The possibility of using a number of methacrylate-containing N,N-diethyl-4-(phenyldiazenyl)anilines with various para-substituents with respect to the azo group (-H, -Br, -NO2) as photoinitiators of radical polymerization is considered. The electrochemical and photoluminescent properties of these compounds have been studied. In the presence of azo dyes, two-photon photopolymerization of pentaerythritol triacrylate was carried out by focused radiation from a femtosecond laser with a wavelength of 780 nm. Structures with minimum linear element sizes of 94 ± 5 nm were obtained by DLW nanolithography, as well as 3D microstructures of complex architecture.