Physical Vapor Deposition Process Research Articles

Role of sputtered atom and ion energy distribution in films deposited by physical vapor deposition: A molecular dynamics approach

We present a comparative molecular dynamics simulation study of copper film growth between various physical vapor deposition (PVD) techniques: a constant energy neutral beam, thermal evaporation, dc magnetron sputtering, high-power impulse magnetron sputtering (HiPIMS), and bipolar HiPIMS. Experimentally determined energy distribution functions were utilized to model the deposition processes. Our results indicate significant differences in the film quality, growth rate, and substrate erosion. Bipolar HiPIMS shows the potential for an improved film structure under certain conditions, albeit with increased substrate erosion. Bipolar HiPIMS (+180 V and 10% Cu+ ions) exhibited the best film properties in terms of crystallinity and atomic stress among the PVD processes investigated.

Tool life improvement for stamping dies in the coining process

ABSTRACT High temperature and high-speed pressing in minting operations lead to the failure of coin-stamping dies. As a result, new coining tools were required more frequently leading to lower operational productivity and higher production costs. This research has examined the effects of materials and surface coating selections on the tool life of the stamping dies in the coining process. The aim of this research was to explore the possibility of extending the tool life of stamping dies. The three kinds of materials under study were alloy tool steel, cold working tool steel, and hot working tool steel. Additionally, Titanium Nitride (TiN) and Chromium Nitride (CrN) surface coating materials using the Physical Vapour Deposition (PVD) process were investigated. The experiment results revealed that the hot working steel yielded the highest tool life of up to 1,300,000 coins, followed by cold working steel at 900,000 coins, and alloy tool steel at 600,000 coins. The CrN PVD coating provided up to more than 400,000 coins compared to TiN PVD coating on hot working tool steel.

Resource-efficient electrodes with metallized woven-glass-grid current collectors for lithium-ion batteries.

A novel class of resource-efficient, woven-glass-grid current collectors (CCs) for Li-ion batteries is introduced. These CCs are based on ultra-light multifilament glass threads, woven to a grid and surrounded with a thin metal layer (equivalent to a 1 µm-thick metal foil) in a roll-to-roll physical vapor deposition process. This saves > 90% of the required Cu and Al metals and reduces the mass of the CCs by > 80%. At the same time, the gravimetric capacity of anodes with graphite and cathodes with LiCoO2 active material increases by 48% and 14%, respectively, while full cells are characterized by an increase of 26%. Thus, the specific energy can be improved by 25%. A complete anode and cathode fabrication process from preparing the CCs and electrodes to cells is described and demonstrated in coin cell format. Coin cells with woven-glass-grid CCs achieved 300 cycles with a capacity retention of 93%, a Coulombic efficiency of > 99.9%, and a higher rate capability until a C-rate of 3C. This technology opens up new possibilities for designing ultralight CCs with dedicated surface properties for Li and beyond Li batteries.

Design and Manufacture of SiC/SiC Nozzle Guide Vanes With Environmental Barrier Coatings for High-Pressure Turbines

Abstract Increasing the efficiency of jet engines is essential to meet the demanded climate targets. Ceramic matrix composites (CMCs) are strong candidates for aircraft applications because they withstand high temperatures, while their density is two-thirds lower than that of conventional nickel-based alloys. This leads to cooling air savings and a lower overall engine weight, resulting in a potential reduction of emissions. To investigate the potential benefits and manufacturing techniques required for the introduction of CMC to the high-pressure turbine (HPT) of a modern jet engine, the geometry of a nozzle guide vane of an existing turbine was redesigned considering ceramic specific constraints. Then, the liquid silicon infiltration (LSI) process was used to manufacture silicon carbide fiber-reinforced silicon carbide (SiC/SiC) nozzle guide vanes (NGV). Hi-Nicalon S woven fabric was used together with a chemical vapor infiltration (CVI)-based fiber coating. The outer surface of the vane was ground to meet the requirements for surface roughness, and geometric and positional tolerances. Cylindrical, laser-drilled cooling holes were introduced for trailing edge cooling. In the final step, an environmental barrier coating (EBC) system consisting of yttrium disilicate (Y-DS) and yttrium monosilicate (Y-MS) layers was applied using physical vapor deposition (PVD) processing. Wind tunnel testing under technology readiness level (TRL) 4 will be performed and vane performance will be evaluated.

