Fabrication of micro-lens arrays built in photosensitive hybrid films by UV-cured imprinting technique

Abstract

Photosensitive TiO2-contained organic–inorganic hybrid films were prepared by combining a low-temperature sol–gel process with a spin-coating technique. Optical properties and photochemical activities of the as-prepared hybrid sol–gel films were characterized by prism coupling technique, thermal gravimetric analysis, UV–Visible spectroscopy, and Fourier transform infrared spectroscopy. Advantages for fabrication of micro-lens arrays based on the as-prepared photosensitive hybrid films were demonstrated by a direct-contact lithography technique and a reflow technique, followed by an UV-cured imprinting technique. Results indicate that the as-prepared photosensitive hybrid materials have great applicability for the fabrication of photonic components. Micro-sphere lens arrays and micro-ellipsoid lens arrays with the diameter from 20 to 100 μm and built in the as-prepared hybrid films were obtained. Morphological and surface profile properties of the as-fabricated micro-lens arrays were characterized by scanning electron microscopy and surface profiler, respectively. Results indicate that the fabrication process of the micro-lens arrays is a simple, cost-effective and mass production process, and the as-prepared photosensitive hybrid materials have great potential applications for the fabrication of the micro-optical elements.