Abstract The optical sensitive thin film by Ag nanoparticles doped SiO2/TiO2 hybrid was successfully deposited via sol-gel spin coating technique. Photo-induced polymerization of photosensitive Ag-doped SiO2/TiO2 hybrid initiated by irgacure 784 photoinitiator was illustrated under visible region by He Cd laser 442 nm. Silane coupling was used as a starting precursor to providing cross-linking in the photochemical reaction process. The structural properties and existing elements of photosensitive films were characterized by XRD, TEM and EDX. Meanwhile, surface morphology of the photosensitive hybrid films was monitored by FE-SEM. Moreover, the optical absorption of the photosensitive hybrid films was analyzed by UV–Vis spectroscopy. These results indicated that the compatibility of photosensitive hybrid material was formed. The SiO2/TiO2 photosensitive hybrid films with uniformly distributed Ag ions and intensive coloration characteristic for surface plasmon resonance phenomena relating to the enhancement of optical absorption in visible region. As-prepared photosensitive hybrid films with enhanced optical properties can be proposed for optical elements.
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