A HYBRID MEREC-TOPSIS APPROACH FOR THE IMPROVEMENT OF PHYSICAL VAPOUR DEPOSITED TITANIUM CARBO-NITRIDE COATING

Titanium carbo-nitride (TiCN) comes under the metal nitride group which can provide a combined property of titanium carbide (TiC) and titanium nitride (TiN) coating. TiCN Coating possess an excellent mechanical and tribological, properties which leads its application in many industries particularly in the Automotive and aerospace industries. TiCN films can be very hard and strong based on the composition and synthesis process. Physical Vapor Deposition (PVD) technique is widely used for the preparation of thin film coating because of its ability to precisely control the composition and thickness of the coatings. The properties of the developed coating significantly affect by the PVD process parameters and their levels. Multi-Criteria Decision Making (MCDM) methods are widely used in many sectors for the selection of process parameters based upon some specific criteria. In the present work TiCN coatings were synthesized by using one of the most widely used PVD method called magnetron sputtering. L16 orthogonal array was used as a design of experiment for the experimental work by varying the sputtering process parameters like bias voltage, N2 flow rate and substrate to target distance. After the synthesis, the developed films were tested using atomic force microscopy (AFM), Scanning electron microscopy (SEM), and Nanoindentation. From the characterization three response parameters such as hardness (H), Modulus of elasticity (E) and surface roughness (Ra) of the coating has been considered. A hybrid method based on improved removal effects of criteria- technique for order performance by similarity to ideal solution (MEREC-TOPSIS) approach has been considered for the for the process parameters selection. The results have also been compared with other weight calculation techniques. In all the cases it is observed that experiment no 16 and 15 have got the 1st and second rank respectively. However, experiment no 1 is the last rank in all the cases. From the correlation analysis it is found a strong positive correlation between MEREC-TOPSIS and other methods. The method provides a significant advancement in the selection of optimal parameters, ensuring enhanced coating properties crucial for industrial applications.

Investigation of high-detectivity self-powered photodetectors of Rubrene/Bi2Se3 hybrid Van der Waals heterojunction

This paper investigates the Vander Waals heterostructure of organic rubrene and topological insulator Bi2Se3 with an atomically abrupt interface with exciting applications in electronic and optoelectronic devices. This organic/inorganic heterostructure (OIH) was prepared using a simple two-step physical vapor deposition process; based on this hybrid structure, a self-powered photodetector was then constructed. The Dirac surface state at the heterointerface enhances the splitting and transferring of photo-generated carriers, resulting in improved device characteristics. Under 1064 nm, the prepared photodetectors demonstrated a maximum responsivity (6.37 A/W), a high detectivity (3.42 × 1010 Jones), and ultrafast photoresponse speeds with rise time (1.17 µs) and decay time (1.59 µs), respectively. These promising results suggest that these PDs can be used in various photodetection applications and may lead to developing new devices.

Investigation of mechanical morphological structural and electrochemical properties of PVD TiAlN coating: A detail experimental and its correlation with an analytical approach using the least square method

In this experimental investigation, a Physical Vapor Deposition (PVD) process was employed to deposit TiAlN coating onto a Si substrate. The nitrogen flow rate, bias voltage, and substrate-to-target distance were selected as input parameters, each with three different levels. The design of these input parameters was structured according to Taguchi's L9 Orthogonal Array (OA). Following deposition, the mechanical, microstructural, structural, and electrochemical properties of the TiAlN coating were meticulously characterized and analyzed to discern the influence of the selected parameters on its various properties. Microstructural analysis revealed a homogeneous structure throughout the film. Additionally, the mechanical properties of the film exhibited notable performance under the specified parameters. However, it was observed that no consistent trend could be identified across different properties concerning the applied parameters. To elucidate the complex relationships among these variables, the Least Squares Method (LSM) regression analysis technique was employed. This analytical approach facilitated the establishment of correlations among the diverse parameters, enhancing the understanding of their collective impact on the TiAlN coating properties. The understanding of analytical results will be useful for predicting the values between the two extremities to measure the performance parameters where the experimental results are not available.

Effect of Deposition Parameters on Micromechanical Properties and Machining Performance of CrN Coating for Wet Finish Turning of Ti6Al4V Alloy.

