehensively studied using transmission electron microscopy (TEM). Atomic force microscopy (AFM) was applied to study the surface morphology, and mechanical properties were evaluated using nanoindentation. It is demonstrated that the grain size in HEA thin films can be effectively controlled by the deposition rate, while the HEA film hardness and surface roughness are modulated by the grain size. The results presented here have important implications for the fabrication of HEA thin films using cathodic arc deposition as an industrially scalable technique.