This study aims to optimize the performance of CrN coatings deposited on WC cutting tools for machining Ti6Al4V alloy, where the formation of built-up edge (BUE) is a prevalent and critical issue. In-house CrN coatings were developed using the PVD (Physical Vapor Deposition) process, with variations in deposition parameters including nitrogen gas pressure, bias voltage, and coating thickness. A comprehensive experimental approach encompassing deposition, characterization, and machining performance evaluation was employed to identify the optimal deposition conditions. The results indicated that CrN coatings deposited at a nitrogen gas pressure of 4 Pa, a bias voltage of -50 V, and a thickness of 1.81 µm exhibited superior performance, significantly reducing BUE formation and tool wear. These optimized coatings demonstrated enhanced properties, such as a higher elastic modulus and a lower coefficient of friction, which contributed to improved tool life and machining performance. Comparative studies with commercial CrN coatings revealed that the in-house developed coatings outperformed the commercial variants by approximately 65% in tool life, owing to their superior mechanical properties and reduced friction. This research highlights the potential of tailored CrN coatings for advanced machining applications and emphasizes the importance of optimizing deposition parameters to achieve high-performance tool coatings.

The detection of acetone in exhaled breath using gas Pre-Concentrator by modified Metal-Organic framework nanoparticles

Volatile organic compounds (VOCs) from exhaled breath are promising indicators for the diagnostics of human health conditions. However, the composition of breath is rather complex, including water vapors and various tiny amounts of gases and biomarkers. Pre-concentrator plays a significant role in capturing and concentrating target gas in the gas mixture. In this work, the MIL-101 (Cr) nanoparticles are coated with polydimethylsiloxane (PDMS) through physical vapor deposition process to concentrate acetone under high humidity and room temperature. Experimentally, the newly developed material exhibits significant improvement in signal intensity that is 76.3 times greater than a commercial reference material under relative humility of 80 %. The detection range is also proven to be desirable (from 100 ppb to 2500 ppb), capturing the spectrum of acetone concentrations typically found in human exhaled breath. Moreover, following a thermal desorption process, the device demonstrates a high degree of linearity with a coefficient of 0.9956. The modified metal–organic framework materials are made into a flexible thin-film-shape device, that could be embedded in a facemask. The proposed device could meet the critical requirements for sampling, concentrating and detecting of exhaled breath biomarkers, thereby opening a new opportunity as part of the flexible electronic systems on face masks to facilitate quantitative breath analyses.

Investigating the effect of SiO2 thin films with sculptured topographies on the alignment properties of liquid crystals

In the present work, sculptured thin films (STF) based on silicon dioxide (SiO2) induced on the indium tin oxide (ITO) coated substrates via glancing angle deposition (GLAD) technique using the physical vapor deposition (PVD) process. Our main motive to perform this work is to address the issues we have faced with the traditional alignment method and give a try to overcome those problems. Keeping these challenges in our mind, we are giving here an alternative to traditional method and explored this different alignment technique with GLAD process. We have fabricated a liquid crystal device (LCD) in a way of electrically-controlled birefringence (ECB) and placed the engineered substrates in anti-parallel alignment. Morphological, optical and electro-optic behaviour of resulting device has been studied in the ∼5 μm thick device. Effect of applied voltage on the morphology and electro-optic behaviour of liquid crystal has been established. Interestingly, LC material demonstrates electrically switchable birefringence colours viz. brown, green, pink, purple and mauve colour, under applied electric field in room temperature at 10X magnification under polarizing optical microscope. A very nice extinction and contrast has been obtained with fabricated ECB device, which elucidate the device quality with impeccable alignment without any disclination defects. Besides, the electro-optic characteristics it also shows a significant impact on the liquid crystal properties. The obtained results demonstrate nice optical retardation, a lower Frederick's threshold voltage i.e. 1.5 V and 19.03 dB higher contrast respectively. An impressive switching response time τon of 5.4 ms and τoff = 600 µs at 20 V has attained with respective device as well. Such change in parameters may correspond to the higher electrical torque experienced by the LC molecules on the application of applied field. Anchoring energy and pretilt angle of respective system has been calculated and correlated with observed behaviour. Thus, engineered device with this superior alignment method show remarkable electro-optic results which can open a new way for the development of fast LCD for advanced optical device applications.

Advances in Top Transparent Electrodes by Physical Vapor Deposition for Buffer Layer‐Free Semitransparent Perovskite Solar Cells

The advancements in halide perovskite materials, celebrated for their exceptional optoelectronic properties, have not only led to a remarkable increase in the efficiency of perovskite solar cells (PSCs) but also opened avenues for the development of semitransparent devices. Such devices are ideally suited for integration into building facades and for use in tandem solar cell configurations. However, depositing transparent electrodes (TEs) on top of the charge transport layers in PSC poses significant challenges. Physical vapor deposition (PVD), commonly used in the industry to prepare transparent conducting oxides (TCOs) as TEs, can introduce plasma‐induced damage during the process, which decreases the efficiency of the final devices. While incorporating a buffer layer is the typical approach to mitigate plasma damage, it also increases the complexity and costs of solar cell fabrication. This perspective focuses on the developments of buffer‐free semitransparent PSCs. It highlights the shift away from the typical approach of incorporating a buffer layer. Through a comprehensive analysis of recent research, this work presents successful cases of direct TCO deposition onto transport layers, evaluates scalability and stability, and concludes with recommendations for optimizing PVD processes in the fabrication of buffer‐free PSCs.

Influence of Bond Coat Roughness on Adhesion of Thermal Barrier Coatings Deposited by the Electron Beam–Physical Vapour Deposition Process

Thermal barrier coatings (TBCs) are effective protective and insulative coatings on hot section components of turbine engines. The quality and subsequent performance of the TBCs are strongly dependent on the adhesion between the coating and the metal substrate. The adhesion strength of TBCs varies depending on the substrate materials and coating, the coating technique used, the coating application parameters, the substrate surface treatments, and environmental conditions. Therefore, the roughness of the substrate surface has a significant effect on the performance of the TBC system. In this work, the roughness and microstructure of the 7YSZ (7 wt.% yttria-stabilised zirconia) top coat under different bond coat roughness treatments were studied. The purpose of this paper was to investigate the influence of the roughness of the bond coat on the adhesion of 7YSZ TBCs prepared by the electron beam–physical vapour deposition (EB-PVD) process. The VPA (vapour phase aluminium) bond coat was deposited on Inconel 718 nickel superalloy substrate using the above-the-pack technique. The ceramic top coat was applied to the bond coat using the EB-PVD process. The dependence between the TBC coating roughness and the bond coat roughness was determined. Adhesion strength measurements were performed according to the ASTM C 633 standard test method. The highest adhesion value observed in the tensile adhesion tests was 105 MPa. However, it was not determined whether the surface roughness of the bond coat affects the adhesion of the 7YSZ top coat.

Nanostructured multilayer Cr/CrN coatings on 316L stainless steel for proton exchange membrane fuel cell bipolar plates

Nowadays, hybrid surface modification approaches offer tailored solutions for improving the corrosion resistance and electrical conductivity of the bipolar plates (BPPs) in proton exchange membrane fuel cells (PEMFCs). In the present study, a combination of plasma nitriding and physical vapor deposition (PVD) processes was used to apply a nanometric Cr/CrN multilayer coating onto 316L stainless steel (SS316L) bipolar plates. The performance of the resulting plasma nitrided, PVD-coated, and combined plasma nitriding/PVD-coated SS316L BPPs was examined by phase and morphological characterizations, surface wettability measurements, interfacial contact resistance (ICR), and electrochemical investigations. Potentiodynamic and potentiostatic polarization evaluations, electrochemical impedance spectroscopy (EIS) and Mott-Schottky asessments were conducted on the coated samples in a simulated PEMFC cathode environment at temperatures of 25 °C and 75 °C. Results indicated that the Cr/CrN multilayer coating deposited on the plasma-nitrided 316L BPP exhibited a remarkable 100-fold improvement in corrosion resistance compared to the uncoated substrate. Also, the combination of nitriding and PVD resulted in a significant reduction of the ICR from 186 mΩ cm2 for the uncoated SS316L to 10.2 mΩ cm2 for the coated sample. Multilayer coatings based on the combination of plasma nitriding and PVD treatment can identified as promise candidates for BPP applications.

Process dependent properties of glassy polymer films revealed by molecular dynamics simulations

A molecular dynamics (MD) framework has been proposed to systematically simulate process (but not cooling rate) dependent properties of glassy polymer films. With the coarse-grained (CG) polylactide (PLA) of low molecular weight (MW), the simulated thermal properties of glassy films are confirmed to be surely decided by the routes to prepare them. While the glassy films initially prepared from the melt bulk are stable, the glassy film initially constructed from the glassy bulk appears to be unstable, featuring highest potential energy among those films and different averaged heat capacity from the bulk counterparts. Inspired by physical vapour deposition (PVD), a surface formation process is further applied to the unstable film to generate stable glassy polymer films. Similar to the PVD, an optimal temperature at which the film is most stable can be identified with lower potential energy than the conventional films, for which free surface and enhanced order of the middle layer are responsible. This work paves a way for obtaining simulated models of stable glassy films and experimentally preparing advanced glassy films for high MW polymers, which otherwise are hard to be realized by the PVD process.

Antibacterial Food Packaging Containing Stably Dispersed Cu Nanoparticles Synthesized by Novel Physical Vapor Deposition Process

Polymeric materials were modified by nanoparticles on powder (NPP) facility in which metal nanoparticles (Cu, Cu/Zn alloy etc.) are formed on the surface of rotating carrier powder by using physical vapor deposition process untile the metal content reached 0.3wt.%. The polymer material with metal nanoparticles deposited on their surface through the NPP process was then added to the raw polymer material at a ratio of 1 to 9. The mixture of modified polymer powder and raw polymer powder were then processd into a film by conventional processes such as hot melting, extrusion, T-die, and antibacterial characteristics of the film were investigated. We ultimately manufactured antibacterial food package using the film and conducted preservation test for two weeks at room temperature. Since food package containing 0.03wt.% Cu nanoparticles showed over 99.9% bacteria reduction rate, it slowed down the progress of deterioration significantly compared to conventional packages. For safety evaluation, the amount of copper released out was analyzed and a cytotoxicity test was also conducted.

Quantifying Organic Cation Ratios in Metal Halide Perovskites: Insights from X-ray Photoelectron Spectroscopy and Nuclear Magnetic Resonance Spectroscopy.

The employment of metal halide perovskites (MHPs) in various optoelectronic applications requires the preparation of thin films whose composition plays a crucial role. Yet, the composition of the MHP films is rarely reported in the literature, partly because quantifying the actual organic cation composition cannot be done with conventional characterization methods. For MHPs, NMR has gained popularity, but for films, tedious processes like scratching several films are needed. Here, we use mechanochemical synthesis of MA1-x FA x PbI3 powders with various MA+: FA+ ratios and combine solid-state NMR spectroscopy (ssNMR) and X-ray photoelectron spectroscopy (XPS) to provide a reference characterization protocol for the organic cations' quantification in either powder form or films. Following this, we demonstrate that organic cation ratio quantification on thin films with ssNMR can be done without scraping the film and using significantly less mass than typically needed, that is, employing a single ∼800 nm-thick MA1-x FA x PbI3 film deposited by pulsed laser deposition (PLD) onto a 1 × 1 in.2, 0.2 mm-thick quartz substrate. While background signals from the quartz substrate appear in the 1H ssNMR spectra, the MA+ and FA+ signals are easily distinguishable and can be quantified. This study highlights the importance of calibrating and quantifying the source and the thin film organic cation ratio, as key for future optimization and scalability of physical vapor deposition processes.

Electrochemical performance of boron- and nitrogen-doped tetrahedral amorphous carbon

Tetrahedral amorphous carbon (ta-C) is one of the most versatile carbon electrode materials available. The incorporation of various dopants in ta-C alters the structural, electrochemical, physical, and chemical properties which are tunable for various applications. Furthermore, doped ta-C (ta-C:X) can be deposited on many different substrate materials (metals, ceramics, plastics) and geometries (micro-electrodes to ultra large areas at continuous coating lines). In this work, we present a comparison in electrochemical performance of ta-C electrodes prepared by filtered laser-arc (a physical vapor deposition process), doped with nitrogen (ta-C:N) at various levels, doped by boron (ta-C:B), and doped by boron and nitrogen together (ta-C:B:N). The ta-C:N films were doped via N2 gas in the deposition chamber, while ta-C:B and ta-C:B:N were deposited via incorporation of the dopant into the graphite cathode used for film synthesis. Films coated on silicon (Si) and titanium (Ti) substrates were compared through cyclic voltammetry (CV) and electrochemical impedance spectroscopy (EIS). The Fe(CN)63-/4− and Ru(NH3)63+/2+redox systems were used to investigate the electrochemical characteristics of each ta-C:X film type. Boron-doped diamond (BDD), glassy carbon (GC), and undoped ta-C were used as control electrodes. It was found that all ta-C:X films exhibited appropriate rates of electron transfer, wide working potential window (ca. 3.7 V in KCl), and low capacitance. Specifically, the boronated films produced high heterogenous rate constant (k), the lowest double layer capacitance (Cdl), and a consequentially smaller RC time constant than BDD and GC. Incorporating boron into undoped and nitrogenated ta-C films stabilizes the formation of sp3 bonded content during deposition leading to films with a smoother surface and increased hardness. It is shown that the B-incorporated films exhibit no compromise in their electrochemical performance despite the increase in sp3 content. Due to its versatile nature, ta-C stands out as a material with a wide range of tunable properties for various applications.

Microstructure, mechanical properties, and wear behaviors of CrSiN films on oxynitriding-treated Vanadis 60 high-speed steel by the direct current magnetron sputtering process

This study utilized the direct current magnetron sputtering technique within the physical vapor deposition process to apply a chrome silicon nitride (CrSiN) coating onto the oxynitrided surface of Vanadis 60 high-speed steel. The experimental parameters include various deposition bias voltages (0, -25, -50, -75, and -100 V), a gas flow rate of 45/30 (Ar/N2) sccm, a power of 100 W, a voltage of 400 V, a deposition time of 2.5 h, and a deposition temperature of 225 °C. The research results show that the substrate formed an oxynitriding layer with a thickness of about 30 μm, while the surface hardness increased to about 1300 HV0.05. When the coatings were deposited at a bias voltage of -100 V, the CrSiN coatings possessed the highest hardness (5.74 GPa) and elastic modulus (110.94 GPa), thus, it had the best wear resistance (specific wear rate was 1.19×10−5, and 7.29×10−5 mm3·m−1·N−1 under the loads of 1.5 N and 3 N), and good corrosion resistance (corrosion current was 3.28×10−5 A·cm−2, and polarization resistance was 793.18 Ω·cm2 in a 0.1 N H2SO4 solution). Furthermore, transmission electron microscopy observations confirm that the CrSiN coatings had a significant amorphous structure.

Implementation of Numerical Model for Prediction of Temperature Distribution for Metallic-Coated Firefighter Protective Clothing

The aim of this study is to predict the distribution of temperature at various positions on silver-coated firefighter protective clothing when subjected to external radiant heat flux. This will be helpful in the determination of thermal protective performance. Firefighter clothing consists of three layers, i.e., the outer shell, moisture barrier and thermal liner. The outer shell is the exposed surface, which was coated with silver particles through a physical vapor deposition process called magnetron sputtering. Afterwards, these uncoated and silver-coated samples were exposed to radiant heat transmission equipment at 10 kW/m2 as per the ISO 6942 standard. Silver-coated samples displayed better thermal protective performance as the rate of temperature rise in silver-coated samples slowed. Later, a numerical approach was employed, contemplating the impact of metallic coating on the exterior shell. The finite difference method was utilized for solving partial differential equations and the implicit method was employed to discretize the partial differential equations. The numerical model displayed a good prediction of the distribution of temperature at different nodes with respect to time. The comparison of time vs. temperature graphs at different nodes for uncoated and silver-coated samples acquired from numerical solutions showed similar patterns, as witnessed in the experimental results.

Stable DC vacuum arc plasma generation from a 100 mm TiB2 cathode

Titanium diboride exhibits outstanding properties for hard and wear resistant coatings. However, efficient physical vapor deposition (PVD) processing through DC vacuum arc, with a deposition rate unreachable for any other PVD technique, is comparatively unexplored for TiB2 thin films due to challenges associated with the film synthesis process. In this work, we used an industrial scale arc plasma source having a plane cathode of 100 mm in diameter and a permanent magnet on its back side. We present analysis of the cathode surface, plasma generation/composition, as well as analysis of collected macroparticles. The cathode weight loss and the amount of generated macroparticles were measured as a function of process parameters (arc current and pressure, in both Ar and N2 gas). Plasma analysis shows average ion energies around 120 and 25 eV for Ti and B, respectively, and plasma ion composition of approximately 50 % Ti and 50 % B. The cathode weight loss was around 0.3–0.5 g/min, of which at least 25 % is estimated to be macroparticles. Notably, the intensity of the macroparticle generation was reduced with an increase in N2 pressure. Altogether, the results show a stable and reproducible plasma generation process and a high potential for the use of the cathodic arc as an efficient and useful method for deposition of metal borides.